Component-tracking system and methods therefor

• US 8,010,483 B2
• Filed: 08/26/2010
• Issued: 08/30/2011
• Est. Priority Date: 09/29/2006
• Status: Active Grant

• Current Assignee: Lam Research Corporation
• Original Assignee: Lam Research Corporation
• Inventors: Jea, Hae-Pyng, Hsu, Tung, Huang, Chung-Ho, Seto, Jackie
• Primary Examiner(s): Wong; Don
• Assistant Examiner(s): Lodhi; Andalib F
• Application Number:
  US12/869,016
• Publication Number:
  US 20100325084A1
• Time in Patent Office: 369 Days
• Field of Search: None
• US Class Current: 707/601
• CPC Class Codes: G05B 19/418 Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
• CPC Class Codes: Y02P 90/02 Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
• CPC Class Codes: Y02P 90/80 Management or planning
• CPC Class Codes: Y10S 707/99943 Generating database or data structure, e.g. via user interface
• CPC Class Codes: Y10S 707/99945 Object-oriented database structure processing

Abstract

A system for facilitating plasma processing tool component management across plurality of tools is provided. The system includes means for receiving first component data for first plurality of components, including identification and usage history for a first plurality of components, at first database associated with first tool. The system also includes means for receiving second component data for second plurality of components at second database associated with second tool, which is different from first tool. The system further includes means for synchronizing first and second component data with third database. The synchronizing includes synchronizing between third database and at least one of first and second database rules that govern usage of at least one component of first and second plurality of components. The third database is coupled to exchange data with plurality of tools. The system yet also includes means for obtaining information, using rules and usage history data about given component prior to performing one of replacement, analysis, and maintenance.

Claims

1. A computer-implemented system for facilitating plasma processing tool component management across a plurality of tools, comprising:

means for receiving first component data for a first plurality of components, including at least one of a plasma processing system component identification and a plasma processing system usage history for said first plurality of components, at a first database associated with a first tool of said plurality of tools;

means for receiving second component data for a second plurality of components, including at least one of a plasma processing system component identification and a plasma processing system usage history for said second plurality of components, at a second database associated with a second tool of said plurality of tools, said second tool being different from said first tool;

means for synchronizing, using a processor said first component data and said second component data with a third database, said synchronizing including synchronizing in a computer memory between said third database and at least one of said first database and said second database a set of rules that governs usage of at least one component of said first plurality of components and said second plurality of components, said third database being coupled to exchange data with said plurality of tools, wherein said set of rules including at least one rule that governs at least one of maintaining and installing at least one plasma processing system component in said plasma processing system; and

means for obtaining information, using said set of rules and usage history data at least in said third database, about a given component prior to performing one of replacement, analysis, and maintenance on said given component at one of said plurality of tools.

2. The system of claim 1, wherein said obtaining information includes obtaining a recommendation regarding said maintenance on said given component.

3. The system of claim 1, wherein said set of rules specifies a first usage rule for a first application executed by said one of said plurality of tools, said set of rules specifies a second usage rule for a second application executed by said one of said plurality of tools, said first application being one of etching, deposition, and cleaning, said second application being another of said etching, said deposition, and said cleaning.

4. The system of claim 1, further comprising means for performing pattern recognition on usage data in said third database that pertains to components analogous to said given component.

5. The system of claim 1, wherein said synchronizing occurs automatically when said first tool is online.

6. The system of claim 1, wherein said set of rules specifies a first maintenance rule for a first user having a first skill level, said set of rules specifies a second maintenance rule for a second user having a second skill level.

7. The system of claim 1, further comprising means for performing maintenance forecast on components in said plurality of tools using said set of rules and data in said third database.

8. The system of claim 1, further comprising means for performing maintenance scheduling on components in said plurality of tools using said set of rules and data in said third database.

9. The system of claim 1, further comprising means for performing replacement scheduling on components in said plurality of tools using said set of rules and data in said third database.

10. A computer-implemented system for facilitating plasma processing tool component management across a plurality of tools, comprising:

computer readable code for receiving first component data for a first plurality of components, including at least one of a plasma processing system component identification and a plasma processing system usage history for said first plurality of components, at a first database associated with a first tool of said plurality of tools;

computer readable code for receiving second component data for a second plurality of components, including at least one of a plasma processing system component identification and a plasma processing system usage history for said second plurality of components, at a •

second database associated with a second tool of said plurality of tools, said second tool being different from said first tool;

computer readable code for synchronizing, using a processor, said first component data and said second component data with a third database, said synchronizing including synchronizing in a computer memory between said third database and at least one of said first database and said second database a set of rules that governs usage of at least one component of said first plurality of components and said second plurality of components, said third database being coupled to exchange data with said plurality of tools, wherein said set of rules including at least one rule that governs at least one of maintaining and installing at least one plasma processing system component in a plasma processing system; and

computer readable code for obtaining information, using said set of rules and usage history data at least in said third database, about a given component prior to performing one of replacement, analysis, and maintenance on said given component at one of said plurality of tools.

11. The system of claim 10, wherein said code for obtaining information includes code for obtaining a recommendation regarding said maintenance on said given component.

12. The system of claim 10, wherein said set of rules specifies a first usage rule for a first application executed by said one of said plurality of tools, said set of rules specifies a second usage rule for a second application executed by said one of said plurality of tools, said first application being one of etching, deposition, and cleaning, said second application being another of said etching, said deposition, and said cleaning.

13. The system of claim 10, further comprising code for performing pattern recognition on usage data in said third database that pertains to components analogous to said given component.

14. The system of claim 10, wherein said synchronizing occurs automatically when said first tool is online.

15. The system of claim 10, wherein said set of rules specifies a first maintenance nil for a first user having a first skill level, said set of rules specifies a second maintenance rule for a second user having a second skill level.

16. The system of claim 10, further comprising code for performing maintenance forecast on components in said plurality of tools using said set of rules and data in said third database.

17. The system of claim 10, further comprising code for performing maintenance scheduling on components in said plurality of tools using said set of rules and data in said third database.

18. The system of claim 10, further comprising code for performing replacement scheduling on components in said plurality of tools using said set of rules and data in said third database.