Method of performing an operation with rheological compound

• US 8,025,542 B2
• Filed: 05/14/2007
• Issued: 09/27/2011
• Est. Priority Date: 05/12/2006
• Status: Active Grant

• Current Assignee: Photon Dynamics Incorporated (KLA Corporation), Navy The USA As Represented By The Secretary of The
• Original Assignee: Photon Dynamics Incorporated (KLA Corporation), the united states of america as represented by the secretary of the navy
• Inventors: Eldring, Joachim, Kwak, Justin, Young, Lydia J., Cable, Alan, Bailey, Thomas H., Auyeung, Raymond, Visser, Joel, Pique, Alberto, Birrell, Steven Edward
• Primary Examiner(s): Ton; Toan
• Assistant Examiner(s): FEATHERLY, HANA SANEI
• Application Number:
  US11/748,281
• Publication Number:
  US 20080139075A1
• Time in Patent Office: 1,597 Days
• Field of Search: 445/61, 445/24
• US Class Current: 445/24
• CPC Class Codes: B23K 26/046 Automatically focusing the laser beam
• CPC Class Codes: B23K 26/048 by controlling the distance between laser head and workpiece
• CPC Class Codes: B23K 26/0613 having a common axis B23K26/0619 takes precedence
• CPC Class Codes: B23K 26/351 for trimming or tuning of electrical components
• CPC Class Codes: G02F 1/136259 Repairing; Defects

Abstract

An apparatus includes integrated review, material removal and material deposition functions. The apparatus performs the review, material removal and material deposition operations along the same optical axis. The apparatus includes, in part, a camera, a pair of lenses, and one or more lasers. A first lens is used to focus the camera along the optical axis on a structure formed on the target substrate undergoing review. The first lens is also used to focus the laser beam on the structure to remove a material present thereon if the reviewed structure is identified as requiring material removal. The second lens is used to focus the laser beam on a ribbon to transfer a rheological compound from a recessed well formed in the ribbon to the structure if the reviewed structure is identified as requiring material deposition.

Claims

1. A method of performing an operation on a substrate, the method comprising:

selectively positioning a first lens coaxially with an optical path of an imaging block to focus a camera disposed in the imaging block on a structure formed on the substrate to enable capturing of an image of the structure to review the structure;

delivering a laser beam along the optical path to the structure;

selectively positioning the first lens coaxially with the optical path if the reviewed structure is identified as requiring material removal;

focusing the laser beam on the structure using the first lens so as to remove a material present in the structure;

positioning a ribbon coated with a rheological compound in the path of the laser beam;

selectively positioning a second lens coaxially with the optical path if the reviewed structure is identified as requiring material transfer;

focusing the laser beam on the ribbon using the second lens so as to transfer the rheological compound to the structure;

maintaining a distance between the substrate and the first lens within the predefined range during the material removal; and

maintaining a distance between the ribbon and the second lens within the predefined range during the transfer of the rheological compound.

2. The method of claim 1 further comprising:

capturing an image of the structure after removal of the material therefrom.

3. The method of claim 1 further comprising:

capturing an image of the structure after deposition of the rheological compound on the substrate.

4. The method of claim 1 further comprising:

maintaining a distance between the ribbon and the substrate within a predefined range as the ribbon is moved relative to the substrate.

5. The method of claim 1 further comprising:

maintaining a variable shape aperture centered about the laser beam as the ribbon is move relative to the laser beam.

6. The method of claim 1 further comprising:

varying a variable aperture about a center of the laser beam so as to step across a field of view of the second lens.

7. The method of claim 1 wherein said laser beam has a plurality of wavelengths concurrently present therein.

8. The method of claim 1 further comprising:

selecting a wavelength of the laser beam.

9. The method of claim 1 further comprising:

varying a pulse length of the laser beam.

10. The method of claim 1 further comprising:

curing the rheological compound deposited on the substrate using the laser beam.

11. The method of claim 1 further comprising:

heating the rheological compound deposited on the substrate.

12. The method of claim 11 further comprising:

heating the rheological compound deposited on the substrate using a second laser beam.

13. The method of claim 1 wherein said substrate is a panel selected from a group consisting of flat panel display and solar panel.

14. The method of claim 1 wherein said deposited rheological compound provides an electrical connection between a pair of nodes.

15. The method of claim 1 wherein said ribbon comprises a first recessed well coated with the rheological compound, said first recessed well adapted to be positioned in the optical path of the laser beam, said ribbon being transparent to a wavelength of the laser beam.

16. The method of claim 15 wherein said ribbon further comprises a second recessed well coated with a second rheological compound, said second recessed well adapted to be positioned in the optical path of the laser beam.

17. The method of claim 1 further comprising:

preparing the ribbon on-demand.

18. The method of claim 17 wherein said ribbon comprises a first recessed well coated with the rheological compound, said first recessed well adapted to be positioned in the optical path of the laser beam, said ribbon being transparent to a wavelength of the laser beam.

19. The method of claim 18 wherein said ribbon further comprises a second recessed well coated with a second rheological compound, said second recessed well adapted to be positioned in the optical path of the laser beam.

20. The method of claim 1 further comprising:

moving a position of the first lens relative to the substrate and parallel in to the optical path; and

moving a position of the ribbon relative to the second lens and in parallel to the optical path.

21. The method of claim 20 further comprising:

parking the ribbon in a home position.

22. The method of claim 21 further comprising:

covering the ribbon when parked in the home position.

23. The method of claim 22 further comprising:

controlling a temperature of the covered ribbon.

24. The method of claim 21 further comprising:

moving the ribbon to a load/unload position to enable changing of the ribbon.

25. The method of claim 20 further comprising:

rotate the ribbon relative to the second lens about an axis parallel to the optical path.

26. The method of claim 25 further comprising:

rotating the ribbon at a first angle to park the ribbon in a home position.

27. The method of claim 25 further comprising:

rotating the ribbon at a second angle to enable changing of the ribbon.

28. The method of claim 1 further comprising:

moving a relative position of the ribbon in a plane perpendicular to the optical path of the laser beam.

29. The method of claim 1 further comprising:

moving a relative position of the substrate in a plane perpendicular to the optical path of the laser beam.