Active micromixer using surface acoustic wave streaming

  • US 7,942,568 B1
  • Filed: 06/17/2005
  • Issued: 05/17/2011
  • Est. Priority Date: 06/17/2005
  • Status: Active Grant
First Claim
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1. An active micromixer, comprising:

  • a piezoelectric substrate having a surface;

    a microfluidic channel fluidically sealed on the surface of the substrate, containing a fluid that is acoustically coupled to the surface of the substrate;

    a single pair of opposing interdigital transducers on the surface of the substrate, wherein the interdigital transducers are paired opposite to one another and separated by the microfluidic channel; and

    an RF signal generator for exciting the opposing interdigital transducers and generating opposing surface acoustic waves that propagate on the surface of the substrate to the microfluidic channel and couple energy into the fluid normal to the surface in an active mixing region of the microfluidic channel defined by the acoustic aperture of the opposing interdigital transducers.

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