Hybrid composite wafer carrier for wet clean equipment

• US 8,146,902 B2
• Filed: 05/02/2007
• Issued: 04/03/2012
• Est. Priority Date: 12/21/2006
• Status: Expired due to Fees

• Current Assignee: Lam Research Corporation
• Original Assignee: Lam Research Corporation
• Inventors: Cheng, Wing Lau, Kholodenko, Arnold
• Primary Examiner(s): Nguyen, George
• Application Number:
  US11/743,516
• Publication Number:
  US 20080152922A1
• Time in Patent Office: 1,798 Days
• Field of Search: 269/900, 269/901, 269/289.R, 428/74, 428/300.7, 428/114, 428/192, 428/298.1, 428/323, 428/327, 442/268, 442/286, 442/381, 442/394
• US Class Current: 269/900
• CPC Class Codes: B32B 27/04 as impregnant, bonding, or embedding substance not used
• CPC Class Codes: B32B 5/26 another layer next to it also being fibrous or filamentary relative arrangement of fibres or filaments of different layers B32B5/12
• CPC Class Codes: B32B 5/28 impregnated with or embedded in a plastic substance not used
• CPC Class Codes: H01L 21/67051 using mainly spraying means, e.g. nozzles
• CPC Class Codes: H01L 21/67346 characterized by being specially adapted for supporting a single substrate or by comprising a stack of such individual supports
• CPC Class Codes: H01L 21/67748 horizontal transfer of a single workpiece
• CPC Class Codes: H01L 21/68764 characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating caroussel
• CPC Class Codes: Y10S 269/90 Supporting structure having work holder receiving apertures or projections
• CPC Class Codes: Y10S 269/901 Collapsible or foldable work holder supporting structure
• CPC Class Codes: Y10T 428/237 Noninterengaged fibered material encased [e.g., mat, batt, etc.]
• CPC Class Codes: Y10T 428/24995 Two or more layers
• CPC Class Codes: Y10T 428/31515 As intermediate layer

Abstract

A carrier structure for supporting a substrate when being processed by passing the carrier through a meniscus formed by upper and lower proximity heads is described. The carrier includes a frame having an opening sized for receiving a substrate and a plurality of support pins for supporting the substrate within the opening, the opening being slightly larger than the substrate such that a gap exists between the substrate and the opening. The frame comprises a composite core, a top sheet, a bottom sheet, a layer of aramid fabric between the top sheet and the core and a second layer of aramid fabric between the bottom sheet and the core. The top sheet and the bottom sheet being formed from a polymer material. A method of manufacture is also described.

Claims

1. A carrier for supporting a substrate, the carrier comprising:

a frame having a top surface, a bottom surface and six sides, wherein a first side and a second side are parallel to each other and have thickened edges, third and fourth sides and fifth and sixth sides are respectively defined between the first side and the second side, wherein third, fourth, fifth and sixth sides are angled away from a perpendicular direction defined from the first side or the second side, the frame having an opening sized for receiving a substrate; and

a plurality of support pins for supporting the substrate within the opening, the opening being slightly larger than the substrate such that a gap exists between the substrate and the opening, the plurality of pins coupled to the frame and extending into the opening in a parallel orientation relative to the top and bottom surfaces of the frame;

the frame comprising a composite core, a top sheet defining the top surface, and a bottom sheet defining the bottom surface, and a layer of aramid fabric between the top sheet and the composite core, wherein the top sheet and the bottom sheet comprise a polymer material with a defined hydrophobicity.

2. The carrier of claim 1, further comprising a second layer of aramid fabric between the bottom sheet and the composite core.

3. The carrier of claim 1, wherein the frame has a slight arch so that when the frame is under the load of carrying a substrate, the frame substantially flattens out for minimal vertical displacement from a plane.

4. The carrier of claim 1, wherein the composite core comprises a molded carbon fiber composite material having an epoxy matrix.

5. The carrier of claim 1, wherein the composite core comprises at least one layer of uni-directional pre-impregnated carbon fiber material.

6. The carrier of claim 5, wherein the unidirectional pre-impregnated carbon fiber material is disposed such that carbon fibers are oriented perpendicular to left and right edges of the carrier.

7. The carrier of claim 1, wherein the top sheet and bottom sheet are formed of polyvinylidene fluoride.

8. The carrier of claim 1, wherein the aramid fabric is pre-impregnated with epoxy.

9. The carrier of claim 1, wherein the carrier further comprises a filler material formed from thermoplastic powder that is sintered or binded during a thermal cycling treatment during manufacture of the carrier.

10. The carrier of claim 1, wherein the support pins are formed from one of polyvinylidene fluoride or polyetheretherketone, or rigid materials.

11. A carrier for supporting a substrate, the carrier comprising:

a frame having a thickness that is greater than 0.8 mm and up to about 1.5 mm, the frame having a top surface, a bottom surface and six sides, wherein a first side and a second side are parallel to each other and have thickened edges, third and fourth sides and fifth and sixth sides are respectively defined between the first side and the second side, wherein third, fourth, fifth and sixth sides are angled up to about 30 degrees away from a perpendicular direction defined from the first side or the second side, the frame having an opening sized for receiving the substrate; and

four support pins for supporting the substrate within the opening, the opening being slightly larger than the substrate such that a gap exists between the substrate and the opening, the four support pins coupled to the frame in the opening and extending partially into the opening in a parallel orientation relative to the top and bottom surfaces of the frame;

the frame comprising a composite core, a top sheet defining the top surface, and a bottom sheet defining the bottom surface, and a layer of aramid fabric between the top sheet and the composite core, wherein the top sheet and the bottom sheet comprise a polymer material with a defined hydrophobicity,

wherein the top and bottom sheets encapsulate the composite core and the layer of aramid fabric over the top and bottom surfaces and in the opening.

12. The carrier of claim 11, further comprising a second layer of aramid fabric between the bottom sheet and the composite core.

13. The carrier of claim 11, wherein the frame has a slight arch so that when the frame is under the load of carrying a substrate, the frame substantially flattens out for minimal vertical displacement from a plane.

14. The carrier of claim 11, wherein the composite core comprises a molded carbon fiber composite material having an epoxy matrix.

15. The carrier of claim 11, wherein the composite core comprises at least one layer of uni-directional pre-impregnated carbon fiber material.

16. The carrier of claim 11, wherein the four pins are defined from one of polyvinylidene fluoride or polyetheretherketone, or a rigid material.