Analog interferometric modulator device with electrostatic actuation and release

• US 8,098,416 B2
• Filed: 01/14/2010
• Issued: 01/17/2012
• Est. Priority Date: 06/01/2006
• Status: Expired due to Fees

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: Qualcomm MEMS Technologies Incorporated (Qualcomm, Inc.)
• Inventors: Kothari, Manish, Kogut, Lior, Sampsell, Jeffrey B
• Primary Examiner(s): Pinkney, Dawayne
• Application Number:
  US12/687,850
• Publication Number:
  US 20100118382A1
• Time in Patent Office: 733 Days
• Field of Search: 359290-292, 359223-225, 359/245, 359260-263, 359/298, 359301-303, 359317-318, 359/237, 359/242, 359/295
• US Class Current: 359/291
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26

Abstract

A microelectromechanical system (MEMS) device includes a first electrode, a second electrode electrically insulated from the first electrode, and a third electrode electrically insulated from the first electrode and the second electrode. The MEMS device also includes a support structure which separates the first electrode from the second electrode and a reflective element located and movable between a first position and a second position. The reflective element is in contact with a portion of the device when in the first position and is not in contact with the portion of the device when in the second position. An adhesive force is generated between the reflective element and the portion when the reflective element is in the first position. Voltages applied to the first electrode, the second electrode, and the third electrode at least partially reduce or counteract the adhesive force.

Claims

1. An electromechanical systems device comprising:

a first electrode;

an electrically nonconductive layer over the first electrode;

a second electrode electrically insulated from the first electrode;

a third electrode electrically insulated from the first electrode and the second electrode;

a support structure that separates the first electrode from the second electrode, the third electrode including an electrically conductive portion of the support structure that separates the first electrode from the second electrode; and

a reflective element movable between a first position and a second position upon application of a voltage difference between the first electrode and the second electrode, the reflective element substantially parallel to and spaced from the electrically nonconductive layer when the reflective element is in the second position, the reflective element substantially parallel to and in contact with a portion of the electrically nonconductive layer when the reflective element is in the first position, wherein at least a portion of the third electrode is lower than the reflective element when the reflective element is in the second position, and wherein at least a portion of the third electrode is higher than the reflective element when the reflective element is in the first position,

wherein an adhesive force is generated between the reflective element and the portion of the electrically nonconductive layer when the reflective element is in the first position, and wherein the device is configured such that voltages applied to the first electrode, the second electrode, and the third electrode at least partially reduce or counteract the adhesive force.

2. The device of claim 1, wherein the third electrode is supported by the support structure.

3. The device of claim 1, wherein the support structure includes one or more posts, and the third electrode includes an electrically conductive portion of at least one of the one or more posts.

4. The device of claim 3, wherein the support structure includes a plurality of posts, each post having an electrically conductive portion, and the third electrode includes the electrically conductive portions of the plurality of posts.

5. The device of claim 4, wherein the plurality of posts are positioned substantially symmetrically relative to the reflective element.

6. The device of claim 1, wherein the reflective element includes a first layer and a second layer over the first layer.

7. The device of claim 6, wherein the first layer is more flexible than the second layer.

8. The device of claim 6, wherein the first layer is thinner than the second layer.

9. The device of claim 6, wherein the second layer covers a central portion of the first layer and does not cover one or more edge portions of the first layer.

10. The device of claim 6, wherein at least one of the first layer and the second layer is electrically conductive.

11. The device of claim 1, wherein the reflective element includes end portions that are thinner than a center portion.

12. The device of claim 1, wherein the reflective element includes one or more extensions above an upper surface of the reflective element and extending toward the second electrode.

13. The device of claim 12, wherein the one or more extensions are on or near one or more edge portions of the reflective element and have a height above the upper surface of the reflective element that is about 1/3 to about 1/2 of a thickness of a central portion of the reflective element.

14. The device of claim 1, wherein the second electrode includes one or more portions extending toward the reflective element.

15. The device of claim 1, wherein the third electrode includes one or more portions extending toward the reflective element.

16. The device of claim 1, wherein the support structure includes a mechanical layer and the reflective element includes a portion of the mechanical layer.

17. The device of claim 1, wherein the support structure includes a mechanical layer and the reflective element is mechanically coupled to the mechanical layer.

18. The device of claim 17, wherein the reflective element is spaced from and substantially parallel to the mechanical layer.

19. The device of claim 1, further including:

a substrate that is transparent or translucent to light; and

an optical stack over the substrate, the optical stack partially transparent or translucent and partially reflective to the light,

wherein at least a portion of the optical stack is electrically conductive, the electrically conductive portion including the first electrode.

20. The device of claim 1, further comprising:

a display;

a processor that is configured to communicate with the display, the processor being configured to process image data; and

a memory device that is configured to communicate with the processor.

21. The device of claim 20, further comprising a driver circuit configured to send at least one signal to the display.

22. The device of claim 21, further comprising a controller configured to send at least a portion of the image data to the driver circuit.

23. The device of claim 20, further comprising an image source module configured to send the image data to the processor.

24. The device of claim 23, wherein the image source module includes at least one of a receiver, transceiver, and transmitter.

25. The device of claim 20, further comprising an input device configured to receive input data and to communicate the input data to the processor.

26. An electromechanical systems device comprising:

a first means for conducting electricity;

means for electrically insulating, the insulating means over the first conducting means;

a second means for conducting electricity, the second conducting means electrically insulated from the first conducting means;

a third means for conducting electricity, the third conducting means electrically insulated from the first conducting means and the second conducting means;

means for separating the first conducting means from the second conducting means, the third conducting means including an electrically conductive portion of the means for separating the first conducting means from the second conducting means; and

means for reflecting light, the reflecting means movable between a first position and a second position upon application of a voltage difference between the first conducting means and the second conducting means, the reflecting means substantially parallel to and spaced from the insulating means when the reflecting means is in the second position, the reflecting means substantially parallel to and in contact with a portion of the insulating means when the reflecting means is in the first position, wherein at least a portion of the third conducting means is lower than the reflecting means when the reflecting means is in the second position, and wherein at least a portion of the third conducting means is higher than the reflecting means when the reflecting means is in the first position,

wherein an adhesive force is generated between the reflecting means and the portion of the insulating means when the reflecting means is in the first position, and wherein the device is configured such that voltages applied to the first conducting means, the second conducting means, and the third conducting means at least partially reduce or counteract the adhesive force.

27. The device of claim 26, wherein at least one of the first conducting means, the second conducting means, and the third conducting means includes an electrode.

28. The device of claim 26, wherein the separating means includes a mechanical layer and one or more support posts.

29. The device of claim 28, wherein the third conducting means includes an electrically conductive portion of at least one of the one or more support posts.

30. The device of claim 26, wherein the reflecting means includes a reflective element disposed between the first conducting means and the second conducting means.