Substrate processing method and substrate processing apparatus

• US 8,114,781 B2
• Filed: 06/27/2007
• Issued: 02/14/2012
• Est. Priority Date: 06/29/2006
• Status: Active Grant

• Current Assignee: Tokyo Electron Limited
• Original Assignee: Tokyo Electron Limited
• Inventors: Nishimura, Eiichi, Yatsuda, Koichi
• Primary Examiner(s): Tran, Binh X
• Application Number:
  US11/769,147
• Publication Number:
  US 20080003836A1
• Time in Patent Office: 1,693 Days
• Field of Search: 438/710, 438/723, 438/724, 438/743, 438/744
• US Class Current: 438/710
• CPC Class Codes: H01L 21/31116 by dry-etching
• CPC Class Codes: H01L 21/67207 comprising a chamber adapted to a particular process

Abstract

A substrate processing method capable of selectively removing a nitride film. Oxygen plasma containing plasmarized oxygen gas is made to be in contact with a silicon nitride film, which is made of SiN, of a wafer to thereby cause the silicon nitride film to be changed to a silicon monoxide film. The silicon monoxide film is selectively etched by hydrofluoric acid generated from HF gas supplied toward the silicon monoxide film.

Claims

1. A substrate processing method for processing a substrate having a thermally-oxidized film formed by thermal oxidation processing and a nitride film in a chamber, comprising:

an oxygen-containing plasma contact step of causing oxygen-containing plasma to be in contact with the substrate; and

an HF gas supply step of supplying HF gas toward the substrate with which the oxygen-containing plasma has been in contact,

wherein the nitride film comprises a silicon nitride film and is changed to a silicon monoxide film in said oxygen-containing plasma contact step, and

wherein, in said HF gas supply step, water molecules are removed from the chamber in a state in which two types of silicon oxide films, which respectively corresponds to the thermally-oxidized film and the silicon monoxide film and have different densities, exist contemporaneously in such a manner that water molecules remain in a silicon oxide film having less density between the two types of silicon oxide films, and the HF gas is supplied to selectively remove the silicon oxide film having less density.

2. The substrate processing method according to claim 1,

wherein the silicon monoxide film is less dense than the thermally-oxidized film.

3. The substrate processing method according to claim 1,

wherein the HF gas is supplied at a flow rate ranging from 40 to 60 SCCM.

4. The substrate processing method according to claim 1,

wherein in said HF gas supply step, when water molecules are removed from the chamber, the pressure of the chamber is set to 1.3×

10² to 1.1×

10³ Pa (1 to 8 Torr), and the ambient temperature in the chamber is set to a value ranging from 40 to 60 Celsius degrees, so that water molecules remains in the silicon oxide film having less density.

5. The substrate processing method according to claim 1, wherein the substrate comprises a protruding conductive portion on the thermally-oxidized film, the protruding conductive portion perpendicularly protruding from a surface of the substrate,

wherein the nitride film covers side surfaces and a top surface of the conductive portion, and

wherein in said oxygen-containing plasma contact step, active species in the oxygen-containing plasma move in a direction approximately perpendicular to the surface of the substrate, whereby the active species are in contact with the nitride film.

6. The substrate processing method according to claim 5, further including:

a selective oxidation step of selectively oxidizing a flat portion of the nitride film.

7. The substrate processing method according to claim 1, wherein the substrate has a protruding conductive portion thereof protruding from the thermally-oxidized film,

wherein the nitride film covers side surfaces and a top surface of the conductive portion, and

wherein in said oxygen-containing plasma contact step, active species in the oxygen-containing plasma move substantially parallel to the side surfaces of the conductive portion and are in contact with the nitride film.

8. The substrate processing method according to claim 7, wherein the active species include at least cations.

9. The substrate processing method according to claim 7, further including:

a selective oxidation step of selectively oxidizing a flat portion of the nitride film.