Highly reflective MEMS device

• US 7,957,049 B1
• Filed: 02/12/2010
• Issued: 06/07/2011
• Est. Priority Date: 02/12/2010
• Status: Expired due to Fees

• Current Assignee: Sharp Kabushiki Kaisha (Hon Hai Precision Industry Co., Ltd.)
• Original Assignee: Sharp Kabushiki Kaisha (Hon Hai Precision Industry Co., Ltd.)
• Inventors: Parry-Jones, Lesley Anne
• Primary Examiner(s): Mack; Ricky L
• Assistant Examiner(s): JONES, JAMES
• Application Number:
  US12/704,560
• Time in Patent Office: 480 Days
• Field of Search: 359/290, 359/291
• US Class Current: 359/290
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means

Abstract

An interference-based MEMS device having a lower substrate including a substrate electrode; a lower membrane spaced apart from the lower substrate by a lower gap, the lower membrane including a lower membrane electrode; an upper membrane located on a side of the lower membrane opposite the lower substrate and spaced apart from the lower membrane by an upper gap, the upper membrane including an upper membrane electrode; and control circuitry configured to provide control voltages to the electrodes of the lower substrate, the lower membrane and the upper membrane to change the dimensions of the lower gap and the upper gap to control the reflective properties of the device with respect to light incident upon the lower substrate.

Claims

1. An interference-based MEMS device, comprising:

a lower substrate including a substrate electrode;

a lower membrane spaced apart from the lower substrate by a lower gap, the lower membrane including a lower membrane electrode;

an upper membrane located on a side of the lower membrane opposite the lower substrate and spaced apart from the lower membrane by an upper gap, the upper membrane including an upper membrane electrode; and

control circuitry configured to provide control voltages to the electrodes of the lower substrate, the lower membrane and the upper membrane to change the dimensions of the lower gap and the upper gap to control the reflective properties of the device with respect to light incident upon the lower substrate.

2. The device according to claim 1, wherein the control circuitry is configured to control the dimensions of the lower gap and the upper gap independently.

3. The device according to claim 1, wherein the lower substrate and the lower membrane are substantially transmissive, and the upper membrane is substantially reflective.

4. The device according to claim 1, wherein the control circuitry is configured to provide a first mode of operation in which the dimension of the lower gap is reduced to zero such that the lower membrane is held in contact with the lower substrate, and a colour of light reflected by the device is determined by controlling the dimension of the upper gap.

5. The device according to claim 4, wherein during the first mode of operation when the dimension of the upper gap is at an equilibrium state the colour of the reflected light is red, and when the dimension of the upper gap is reduced to zero the colour of the reflected light appears substantially black.

6. The device according to claim 5, wherein at corresponding intermediate dimensions of the upper gap the colour of the reflected light includes blue and green.

7. The device according to claim 1, wherein the control circuitry is configured to provide a second mode of operation in which the dimension of the upper gap is reduced to zero such that the upper membrane is held in contact with the lower membrane, and the intensity of light reflected by the device is determined by controlling the dimension of the lower gap.

8. The device according to claim 7, wherein during the second mode of operation when the dimension of the lower gap is at an equilibrium state the reflected light is white, and when the dimension of the lower gap is reduced to zero the reflected light appears substantially black.

9. The device according to claim 7, wherein at corresponding intermediate dimensions of the lower gap the reflected light includes respective grey levels.

10. The device according to claim 1, wherein the lower membrane electrode and the upper membrane electrode are patterned to define an array of pixels independently controlled by the control circuitry.

11. The device according to claim 1, wherein the lower membrane and the upper membrane are attached to the lower substrate at intervals.

12. The device according to claim 1, wherein the lower gap and upper gap are air-filled.

13. The device according to claim 12, wherein the lower membrane and the upper membrane include via holes to facilitate air entering and exiting the lower gap and upper gap.

14. A portable device comprising a display, wherein the display comprises an interference-based MEMS device according to claim 1.

15. A method of controlling an interference-based MEMS device according to claim 4, wherein colours of reflected light requiring multiple peaks in the visible spectrum are provided in the first mode of operation by rapidly varying the dimension of the upper gap so as to be perceived by a viewer as a single colour.

16. A method of controlling an interference-based MEMS device according to claim 7, wherein levels of grey scale are provided by rapidly varying the dimension of the lower gap so as to be perceived by a viewer as a single grey scale level.

17. A method of controlling an interference-based MEMS device, the device including a lower substrate including a substrate electrode;

a lower membrane spaced apart from the lower substrate by a lower gap, the lower membrane including a lower membrane electrode;

an upper membrane located on a side of the lower membrane opposite the lower substrate and spaced apart from the lower membrane by an upper gap, the upper membrane including an upper membrane electrode; and

control circuitry configured to provide control voltages to the electrodes of the lower substrate, the lower membrane and the upper membrane to change the dimensions of the lower gap and the upper gap to control the reflective properties of the device with respect to light incident upon the lower substrate, the method comprising;

during a first mode of operation reducing the dimension of the lower gap to zero such that the lower membrane is held in contact with the lower substrate, and controlling the dimension of the upper gap to control a colour of light reflected by the device, wherein colours of reflected light requiring multiple peaks in the visible spectrum are provided by rapidly varying the dimension of the upper gap so as to be perceived by a viewer as a single colour;

during a second mode of operation reducing the dimension of the upper gap to zero such that the upper membrane is held in contact with the lower membrane, and controlling the intensity of light reflected by the device by controlling the dimension of the lower gap, wherein levels of grey scale are provided by rapidly varying the dimension of the lower gap so as to be perceived by a viewer as a single grey scale level; and

time sequentially combining the first and second modes of operation so as to be perceived by a viewer to produce an unsaturated colour of light reflected by the device.