Protection system for diaphragm of MEMS device

• US 8,091,430 B1
• Filed: 09/14/2010
• Issued: 01/10/2012
• Est. Priority Date: 09/14/2010
• Status: Expired due to Fees

• Current Assignee: The United States of America As Represented By The Secretary of Agriculture
• Original Assignee: the united states of america as represented by the secretary of the navy
• Inventors: Deeds, Michael, Cochran, Kevin
• Primary Examiner(s): Allen, Andre
• Application Number:
  US12/924,027
• Time in Patent Office: 483 Days
• Field of Search: None
• US Class Current: 73/706
• CPC Class Codes: G01L 19/0618 Overload protection
• CPC Class Codes: G01L 19/0645 using isolation membranes, specially adapted for protection

Abstract

A system for protecting a diaphragm of a microelectromechanical systems (MEMS) device includes a housing coupled to the MEMS device such that its sensing diaphragm is surrounded thereby. A perforated barrier in the housing is adjacent to the sensing diaphragm. A protection diaphragm in the housing has its first side exposed to an external environment of interest, and has its second side facing the perforated barrier and spaced apart therefrom. A fluid is disposed contiguously between the second side of the protection diaphragm and the sensing diaphragm.

Claims

1. A system for protecting a diaphragm of a microelectromechanical systems (MEMS) device, comprising:

a housing being adapted for fixedly coupling to the MEMS device wherein the diaphragm is a sensing diaphragm surrounded by said housing;

a perforated barrier being fitted in said housing and being situated adjacent to the sensing diaphragm;

a protection diaphragm being fitted in said housing,

wherein said protection diaphragm comprises a first side and a second side,

wherein said first side is exposed to an external environment of interest, and

wherein said second side faces said perforated barrier and is spaced apart therefrom; and

a fluid being disposed contiguously between said second side of said protection diaphragm and the sensing diaphragm.

2. A system as in claim 1, wherein said housing is fabricated in accordance with microchip technology.

3. A system as in claim 1, wherein said perforated barrier is rigid.

4. A system as in claim 1, wherein said fluid is a gaseous fluid.

5. A system as in claim 1, wherein said fluid is an incompressible fluid.

6. A system for protecting a diaphragm of a microelectromechanical systems (MEMS) device, comprising:

a microchip being adapted for fixedly coupling to a MEMS device,

wherein the diaphragm thereof is surrounded, wherein the diaphragm is a sensing diaphragm,

wherein said microchip defined by layers that, in succession relative to the sensing diaphragm, includes a first layer, a second layer, a third layer and a fluid,

wherein said first layer comprises a barrier with at least one perforation formed therethrough, said barrier spaced apart from the sensing diaphragm by a region,

wherein said second layer defines a volume in fluid communication with said barrier,

wherein said third layer comprises a protection diaphragm to seal off one side of said volume,

wherein flexural travel of said protection diaphragm is limited by said barrier, and

wherein said fluid is disposed contiguously in said volume, in said at least one perforation, and in said region.

7. A system as in claim 6, wherein said barrier is a rigid barrier.

8. A system as in claim 6, wherein said fluid is a gaseous fluid.

9. A system as in claim 6, wherein said fluid is an incompressible fluid.

10. A system for protecting a diaphragm of a microelectromechanical systems (MEMS) device, comprising:

a microchip being adapted for fixedly coupling to the MEMS device, wherein the diaphragm is a sensing diaphragm, said sensing diaphragm thereof is surrounded,

wherein said microchip defined by layers that, in succession relative to the sensing diaphragm, includes a first layer, a second layer, a third layer and a fluid,

wherein said first layer comprises a rigid barrier, which includes a plurality of perforations formed therethrough, said rigid barrier is spaced apart from the sensing diaphragm by a region,

wherein said second layer includes a volume in fluid communication with said barrier,

wherein said third layer comprises a protection diaphragm to seal off one side of said volume, said protection diaphragm includes a first side and a second side with said first side exposed to said volume and said second side exposed to an external environment of interest,

wherein flexural travel of said protection diaphragm into said volume is limited by said barrier to thereby prohibit over pressurization of the sensing diaphragm, and

wherein said fluid is disposed contiguously in said volume, in said at least one perforation, and in said region.

11. A system as in claim 10, wherein said fluid is a gaseous fluid.

12. A system as in claim 10, wherein said fluid is an incompressible fluid.