MEMS mirror driven by one motion with oscillations of different frequency for bidirectional rotation
First Claim
1. A method to oscillate a micro-electro-mechanical system (MEMS) mirror system comprising (1) a mirror coupled to a frame and (2) a first actuator elastically coupled to the frame to oscillate the mirror, the mirror being rotatable about a first axis, the mirror having a first resonant frequency for oscillating about the first axis, the frame being rotatable about a second axis, the frame including the mirror having a second resonant frequency for oscillating about the second axis, the method comprising:
- causing the first actuator to impart a first motion to the frame, the first motion comprising (1) a first periodic movement with a first amplitude and a first frequency, and (2) a second periodic movement with a second amplitude and a second frequency superimposed on the first periodic movement, the second frequency being greater than the first frequency by at least one order of magnitude, the first frequency being equal to one the first and the second resonant frequencies, and the second frequency being equal to the other one of the first and the second resonant frequencies.
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Abstract
A micro-electro-mechanical system (MEMS) mirror system has an actuator that imparts a motion with a first periodic movement of high frequency superimposed a second periodic movement of low frequency to a frame and a mirror coupled to the frame so that the mirror rotates about two axes. The mirror is coupled by springs to the frame so the mirror is rotatable about a first axis. The frame has pivots each coupled by springs to actuators so the frame is rotatable about a second axis. The mirror has a first resonant frequency and the frame including the mirror has a second resonant frequency. The low frequency of the second periodic movement is equal to one of the first and the second resonant frequencies, and the high frequency of the first periodic movement is equal to the other one of the first and the second resonant frequencies.
16 Citations
24 Claims
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1. A method to oscillate a micro-electro-mechanical system (MEMS) mirror system comprising (1) a mirror coupled to a frame and (2) a first actuator elastically coupled to the frame to oscillate the mirror, the mirror being rotatable about a first axis, the mirror having a first resonant frequency for oscillating about the first axis, the frame being rotatable about a second axis, the frame including the mirror having a second resonant frequency for oscillating about the second axis, the method comprising:
causing the first actuator to impart a first motion to the frame, the first motion comprising (1) a first periodic movement with a first amplitude and a first frequency, and (2) a second periodic movement with a second amplitude and a second frequency superimposed on the first periodic movement, the second frequency being greater than the first frequency by at least one order of magnitude, the first frequency being equal to one the first and the second resonant frequencies, and the second frequency being equal to the other one of the first and the second resonant frequencies. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A micro-electro-mechanical system (MEMS) mirror system, comprising:
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a mirror within a frame, the mirror being coupled by a mirror spring to the frame, the mirror being rotatable about a first axis, the mirror having a first resonant frequency for oscillating about the first axis, the frame being rotatable about a second axis, the frame including the mirror having a second resonant frequency for oscillating about the second axis; a first actuator comprising a first arm coupled by a first actuator spring to the frame, the first arm configured to cause the mirror to oscillate about the first and the second axes; and voltage sources coupled to the first actuator, the voltage sources configured to cause the first actuator to move the first arm in a first motion comprising (1) a first periodic movement with a first amplitude and a first frequency, and (2) a second periodic movement with a second amplitude and a second frequency superimposed on the first periodic movement, the second frequency being greater than the first frequency by at least one order of magnitude, the first frequency being equal to one the first and the second resonant frequencies, and the second frequency being equal to the other one of the first and the second resonant frequencies. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24)
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Specification