Gas electron multiplier and manufacturing method for gas electron multiplication foil used for same as well as radiation detector using gas electron multiplier
First Claim
1. A gas electron multiplier using interaction between radiation and gas through photoelectric effects, comprising:
- a chamber filled with gas; and
a single gas electron multiplication foil arranged in the said chamber, whereinthe said gas electron multiplication foil is made of a plate-like multilayer body which is composed of a multilayer body where multiple plate-like insulation layers made of a macromolecular polymer material are stacked with a flat metal layer sandwiched in between and flat metal layers overlaid on both surfaces of said multilayer body,the flat metal layer having a thickness of approximately 5 μ
m sandwiched in between said multiple plate-like insulation layers and the flat metal layers overlaid on both surfaces of said multilayer body each have a thickness of approximately 5 μ
m andthe said plate-like multilayer is provided with a through-hole structure, said through-hole structure extending in the direction perpendicular to a plane of the flat metal layer sandwiched in between said multiple plate-like insulation layers and the flat metal layers overlaid on both surfaces of said multilayer body.
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Accused Products
Abstract
To attain objects to reduce the spread of electrons as compared with a conventional one without degrading the multiplication factor of electrons; to provide a large electron multiplication factor; and to improve positional resolution, there is provided a gas electron multiplier using interaction between radiation and gas through photoelectric effects including: a chamber filled with gas and a single gas electron multiplication foil arranged in the chamber wherein the gas electron multiplication foil is made of a plate-like multilayer body composed by having a plate-like insulation layer made of a macromolecular polymer material having a thickness of around 100 μm to 300 μm and flat metal layers overlaid on both surfaces of the insulation layer, and the plate-like multilayer body is provided with a through-hole structure.
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Citations
6 Claims
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1. A gas electron multiplier using interaction between radiation and gas through photoelectric effects, comprising:
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a chamber filled with gas; and a single gas electron multiplication foil arranged in the said chamber, wherein the said gas electron multiplication foil is made of a plate-like multilayer body which is composed of a multilayer body where multiple plate-like insulation layers made of a macromolecular polymer material are stacked with a flat metal layer sandwiched in between and flat metal layers overlaid on both surfaces of said multilayer body, the flat metal layer having a thickness of approximately 5 μ
m sandwiched in between said multiple plate-like insulation layers and the flat metal layers overlaid on both surfaces of said multilayer body each have a thickness of approximately 5 μ
m andthe said plate-like multilayer is provided with a through-hole structure, said through-hole structure extending in the direction perpendicular to a plane of the flat metal layer sandwiched in between said multiple plate-like insulation layers and the flat metal layers overlaid on both surfaces of said multilayer body. - View Dependent Claims (2, 3, 4, 5)
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6. A manufacturing method for a gas electron multiplication foil used in a gas electron multiplier using interaction between radiation and gas through photoelectric effects, comprising:
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overlaying flat metal layers on both surfaces of a plate-like insulation layer made of a macromolecular polymer material having a thickness of 50 μ
m to 300 μ
m;etching the said metal layers to a predetermined pattern; stacking a resultant of overlaying a flat metal layer on one surface of a plate-like insulation layer, which is made of a macromolecular polymer material having a thickness of 50 μ
m to 300 μ
m, on one or both surfaces of the said metal layers;etching outermost metal layers of the resultant obtained in the stacking step in accordance with the said predetermined pattern; removing all of the said insulating films through irradiation with a laser beam applied perpendicularly to the plane of said outermost metal layers in accordance with the said predetermined pattern; creating a through-hole extending in the direction perpendicular to the plane of the metal layers on the said outermost surfaces; and carrying out a desmear process using plasma and a chemical on surfaces of the said metal layers and a wall surface of the through-hole in the said insulation layers, wherein said metal layers have a thickness of approximately 5 μ
m.
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Specification