Printable static interferometric images

• US 8,023,191 B2
• Filed: 05/07/2008
• Issued: 09/20/2011
• Est. Priority Date: 05/07/2008
• Status: Expired due to Fees

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: Qualcomm MEMS Technologies Incorporated (Qualcomm, Inc.)
• Inventors: Brinkley, Patrick F., Miles, Mark W., Xu, Gang, Griffiths, Jonathan C., Bita, Ion, Kothari, Manish, Khonsari, Nassim, Arbuckle, Brian W.
• Primary Examiner(s): FONT, FRANK G
• Application Number:
  US12/116,791
• Publication Number:
  US 20090279174A1
• Time in Patent Office: 1,231 Days
• Field of Search: 359/580, 359/589, 359/900, 430/1, 430/2, 430/7, 430/321, 347 2- 4
• US Class Current: 359/580
• CPC Class Codes: B41M 3/003 on optical devices, e.g. lens elements; for the production of optical devices production by thermal imaging means B41M5/265
• CPC Class Codes: G02B 5/26 Reflecting filters G02B5/28 takes precedence
• CPC Class Codes: G02B 5/288 comprising at least one thin film resonant cavity, e.g. in bandpass filters
• CPC Class Codes: Y10S 359/90 Methods

Abstract

Methods of fabricating a static interferometric image device and static interferometric image device formed by the same are disclosed. In one embodiment, a method includes providing a substrate. A plurality of liquid layers are formed over the substrate by an inkjet process such that the layers are lateral to one another. The liquid layers contain a solidifiable material or particles. Then, the plurality of liquid layers are solidified to form a plurality of solid layers. In some embodiments, the substrate includes pre-defined cavities, and the liquid layers are formed in the cavities. In other embodiments, the substrate includes a substantially planar, stepped, or continuously transitioning surface, and the liquid layers are formed on the surface. The inkjet process provides optical fillers or spacers for defining interferometric gaps between absorbers and reflectors in the display device, based at least partially on an image that the display device is designed to display.

Claims

1. A method of making a static interferometric image device, the method comprising:

performing a printing process over regions of a substrate, the printing process comprising depositing one or more materials that define at least part of an optical path in each region, the printing process selectively forming at least two different layers in two different regions to produce two different interferometric colors;

forming an absorber over each region of the substrate; and

forming a reflector opposing the absorber over each region of the substrate, the reflector being spaced from the absorber by an optical cavity, the optical cavity forming the optical path;

wherein performing the printing process comprises depositing nothing in some of the regions; and

depositing the material in other regions.

2. A method of making a static interferometric image device, the method comprising:

performing a printing process over regions of a substrate, the printing process comprising depositing one or more materials that define at least part of an optical path in each region, the printing process selectively forming at least two different layers in two different regions to produce two different interferometric colors;

forming an absorber over each region of the substrate; and

forming a reflector opposing the absorber over each region of the substrate, the reflector being spaced from the absorber by an optical cavity, the optical cavity forming the optical path,

wherein performing the printing process further comprises depositing the one or more materials over different regions such that there are three different layers in three different regions to produce three different interferometric colors.

3. The method of claim 2, wherein each of the three different layers is formed in the optical cavity in each region of the substrate.

4. The method of claim 2, wherein each of the three different layers is formed outside the optical cavity in each region of the substrate, and wherein each of the three different layers dictates a distance between the absorber and the reflector in each region of the substrate.

5. The method of claim 2, wherein performing the printing process comprises forming at least three different layers that have different thicknesses in the three different regions.

6. The method of claim 2, wherein performing the printing process comprises forming at least three different layers that have different indices of refraction in the three different regions.

7. The method of claim 2, wherein performing the printing process comprises forming at least three different layers that have different thicknesses and different indices of refraction in the three different regions.

8. The method of claim 2, wherein performing a printing process comprises performing the printing process over a substantially planar surface of the substrate.

9. The method of claim 8, further comprising forming an interferometric mask in at least part of spaces between the regions, wherein forming the interferometric mask comprises forming a transparent layer between the absorber and the reflector such that the transparent layer defines an optical path for producing a selected background interferometric color.

10. The method of claim 9, wherein forming the interferometric mask comprises blanket depositing the transparent layer under the three different layers over the substrate.

11. The method of claim 2, wherein the printing process comprises an inkjet process.

12. The method of claim 11, further comprising programming the inkjet process based on an image which the static interferometric image device is configured to display.

13. The method of claim 2, wherein forming the absorber comprises forming the absorber prior to forming the reflector.

14. The method of claim 2, wherein forming the absorber comprises forming the absorber after forming the reflector.

15. The method of claim 2, wherein each of the three different layers is formed in the optical cavity in each region of the substrate, and wherein the method further comprises depositing a transparent material over the three different layers after performing the printing process, such that the transparent material is interposed between one of the three different layers and one of the absorber and the reflector in each region of the substrate.

16. A method of making a static interferometric image device, the method comprising:

performing a printing process over regions of a substrate, the printing process comprising depositing one or more materials that define at least part of an optical path in each region, the printing process selectively forming at least two different layers in two different regions to produce two different interferometric colors;

forming an absorber over each region of the substrate;

forming a reflector opposing the absorber over each region of the substrate, the reflector being spaced from the absorber by an optical cavity, the optical cavity forming the optical path; and

defining the regions by a grid of recesses before performing the printing process.

17. The method of claim 16, wherein defining the regions comprises shaping the substrate using one of an embossing process, a photolithography and etching process, and an inscribing process.

18. The method of claim 16, wherein defining the regions comprises attaching a pre-formed lattice grid to a surface of the substrate.

19. The method of claim 16, further comprising forming an interferometric mask in at least part of spaces between the regions, wherein forming the interferometric mask comprises forming a transparent layer over a top surface of the grid and between the absorber and the reflector such that the transparent layer defines an optical path for producing a selected background interferometric color.

20. The method of claim 16, wherein each of the at least two different layers is formed outside the optical cavity in each region of the substrate, each of the at least two different layers dictating a distance between the absorber and the reflector in each region of the substrate, wherein performing the printing process comprises forming the layers in the recesses before forming the absorber and the reflector, such that each of the layers fills a portion of the recess in each region of the substrate, and wherein one of the absorber and the reflector is formed on the layer in each region of the substrate.

21. A method of making a static interferometric image device, the method comprising:

providing a substrate; and

forming a plurality of layers over the substrate by an inkjet process such that the layers are lateral to one another, the layers containing a solidifiable material or particles,

wherein the plurality of layers comprise a plurality of liquid layers,

wherein the method further comprises solidifying the plurality of layers to form a plurality of solid layers, and

wherein the substrate comprises a grid of recesses, and wherein forming the plurality of liquid layers comprises filling at least a portion of one or more of the recesses with a liquid composition.

22. The method of claim 21, wherein the grid of recesses is integrally formed with and of the same material as the substrate.

23. The method of claim 22, wherein providing the substrate comprises shaping the substrate using one of an embossing process, a photolithography and etching process, and an inscribing process.

24. The method of claim 21, wherein the grid of recesses is formed of a material different from the substrate.

25. The method of claim 24, wherein providing the substrate comprises attaching a pre-formed lattice grid to a surface of the substrate.

26. The method of claim 21, wherein each of the recesses has substantially the same depth.

27. The method of claim 21, wherein the recesses have different depths at least partially based on an image which the static interferometric image device is configured to display.

28. The method of claim 21, wherein filling the at least a portion of one or more of the recesses comprises providing the same liquid composition into different recesses in different amounts, based at least partially on an image which the static interferometric image device is configured to display.

29. The method of claim 21, wherein filling the at least a portion of one or more of the recesses comprises providing liquid compositions containing different concentrations of the same solidifiable material or particles into different recesses, based at least partially on an image which the static interferometric image device is configured to display.

30. The method of claim 21, wherein filling the at least a portion of one or more of the recesses comprises providing different liquid compositions into different recesses, based at least partially on an image which the static interferometric image device is configured to display, and wherein the different liquid compositions contain materials having different indices of refraction.

31. A method of making a static interferometric image device, the method comprising:

providing a substrate; and

forming a plurality of layers over the substrate by an inkjet process such that the layers are lateral to one another, the layers containing a solidifiable material or particles,

wherein the plurality of layers comprise a plurality of liquid layers,

wherein the method further comprises solidifying the plurality of layers to form a plurality of solid layers, and

wherein the method further comprises forming a reflective layer and an absorber layer over the plurality of solid layers such that the reflective layer and the absorber layer having a gap therebetween.

32. The method of claim 31, further comprising filling the gap between the reflective layer and the absorber with an at least partially transparent material.

33. A method of making a static interferometric image device, the method comprising:

providing a substrate; and

forming a plurality of layers over the substrate by an inkjet process such that the layers are lateral to one another, the layers containing a solidifiable material or particles,

wherein the plurality of layers comprise a plurality of liquid layers,

wherein the method further comprises solidifying the plurality of layers to form a plurality of solid layers,

wherein the substrate includes a surface having no recesses,

wherein forming the plurality of liquid layers comprises forming the plurality of liquid layers over the surface,

wherein the method further comprises forming a black matrix including a plurality of openings over the substrate, and

wherein forming the plurality of liquid layers comprises filling the plurality of openings with the liquid layers.

34. A method of making a static interferometric image device, the method comprising:

providing a substrate; and

forming a plurality of layers over the substrate by an inkjet process such that the layers are lateral to one another, the layers containing a solidifiable material or particles,

wherein the plurality of layers comprise a plurality of liquid layers,

wherein the method further comprises solidifying the plurality of layers to form a plurality of solid layers,

wherein the substrate includes a surface having no recesses,

wherein forming the plurality of liquid layers comprises forming the plurality of liquid layers over the surface,

wherein the method further comprises forming a transparent layer over the substrate, and

wherein forming the plurality of liquid layers comprises spacing the liquid layers apart to expose regions of the transparent layer.

35. A method of making a static interferometric image device, the method comprising:

providing a substrate; and

forming a plurality of layers over the substrate by an inkjet process such that the layers are lateral to one another, the layers containing a solidifiable material or particles,

wherein the plurality of layers comprise a plurality of liquid layers,

wherein the method further comprises solidifying the plurality of layers to form a plurality of solid layers, and

wherein the method further comprises further comprising forming a reflective layer over the substrate before or after forming the plurality of liquid layers.

36. The method of claim 35, wherein the substrate includes a surface having no recesses, and wherein forming the plurality of liquid layers comprises forming the plurality of liquid layers over the surface.

37. The method of claim 36, wherein the surface is substantially planar, stepped, or continuously transitioning.

38. The method of claim 36, wherein forming the plurality of liquid layers comprises providing the same liquid composition onto different regions of the surface in different amounts, based at least partially on an image which the static interferometric image device is configured to display.

39. The method of claim 36, forming the plurality of liquid layers comprises providing liquid compositions containing different concentrations of the same solidifiable material or particles onto different regions of the surface, based at least partially on an image which the static interferometric image device is configured to display.

40. The method of claim 36, wherein forming the plurality of liquid layers comprises providing different liquid compositions onto different regions of the surface, based at least partially on an image which the static interferometric image device is configured to display, and wherein the different liquid compositions contain materials of different indices of refraction.

41. A method of making a static interferometric image device, the method comprising:

providing a substrate; and

forming a plurality of layers over the substrate by an inkjet process such that the layers are lateral to one another, the layers containing a solidifiable material or particles,

wherein the plurality of layers comprise a plurality of liquid layers,

wherein the method further comprises solidifying the plurality of layers to form a plurality of solid layers, and

wherein the method further comprises forming an absorber layer over the substrate before or after forming the plurality of liquid layers.

42. A method of making a static interferometric image device, the method comprising:

providing a substrate; and

forming a plurality of layers over the substrate by an inkjet process such that the layers are lateral to one another, the layers containing a solidifiable material or particles,

wherein the plurality of layers comprise a plurality of liquid layers,

wherein the method further comprises solidifying the plurality of layers to form a plurality of solid layers,

wherein the method further comprises attaching a plate to the substrate after forming the plurality of liquid layers, and

wherein the plate includes a reflective or absorber layer formed on a surface thereof, and wherein the reflective or absorber layer faces the plurality of solid layers.

43. A method of making a static interferometric image device, the method comprising:

providing a substrate; and

forming a plurality of layers over the substrate by an inkjet process such that the layers are lateral to one another, the layers containing a solidifiable material or particles,

wherein the plurality of layers comprise a plurality of liquid layers,

wherein the method further comprises solidifying the plurality of layers to form a plurality of solid layers,

wherein the method further comprises forming a substantially transparent polymer layer over the substrate after forming the plurality of liquid layers;

and depositing a reflective or absorber layer on the polymer layer.