Interferometric modulator in transmission mode
First Claim
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1. A transmissive micromechanical device, comprising:
- a substrate;
a moveable membrane positioned on a first side of the substrate, the moveable membrane comprising a partially reflective mirror; and
a light source positioned on a second side of the substrate and configured to emit light incident on the second side of the substrate,wherein the movable membrane is configured to move from a first position to a second position,wherein with the movable membrane in the first position visible light of a desired wavelength range passes through the substrate and through the moveable membrane, andwherein with the movable membrane in the second position substantially all of the visible light of the desired wavelenght range is blocked.
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Abstract
A transmissive micromechanical device includes a substrate, an optical stack over the substrate and a moveable membrane over the optical stack. The moveable membrane may include a partially reflective mirror and be configured to move from a first position to a second position. When the movable membrane is in the first position the transmissive micromechanical device is configured to pass light of a predetermined color and when the movable membrane is in the second position, the micromechanical device is configured to block substantially all of light incident on the substrate.
305 Citations
34 Claims
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1. A transmissive micromechanical device, comprising:
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a substrate;
a moveable membrane positioned on a first side of the substrate, the moveable membrane comprising a partially reflective mirror; anda light source positioned on a second side of the substrate and configured to emit light incident on the second side of the substrate, wherein the movable membrane is configured to move from a first position to a second position, wherein with the movable membrane in the first position visible light of a desired wavelength range passes through the substrate and through the moveable membrane, and wherein with the movable membrane in the second position substantially all of the visible light of the desired wavelenght range is blocked. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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- 15. A transmissive mechanical device, comprising a first optical stack and a second optical stack selectably separated by a gap, wherein the first optical stack comprises a substantially transparent substrate, a first low refractive index layer, and a first high refractive index layer, wherein the second optical stack comprises a substantially transparent substrate, a second low refractive index layer, and a second high refractive index layer, wherein the first optical stack comprises two layers of MgF2 and two layers of SiC, wherein a first of the MgF2 layers is disposed on the substrate, a first of the SiC layers is disposed on the first MgF2 layer, a second of the MgF2 layers is disposed on the first SiC layer, and a second of the SiC layers is disposed on the second MgF2 layer.
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18. A transmissive mechanical device, comprising:
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a first optical stack separated by a gap from a second optical stack; a light source positioned on a first side of the first optical stack and configured to emit light through the first optical stack to the second optical stack; and a lens configured to focus light exiting the second optical stack, wherein the first optical stack comprises a glass substrate, at least one material with an index of refraction greater than 2 and at least one material with an index of refraction less than 1.3, and wherein the second optical stack comprises at least one material with an index of refraction greater than 2 and at least one material with an index of refraction less than 1.3. - View Dependent Claims (19, 20, 21, 22, 23)
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24. A transmissive interferometric modulator (“
- IMOD”
), comprising;a transparent substrate; a first reflecting layer disposed on a first surface of the transparent substrate; a movable membrane comprising a second reflecting layer, wherein the second reflecting layer and the first reflecting layer form a variable optical cavity; and a light source, wherein the transparent substrate is positioned between the light source and the movable membrane, wherein the light source is configured to emit light incident of the transparent substrate, wherein the variable optical cavity is adjusted as the movable membrane moves from a first position to a second position, and wherein when the movable membrane is in the first position, the movable membrane allows transmission of wavelengths in the range of ultraviolet or infrared light, and absorbs substantially the entire wavelength range of incident visible light. - View Dependent Claims (25, 26, 27, 28, 29, 30, 31, 32, 33, 34)
- IMOD”
Specification