Thermally actuated microvalve with multiple fluid ports
First Claim
1. A MEMS device that comprises:
- a valve body formed of multiple planar layers, including an upper layer, a lower layer and an intermediate layer disposed between the upper layer and the lower layer, the intermediate layer defining a cavity therein;
an actuator disposed in the intermediate plate layer;
an elongated beam, having a first end, a second end, and a central portion disposed between the first end and the second end, the beam being disposed in the cavity, the central portion of the beam being attached to the actuator whereby the actuator can be selectively actuated to move the beam in a plane parallel to the planar layers between a first unactuated position and a second actuated position;
a first microvalve integrally formed with the first end of the beam for controlling a first fluid flow path through the cavity;
a second microvalve integrally formed with the second end of the beam for controlling a second fluid flow path through the cavity, there being substantially no fluid communication between the first fluid flow path and the second fluid flow path through the cavity;
a first port communicating with the cavity being defined by one of the upper layer and the lower layer in a location where communication between the first port and the cavity is one of substantially permitted and substantially blocked by the first microvalve when the beam is in the first position thereof and where communication between the first port and the cavity is the other of substantially permitted and substantially blocked by the first microvalve when the beam is in the second position thereof;
a second port communicating with the cavity being defined by one of the upper layer and the lower layer, the first fluid flow path through the cavity being defined between the first port and the second port;
a third port communicating with the cavity being defined by one of the upper layer and the lower layer in a location where communication between the third port and the cavity is one of substantially permitted and substantially blocked by the second microvalve with the beam when the beam is in the first position thereof; and
a fourth port communicating with the cavity being defined by one of the upper layer and the lower layer, the second fluid flow path through the cavity being defined between the third port and the fourth port.
5 Assignments
0 Petitions
Accused Products
Abstract
A MEMS device is disclosed having a single microvalve actuator for controlling multiple microvalves. Exemplary embodiments include a MEMS device including two microvalves formed on a beam positioned by an actuator, the two microvalves controlling separate flow paths between two separate pairs of ports; a device with a two-way pilot operated microvalve and a four-way pilot microvalve for controlling the two-way pilot operated microvalve; a device with two three-way microvalves actuated by a common microvalve actuator; and a two-way microvalve with a moveable microvalve element and a feedback port formed in the moveable element operable to regulate the pressure on an end of the moveable element relative to the movement of the moveable element between the first position and the second position. Also disclosed is a MEMS device including a beam with a plurality of apertures formed therein, resulting in a mass reduction of at least 10 percent.
167 Citations
16 Claims
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1. A MEMS device that comprises:
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a valve body formed of multiple planar layers, including an upper layer, a lower layer and an intermediate layer disposed between the upper layer and the lower layer, the intermediate layer defining a cavity therein; an actuator disposed in the intermediate plate layer; an elongated beam, having a first end, a second end, and a central portion disposed between the first end and the second end, the beam being disposed in the cavity, the central portion of the beam being attached to the actuator whereby the actuator can be selectively actuated to move the beam in a plane parallel to the planar layers between a first unactuated position and a second actuated position; a first microvalve integrally formed with the first end of the beam for controlling a first fluid flow path through the cavity; a second microvalve integrally formed with the second end of the beam for controlling a second fluid flow path through the cavity, there being substantially no fluid communication between the first fluid flow path and the second fluid flow path through the cavity; a first port communicating with the cavity being defined by one of the upper layer and the lower layer in a location where communication between the first port and the cavity is one of substantially permitted and substantially blocked by the first microvalve when the beam is in the first position thereof and where communication between the first port and the cavity is the other of substantially permitted and substantially blocked by the first microvalve when the beam is in the second position thereof; a second port communicating with the cavity being defined by one of the upper layer and the lower layer, the first fluid flow path through the cavity being defined between the first port and the second port; a third port communicating with the cavity being defined by one of the upper layer and the lower layer in a location where communication between the third port and the cavity is one of substantially permitted and substantially blocked by the second microvalve with the beam when the beam is in the first position thereof; and a fourth port communicating with the cavity being defined by one of the upper layer and the lower layer, the second fluid flow path through the cavity being defined between the third port and the fourth port. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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Specification