Precursor delivery system

• US 8,137,462 B2
• Filed: 10/10/2007
• Issued: 03/20/2012
• Est. Priority Date: 10/10/2006
• Status: Active Grant

• Current Assignee: ASM IP Holding B.V. (ASM International NV)
• Original Assignee: ASM America Incorporated (ASM International NV)
• Inventors: Fondurulia, Kyle, Shero, Eric, White, Carl L, Verghese, Mohith E
• Primary Examiner(s): LUND, JEFFRIE ROBERT
• Application Number:
  US11/870,374
• Publication Number:
  US 20080085226A1
• Time in Patent Office: 1,623 Days
• Field of Search: 118/715, 118/726, 118/724
• US Class Current: 118/715
• CPC Class Codes: C23C 16/4401 Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
• CPC Class Codes: C23C 16/4402 Reduction of impurities in the source gas
• CPC Class Codes: C23C 16/4481 by evaporation using carrier gas in contact with the source material C23C16/4486 takes precedence

Abstract

A precursor source vessel comprises a vessel body, a passage within the vessel body, and a valve attached to a surface of the body. An internal chamber is adapted to contain a chemical reactant, and the passage extends from outside the body to the chamber. The valve regulates flow through the passage. The vessel has inlet and outlet valves, and optionally a vent valve for venting internal gas. An external gas panel can include at least one valve fluidly interposed between the outlet valve and a substrate reaction chamber. Gas panel valves can each be positioned along a plane that is generally parallel to, and no more than about 10.0 cm from, a flat surface of the vessel. Filters in a vessel lid or wall filter gas flow through the vessel'"'"'s valves. A quick-connection assembly allows fast and easy connection of the vessel to a gas panel.

Claims

1. A chemical reactant source vessel in combination with a gas delivery system for a vapor phase reactor for vapor processing of substrates, comprising:

a vessel body defining an internal chamber adapted to contain a solid or liquid chemical reactant, wherein the vessel body includes an inlet and an outlet;

an inlet passage within the vessel body, the inlet passage extending from outside the vessel body to the vessel chamber;

an inlet valve attached directly to a substantially flat surface of the vessel body and configured to regulate flow through the inlet passage;

an outlet passage within the vessel body, the outlet passage extending from the vessel chamber to outside the vessel body;

an outlet valve attached directly to the substantially flat surface of the vessel body and configured to regulate flow through the outlet passage;

a vapor phase reaction chamber for processing substrates;

a plurality of gas panel valves collectively operative to convey a carrier gas through the vessel and into the reaction chamber, at least one of the gas panel valves being fluidly interposed between the outlet valve and the reaction chamber; and

a heater plate interposed between the gas panel valves and the flat surface of the vessel body, the heater plate configured to heat up the gas panel valves and the vessel;

wherein all of the gas panel valves are positioned within about 10.0 cm from the flat surface of the vessel body.

2. The vessel and gas delivery system combination of claim 1, wherein the inlet and outlet valves are each connected to the surface of the vessel body without any tubing between the valve and the surface of the vessel body.

3. The vessel and gas delivery system combination of claim 1, wherein the inlet and outlet valves are each at least partly integrally formed with the vessel body.

4. The vessel and gas delivery system combination of claim 1, wherein each of the inlet and outlet valves comprises:

a valve porting block mounted to or integrally formed with the vessel body, the porting block defining a valve seat and including internal gas flow conduits defining the passage, the gas flow conduits being in fluid communication with the valve seat; and

a movable flow restrictor adapted to block gas flow through the valve seat.

5. The vessel and gas delivery system combination of claim 1, wherein the vessel body comprises:

a container body; and

a vessel lid adapted to engage the body to define the chamber therebetween, the inlet and outlet passages being within the lid, the inlet and outlet valves being attached directly to the lid.

6. The vessel and gas delivery system combination of claim 1, wherein the chamber includes a tortuous path configured to contain the chemical reactant, the tortuous path extending from the inlet to the outlet.

7. The vessel and gas delivery system combination of claim 6, further comprising a serpentine insert within the chamber, the serpentine insert defining the tortuous path.

8. The vessel and gas delivery system combination of claim 6, further comprising a stack of trays within the chamber, the trays collectively defining a spiral gas flow path that comprises at least a portion of the tortuous path.

9. The vessel and gas delivery system combination of claim 6, wherein the tortuous path is machined into the container body or a lid of the vessel.

10. The vessel and gas delivery system combination of claim 1, wherein the gas panel valves are each positioned along a plane that is generally parallel to the flat surface of the vessel body, the plane being no more than about 10.0 cm from the flat surface of the vessel body.

11. The vessel and gas delivery system combination of claim 10, wherein the heater plate is interposed between the plane and the flat surface of the vessel body.

12. The vessel and gas delivery system combination of claim 10, wherein the plane is no more than about 7.5 cm from the flat surface of the vessel body.

13. The vessel and gas delivery system combination of claim 12, wherein the plane is no more than about 5.3 cm from the flat surface of the vessel body.

14. The vessel and gas delivery system combination of claim 1, wherein the gas panel valves are part of a gas panel comprising:

a fluid conduit adapted to receive a carrier gas and convey the carrier gas to a first gas conduit connection point;

a first gas panel valve fluidly interposed between the first gas conduit connection point and the inlet valve attached to the vessel;

a second gas panel valve fluidly interposed between the first gas conduit connection point and a second gas conduit connection point;

a third gas panel valve fluidly interposed between the second gas conduit connection point and the outlet valve attached to the vessel; and

a fourth gas panel valve fluidly interposed between the second gas conduit connection point and the reaction chamber.

15. The vessel and gas delivery system combination of claim 1, further comprising:

a vapor exhaust component downstream of the reaction chamber;

a vent passage extending through the vessel body from the vessel chamber to outside the vessel;

a vent valve attached directly to the vessel body and configured to regulate flow through the vent passage; and

one or more conduits for delivering gas flow from the vent valve to the exhaust component without flowing through the reaction chamber.

16. The vessel and gas delivery system combination of claim 1, further comprising a filter in a wall of the vessel body, the filter adapted to prevent particulate matter from flowing through the outlet passage.

17. The vessel and gas delivery system combination of claim 16, wherein an inner surface of the wall includes a recess that receives the filter, the outlet passage having one end terminating in the recess and another end in fluid communication with the outlet valve, the filter comprising:

a flange having an inner annular wall defining an opening within the flange, the flange being positioned within the recess; and

a filter material substantially filling the opening of the flange;

wherein gas within the internal chamber of the vessel body cannot flow through the outlet passage without flowing through the filter material and the opening within the flange.

18. The vessel and gas delivery system combination of claim 1, further comprising:

a first filter in a wall of the vessel body, the first filter adapted to prevent particulate matter from flowing through the inlet passage; and

a second filter in the wall of the vessel body, the second filter adapted to prevent particulate matter from flowing through the outlet passage.

19. The vessel and gas delivery system combination of claim 18, wherein:

an inner surface of the vessel body wall includes a first recess that receives the first filter, and a second recess that receives the second filter;

the inlet passage has one end terminating in the first recess and another end in fluid communication with the inlet valve;

the outlet passage has one end terminating in the second recess and another end in fluid communication with the outlet valve;

the first filter comprises;

a first flange having an inner annular wall defining an opening within the first flange, the first flange being positioned within the first recess; and

a first filter material substantially filling the opening of the first flange;

the second filter comprises;

a second flange having an inner annular wall defining an opening within the second flange, the second flange being positioned within the second recess; and

a second filter material substantially filling the opening of the second flange;

the first filter is engaged with the first recess and configured so that gas cannot flow through the inlet passage without flowing through the first filter material and the opening within the first flange; and

the second filter is engaged with the second recess and configured so that gas cannot flow through the outlet passage without flowing through the second filter material and the opening within the second flange.