Solid organometallic compound-filled container and filling method thereof

• US 8,092,604 B2
• Filed: 05/12/2009
• Issued: 01/10/2012
• Est. Priority Date: 07/08/2003
• Status: Active Grant

• Current Assignee: Tosoh Finechem Corporation (Tosoh Corporation)
• Original Assignee: Tosoh Finechem Corporation (Tosoh Corporation)
• Inventors: Tomiyasu, Shizuo, Tokudome, Kohichi, Haga, Kenichi
• Primary Examiner(s): LUND, JEFFRIE ROBERT
• Application Number:
  US12/464,333
• Publication Number:
  US 20090283041A1
• Time in Patent Office: 973 Days
• Field of Search: 118/715, 118/723.VE, 118/726, 261/123
• US Class Current: 118/726
• CPC Class Codes: C23C 16/4481 by evaporation using carrier gas in contact with the source material C23C16/4486 takes precedence
• CPC Class Codes: C30B 25/14 Feed and outlet means for the gases; Modifying the flow of the reactive gases
• CPC Class Codes: Y10T 428/13 Hollow or container type article [e.g., tube, vase, etc.]

Abstract

A solid organometallic compound novel filled container stably supplies an apparatus for vapor phase epitaxial growth such as an MOCVD apparatus with a solid organometallic compound over a long term. The solid organometallic compound-filled container has a carrier gas inlet and a carrier gas outlet. The interior of the filled container is separated into a plurality of vertical compartments. A carrier gas introduced via the carrier gas inlet flows through each of the vertical compartments and is then discharged via the carrier gas outlet.

Claims

1. A solid organometallic compound-filled container comprising:

a container having an interior separated by at least one partition in a vertical direction such that said interior of said container comprises at least two vertically extending compartments;

a carrier gas inlet and a carrier gas outlet provided for said container for the supply of carrier gas to said container and the removal of carrier gas from said container;

said at least one partition comprises one or more partitions having an opening provided such that carrier gas can flow through said opening between respective said compartments;

said compartments each include a compartment inlet for carrier gas and a compartment outlet for carrier gas positioned such that gas will flow vertically through said compartments from one end of each of said compartments to the other, said compartment inlet and said compartment outlet in each of said compartments comprising one of said carrier gas inlet of said container, said carrier gas outlet of said container and said opening;

wherein, for each said compartment, said compartment inlet is positioned at one of (a) a position lower than or equal to one third of the internal height of said container from an internal bottom of said container, and (b) a position more than or equal to two thirds of the internal height of said container from said internal bottom of said container, and said compartment outlet is positioned at the other of (a) the position lower than or equal to one third of the internal height of said container from said internal bottom of said container, and (b) the position more than or equal to two thirds of the internal height of said container from said internal bottom of said container;

organometallic compound filled in each said compartment to a point at least above the lower of said compartment inlet and said compartment outlet; and

a charging port provided for each said compartment for filling more of said organometallic compound in a solid state into each said compartment.

2. The solid organometallic compound-filled container of claim 1, wherein said opening is positioned at one of (a) a lower part of said partition and (b) an upper part of said partition.

3. The solid organometallic compound-filled container of claim 1, wherein said solid organometallic compound is trimethylindium.

4. A solid organometallic compound-filled container comprising:

a container having an interior separated by at least one partition in a vertical direction such that said interior of said container comprises at least two vertically extending compartments;

a carrier gas inlet and a carrier gas outlet provided for said container for the supply of carrier gas to said container and the removal of carrier gas from said container;

said at least one partition comprises one or more partitions having an opening provided such that carrier gas can flow through said opening between respective said compartments;

said compartments each include a compartment inlet for carrier gas and a compartment outlet for carrier gas positioned such that gas will flow vertically through said compartments from one end of each of said compartments to the other, said compartment inlet and said compartment outlet in each of said compartments comprising one of said carrier gas inlet of said container, said carrier gas outlet of said container and said opening;

wherein, for each said compartment, said compartment inlet is positioned at one of (a) a position lower than or equal to one third of the internal height of said container from an internal bottom of said container, and (b) a position more than or equal to two thirds of the internal height of said container from said internal bottom of said container, and said compartment outlet is positioned at the other of (a) the position lower than or equal to one third of the internal height of said container from said internal bottom of said container, and (b) the position more than or equal to two thirds of the internal height of said container from said internal bottom of said container;

organometallic compound filled in each said compartment to a point at least above the lower of said compartment inlet and said compartment outlet; and

a charging port provided for each said compartment for filling more of said organometallic compound in a solid state into each said compartment;

wherein said at least one partition comprises a partition having said opening positioned such that carrier gas introduced from said carrier gas inlet flows through said solid organometallic compound of the one of said at least two vertically extending compartments, then through said opening, and then through said solid organometallic compound of the other of said at least two compartments to said carrier gas outlet.