Methods and apparatus for generating strongly-ionized plasmas with ionizational instabilities

CAFC
  • US 8,125,155 B2
  • Filed: 08/27/2010
  • Issued: 02/28/2012
  • Est. Priority Date: 02/22/2004
  • Status: Expired due to Fees
First Claim
Patent Images

1. A strongly-ionized plasma generator comprising:

  • a) a chamber for confining a feed gas;

    b) an anode that is positioned inside the chamber;

    c) a cathode assembly that is positioned adjacent to the anode inside the chamber; and

    d) a pulsed power supply having an output that is electrically connected between the anode and the cathode assembly, the pulsed power supply generating at the output a voltage pulse having at least one of a controlled amplitude and a controlled rise time that increases an ionization rate of sputtered material atoms so that a rapid increase in electron density and a formation of a strongly-ionized plasma occurs without forming an arc between the anode and the cathode assembly.

View all claims
    ×
    ×

    Thank you for your feedback

    ×
    ×