Support structures for electromechanical systems and methods of fabricating the same
First Claim
1. An electromechanical device, comprising:
- an optical stack located over a substrate;
a flexible layer spaced apart from the optical stack by a gap; and
a support structure located between the optical stack and the flexible layer, wherein the support structure comprisesa first layer comprising a material more rigid than the flexible layer, wherein the first layer of the support structure comprises a non-planarizing material, anda second layer overlying the first layer.
3 Assignments
0 Petitions
Accused Products
Abstract
A method of making an interferometric modulator element includes forming at least two posts, such as posts formed from spin-on glass, on a substrate. In alternate embodiments, the posts may be formed after certain layers of the modulator elements have been deposited on the substrate. An interferometric modulator element includes at least two spin-on glass support posts located on the substrate. In alternate embodiments, the support posts may be located over certain layers of the modulator element, rather than on the substrate. A method of making an interferometric modulator element includes forming a rigid cap over a support post. An interferometric modulator element includes support posts having rigid cap members.
251 Citations
37 Claims
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1. An electromechanical device, comprising:
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an optical stack located over a substrate; a flexible layer spaced apart from the optical stack by a gap; and a support structure located between the optical stack and the flexible layer, wherein the support structure comprises a first layer comprising a material more rigid than the flexible layer, wherein the first layer of the support structure comprises a non-planarizing material, and a second layer overlying the first layer. - View Dependent Claims (2, 3, 4, 5)
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6. An electromechanical device, comprising:
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an optical stack located over a substrate; support structures located over the substrate; a flexible layer spaced apart from the optical stack by a cavity, wherein the flexible layer is supported by the support structures; and at least one overlying support structure over a portion of the flexible layer, wherein the overlying support structure comprises a non-planarizing material, and wherein at least a portion of the at least one overlying support structure is located over a support structure. - View Dependent Claims (7, 8, 9, 10, 11, 12)
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13. An electromechanical device, comprising:
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an optical stack located over a substrate; an insulating layer located over the optical stack; support structures located over the substrate, wherein a width of the support structures increases with increased distance from the optical stack; and a deformable layer spaced apart from the optical stack and adjacent the support structures, wherein the support structures comprise; a rigid sublayer; and an insulating sublayer located between the rigid sublayer and the deformable layer. - View Dependent Claims (14, 15, 16, 17)
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18. An electromechanical device, comprising:
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an optical stack located over a substrate; a flexible layer spaced apart from the optical stack by a gap; and a support structure located between the optical stack and the flexible layer, wherein a width of the support structure increases with increased distance from the optical stack, and wherein the support structure comprises a first layer comprising a material more rigid than the flexible layer, and a second layer overlying the first layer. - View Dependent Claims (19, 20)
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21. An electromechanical device, comprising:
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an optical stack located over a substrate; support structures located over the substrate; a flexible layer spaced apart from the optical stack by a cavity, wherein the flexible layer is supported by the support structures; and at least one overlying support structure over a portion of the flexible layer, wherein the overlying support structure comprises the same material as the flexible layer, and wherein at least a portion of the at least one overlying support structure is located over a support structure. - View Dependent Claims (22, 23, 24)
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25. An electromechanical device, comprising:
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an optical stack located over a substrate; an insulating layer located over the optical stack; support structures located over the substrate; and a deformable layer spaced apart from the optical stack, wherein the support structures overlie the deformable layer, and wherein the support structures comprise; a rigid sublayer; and an insulating sublayer located between the rigid sublayer and the deformable layer. - View Dependent Claims (26, 27, 28)
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29. An electromechanical device, comprising:
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an optical stack located over a substrate; an insulating layer located over the optical stack; support structures located over the substrate; and a deformable layer spaced apart from the optical stack and adjacent the support structures, wherein the deformable layer comprises a mechanical sublayer and a reflective sublayer on the side of the deformable layer facing the optical stack, and wherein the support structures comprise; a rigid sublayer; and an insulating sublayer located between the rigid sublayer and the deformable layer. - View Dependent Claims (30, 31, 32, 33, 34, 35, 36, 37)
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Specification