Semiconductor chip assembly with post/base/cap heat spreader

• US 8,148,747 B2
• Filed: 11/28/2009
• Issued: 04/03/2012
• Est. Priority Date: 03/25/2008
• Status: Expired due to Fees

• Current Assignee: Bridge Semiconductor Corporation
• Original Assignee: Bridge Semiconductor Corporation
• Inventors: Lin, Charles W. C., Wang, Chia-Chung, Sigmond, David M.
• Primary Examiner(s): Smith, Zandra
• Assistant Examiner(s): BOYLE, ABBIGALE A
• Application Number:
  US12/626,883
• Publication Number:
  US 20100072510A1
• Time in Patent Office: 857 Days
• Field of Search: 257/99, 257/706, 257/707, 257/711, 257/712, 257/717, 257/E23.102, 257/E33.075, 438/26, 438/118, 438/121, 438/122, 438/612, 438/669
• US Class Current: 257/99
• CPC Class Codes: H01L 21/486 Via connections through the substrate with or without pins
• CPC Class Codes: H01L 2224/05599 Material
• CPC Class Codes: H01L 2224/32188 the layer connector connecting to a bonding area protruding from the surface of the item
• CPC Class Codes: H01L 2224/45144 Gold (Au) as principal constituent
• CPC Class Codes: H01L 2224/48091 Arched
• CPC Class Codes: H01L 2224/48227 connecting the wire to a bond pad of the item
• CPC Class Codes: H01L 2224/85205 Ultrasonic bonding
• CPC Class Codes: H01L 23/3677 Wire-like or pin-like cooling fins or heat sinks
• CPC Class Codes: H01L 24/45 of an individual wire connector
• CPC Class Codes: H01L 24/48 of an individual wire connector
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/00012 Relevant to the scope of the group, the symbol of which is combined with the symbol of this group
• CPC Class Codes: H01L 2924/00014 the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
• CPC Class Codes: H01L 2924/01012 Magnesium [Mg]
• CPC Class Codes: H01L 2924/01019 Potassium [K]
• CPC Class Codes: H01L 2924/01046 Palladium [Pd]
• CPC Class Codes: H01L 2924/01078 Platinum [Pt]
• CPC Class Codes: H01L 2924/01079 Gold [Au]
• CPC Class Codes: H01L 2924/01087 Francium [Fr]
• CPC Class Codes: H01L 2924/12041 LED
• CPC Class Codes: H01L 2924/181 : Encapsulation
• CPC Class Codes: H01L 2924/19041 : being a capacitor
• CPC Class Codes: H01L 2924/3011 : Impedance
• CPC Class Codes: H01L 33/483 : Containers
• CPC Class Codes: H01L 33/642 : characterized by the shape
• CPC Class Codes: H05K 1/0204 : using means for thermal conduction connection in the thickness direction of the substrate H05K1/0207 takes precedence
• CPC Class Codes: H05K 2201/09054 : Raised area or protrusion of metal substrate
• CPC Class Codes: H05K 2201/10106 : Light emitting diode [LED]
• CPC Class Codes: H05K 2203/0369 : Etching selective parts of a metal substrate through part of its thickness, e.g. using etch resist
• CPC Class Codes: H05K 3/0061 : onto a metallic substrate, e.g. a heat sink heat sinks for electric apparatus H05K7/20

Abstract

A semiconductor chip assembly includes a semiconductor device, a heat spreader, a conductive trace and an adhesive. The semiconductor device is electrically connected to the conductive trace and thermally connected to the heat spreader. The heat spreader includes a post, a base and a cap. The post extends upwardly from the base into an opening in the adhesive, the base extends below and laterally from the post, and the cap extends above and laterally from the post. The adhesive extends between the post and the conductive trace and between the base and the conductive trace. The conductive trace provides signal routing between a pad and a terminal and the heat spreader provides thermal dissipation between the cap and the base.

Claims

1. A semiconductor chip assembly, comprising:

a semiconductor device;

an adhesive that includes an opening;

a heat spreader that includes a post, a base and a cap, wherein the post is adjacent to the base and extends above the base in an upward direction and thermally connects the base and the cap, the base extends below the post in a downward direction opposite the upward direction and extends laterally from the post in lateral directions orthogonal to the upward and downward directions, and the cap extends above and is adjacent to and covers in the upward direction and extends laterally from a top of the post; and

a conductive trace that includes a pad and a terminal;

wherein the semiconductor device is mounted on the cap, overlaps the post, is electrically connected to the pad and thereby electrically connected to the terminal, and is thermally connected to the cap and thereby thermally connected to the base;

wherein the adhesive is mounted on and extends above the base, extends into a gap between the post and the pad, extends laterally from the post to or beyond the terminal and is sandwiched between the base and the pad;

wherein the pad is mounted on the adhesive and extends above the base; and

wherein the post extends into the opening, the cap overlaps the adhesive, the cap is thinner than the pad where the cap is adjacent to the top of the post, the cap is above a bottom surface of the pad where the cap is adjacent to the top of the post, the cap is below a top surface of the pad where the cap is adjacent to the top of the post and the base extends below the semiconductor device, the adhesive and the pad.

2. The assembly of claim 1, wherein the semiconductor device is an LED package that includes an LED chip.

3. The assembly of claim 2, wherein the LED package is electrically connected to the pad using a first solder joint and is thermally connected to the cap using a second solder joint.

4. The assembly of claim 1, wherein the semiconductor device is a semiconductor chip.

5. The assembly of claim 4, wherein the chip is electrically connected to the pad using a wire bond and is thermally connected to the cap using a die attach.

6. The assembly of claim 1, wherein the adhesive contacts the post, the base and the cap.

7. The assembly of claim 1, wherein the adhesive covers and surrounds the post in the lateral directions.

8. The assembly of claim 1, wherein the adhesive conformally coats sidewalls of the post and a top surface of the base outside the post.

9. The assembly of claim 1, wherein the adhesive is a solidified prepreg.

10. The assembly of claim 1, wherein the adhesive extends laterally from the post beyond the terminal.

11. The assembly of claim 1, wherein the adhesive extends to peripheral edges of the assembly.

12. The assembly of claim 1, wherein the post is integral with the base and metallurgically bonded to the cap at a copper interface.

13. The assembly of claim 1, wherein the post is coplanar with the adhesive above the bottom surface of the pad.

14. The assembly of claim 1, wherein the post has a diameter that decreases as it extends upwardly from the base to the cap.

15. The assembly of claim 1, wherein the base covers the semiconductor device, the post, the cap, the adhesive and the conductive trace in the downward direction and extends to peripheral edges of the assembly.

16. The assembly of claim 1, wherein the cap contacts the adhesive and is coplanar with the pad above the adhesive.

17. The assembly of claim 1, wherein the cap has a rectangular or square shape and the top of the post has a circular shape.

18. The assembly of claim 1, wherein the pad and the terminal are the same metals and have the same thickness and are coplanar with one another.

19. The assembly of claim 1, wherein the base and the terminal are the same metals and have the same thickness and are coplanar with one another.

20. The assembly of claim 1, wherein the assembly includes a thermal via that is spaced from the post, extends through the adhesive outside the opening and is adjacent to and thermally connects the base and the cap.

21. A semiconductor chip assembly, comprising:

a semiconductor device that includes a thermal contact surface;

an adhesive that includes an opening;

a heat spreader that includes a post, a base and a cap, wherein the post is adjacent to and integral with the base, extends above the base in an upward direction and thermally connects the base and the cap, the base extends below the post in a downward direction opposite the upward direction, covers the post in the downward direction and extends laterally from the post in lateral directions orthogonal to the upward and downward directions, and the cap extends above and is adjacent to and covers in the upward direction and extends laterally from a top of the post; and

a conductive trace that includes a pad, a terminal and a routing line, wherein an electrically conductive path between the pad and the terminal includes the routing line;

wherein the semiconductor device is mounted on the cap, overlaps the post, is electrically connected to the pad and thereby electrically connected to the terminal, and is thermally connected to the cap and thereby thermally connected to the base;

wherein the thermal contact surface is aligned with and faces towards the cap;

wherein the adhesive is mounted on and extends above the base, extends into a gap between the post and the pad, is sandwiched between the base and the terminal outside the gap, surrounds the post in the lateral directions, extends laterally from the post to or beyond the terminal and extends to peripheral edges of the assembly;

wherein the conductive trace is mounted on the adhesive and extends above the base, and the pad, the terminal and the routing line contact and overlap the adhesive;

wherein the post extends into the opening and the top of the post has a circular shape;

wherein the base contacts the adhesive, extends below the semiconductor device, the adhesive and the conductive trace, covers the post, the cap, the adhesive and the conductive trace in the downward direction and extends to peripheral edges of the assembly; and

wherein the cap contacts and overlaps the adhesive and is coplanar with the pad and has a top surface with a square or rectangular shape that is sized and shaped to accommodate the thermal contact surface, the cap is thinner than the pad where the cap is adjacent to the top of the post, the cap is above a bottom surface of the pad where the cap is adjacent to the top of the post and the cap is below a top surface of the pad where the cap is adjacent to the top of the post.

22. The assembly of claim 21, wherein the semiconductor device is an LED package that includes an LED chip, is mounted on the pad using a first solder joint and on the cap using a second solder joint, is electrically connected to the pad using the first solder joint and is thermally connected to the cap using the second solder joint.

23. The assembly of claim 21, wherein the adhesive covers and surrounds the post in the lateral directions, covers the conductive trace in the downward direction, covers the base outside the post in the upward direction and fills the space between the base and the conductive trace.

24. The assembly of claim 21, wherein the post has a diameter that decreases as it extends upwardly from the base to the cap.

25. The assembly of claim 21, wherein the post is coplanar with the adhesive above a bottom surface of the conductive trace and below a top surface of the conductive trace and the cap is coplanar with the pad and the terminal above the adhesive.

26. A semiconductor chip assembly, comprising:

a semiconductor device;

an adhesive that includes an opening;

a heat spreader that includes a post, a base and a cap, wherein the post is adjacent to and integral with the base and extends above the base in an upward direction and thermally connects the base and the cap, the base extends below the post in a downward direction opposite the upward direction, covers the post in the downward direction and extends laterally from the post in lateral directions orthogonal to the upward and downward directions, and the cap extends above and is adjacent to and covers in the upward direction and extends laterally from a top of the post;

a substrate that includes a pad and a dielectric layer, wherein an aperture extends through the substrate; and

a terminal;

wherein the semiconductor device is mounted on the cap, overlaps the post, is electrically connected to the pad and thereby electrically connected to the terminal, and is thermally connected to the cap and thereby thermally connected to the base;

wherein the adhesive is mounted on and extends above the base, extends into a gap in the aperture between the post and the substrate, extends across the dielectric layer in the gap, extends laterally from the post to or beyond the terminal and is sandwiched between the post and the dielectric layer and between the base and the substrate;

wherein the substrate is mounted on the adhesive and extends above the base; and

wherein the post extends into the opening and the aperture and above and below the dielectric layer, the cap overlaps the adhesive and is coplanar with the pad, the cap is thinner than the pad where the cap is adjacent to the top of the post, the cap is above a bottom surface of the pad where the cap is adjacent to the top of the post, the cap is below a top surface of the pad where the cap is adjacent to the top of the post and the base extends below the semiconductor device, the adhesive and the substrate.

27. The assembly of claim 26, wherein the semiconductor device is an LED package that includes an LED chip, the substrate includes the terminal, the terminal extends above the dielectric layer and the adhesive extends laterally from the post beyond and is overlapped by the terminal.

28. The assembly of claim 27, wherein the LED package is electrically connected to the pad using a first solder joint and is thermally connected to the cap using a second solder joint.

29. The assembly of claim 26, wherein the semiconductor device is a semiconductor chip, the substrate excludes the terminal, the terminal extends below the adhesive and the adhesive extends laterally from the post beyond and overlaps the terminal.

30. The assembly of claim 29, wherein the chip is electrically connected to the pad using a wire bond and is thermally connected to the cap using a die attach.

31. The assembly of claim 26, wherein the adhesive contacts the cap, contacts the post and the dielectric layer in the gap and contacts the base and the dielectric layer outside the gap.

32. The assembly of claim 26, wherein the adhesive covers and surrounds the post in the lateral directions.

33. The assembly of claim 26, wherein the adhesive fills the space between the post and the dielectric layer in the gap and conformally coats sidewalls of the post and a top surface of the base outside the post.

34. The assembly of claim 26, wherein the adhesive extends laterally from the post beyond the terminal.

35. The assembly of claim 26, wherein the adhesive extends to peripheral edges of the assembly.

36. The assembly of claim 26, wherein the substrate is spaced from the post and the base and is a laminated structure.

37. The assembly of claim 26, wherein the post is metallurgically bonded to the cap at a copper interface.

38. The assembly of claim 26, wherein the post is coplanar with the adhesive above the dielectric layer.

39. The assembly of claim 26, wherein the post has a diameter that decreases as it extends upwardly from the base to the cap.

40. The assembly of claim 26, wherein the base covers the semiconductor device, the cap, the adhesive, the substrate and the conductive trace in the downward direction and extends to peripheral edges of the assembly.

41. The assembly of claim 26, wherein the cap contacts the adhesive and is coplanar with the pad above the adhesive and the dielectric layer.

42. The assembly of claim 26, wherein the cap has a rectangular or square shape and the top of the post has a circular shape.

43. The assembly of claim 26, wherein the pad and the terminal are the same metals and have the same thickness and are coplanar with one another.

44. The assembly of claim 26, wherein the base and the terminal are the same metals and have the same thickness and are coplanar with one another.

45. The assembly of claim 26, wherein the assembly includes a thermal via that is spaced from the post, extends through the dielectric layer and the adhesive outside the opening and the aperture and is adjacent to and thermally connects the base and the cap.

46. A semiconductor chip assembly, comprising:

a semiconductor device that includes a thermal contact surface;

an adhesive that includes an opening;

a heat spreader that includes a post, a base and a cap, wherein the post is adjacent to and integral with the base, extends above the base in an upward direction and thermally connects the base and the cap, the base extends below the post in a downward direction opposite the upward direction, covers the post in the downward direction and extends laterally from the post in lateral directions orthogonal to the upward and downward directions, and the cap extends above and is adjacent to and covers in the upward direction and extends laterally from a top of the post; and

a substrate that includes a pad, a terminal, a routing line and a dielectric layer, wherein the pad, the terminal and the routing line contact and extend above the dielectric layer, an electrically conductive path between the pad and the terminal includes the routing line, and an aperture extends through the substrate;

wherein the semiconductor device is mounted on the cap, overlaps the post, is electrically connected to the pad and thereby electrically connected to the terminal, and is thermally connected to the cap and thereby thermally connected to the base;

wherein the thermal contact surface is aligned with and faces towards the cap;

wherein the adhesive is mounted on and extends above the base, extends into a gap in the aperture between the post and the substrate, extends across the dielectric layer in the gap, is sandwiched between the post and the dielectric layer in the gap, is sandwiched between the base and the substrate outside the gap, surrounds the post in the lateral directions, is overlapped by the pad, the terminal and the routing line, extends laterally from the post to or beyond the terminal and extends to peripheral edges of the assembly;

wherein the substrate is mounted on the adhesive and extends above the base;

wherein the post extends into the opening and the aperture and above and below the dielectric layer and the top of the post has a circular shape;

wherein the base extends below the semiconductor device, the adhesive and the substrate, covers the post, the cap, the adhesive and the substrate in the downward direction and extends to peripheral edges of the assembly; and

wherein the cap contacts and overlaps the adhesive and is coplanar with the pad and has a top surface with a square or rectangular shape that is sized and shaped to accommodate the thermal contact surface, the cap is thinner than the pad where the cap is adjacent to the top of the post, the cap is above a bottom surface of the pad where the cap is adjacent to the top of the post and the cap is below a top surface of the pad where the cap is adjacent to the top of the post.

47. The assembly of claim 46, wherein the semiconductor device is an LED package that includes an LED chip, is mounted on the pad using a first solder joint and on the cap using a second solder joint, is electrically connected to the pad using the first solder joint and is thermally connected to the cap using the second solder joint.

48. The assembly of claim 46, wherein the substrate is spaced from the post and the base, the adhesive contacts the post and the dielectric in the gap and contacts the base and the dielectric layer outside the gap and the post and the cap are metallurgically bonded to one another at a copper interface.

49. The assembly of claim 46, wherein the post has a diameter that decreases as it extends upwardly from the base to the cap.

50. The assembly of claim 46, wherein the post is coplanar with the adhesive above the dielectric layer and the cap is coplanar with the pad and the terminal above the adhesive and the dielectric layer.

51. A semiconductor chip assembly, comprising:

a semiconductor device;

an adhesive that includes an opening;

a heat spreader that includes a post, a base and a cap, wherein the post is adjacent to and integral with the base and extends above the base in an upward direction, is metallurgically bonded to the cap and thermally connects the base and the cap, the base extends below the post in a downward direction opposite the upward direction, covers the post in the downward direction and extends laterally from the post in lateral directions orthogonal to the upward and downward directions, and the cap extends above and is adjacent to and covers in the upward direction and extends laterally from a top of the post; and

a conductive trace that includes a pad and a terminal;

wherein the semiconductor device is mounted on the cap, overlaps the post, is electrically connected to the pad and thereby electrically connected to the terminal, and is thermally connected to the cap and thereby thermally connected to the base;

wherein the adhesive is mounted on and extends above the base, contacts the post, the base and the cap, is sandwiched between the base and the pad and extends laterally from the post to or beyond the terminal;

wherein the pad is mounted on and extends above the adhesive; and

wherein the post extends into the opening, the cap overlaps the adhesive, the cap is thinner than the pad where the cap is adjacent to the top of the post, the cap is above a bottom surface of the pad where the cap is adjacent to the top of the post, the cap is below a top surface of the pad where the cap is adjacent to the top of the post and the base extends below the semiconductor device and the pad.

52. The assembly of claim 51, wherein the post is coplanar with the adhesive above the bottom surface of the pad and below the top surface of the pad and the cap is coplanar with the pad above the adhesive.

53. The assembly of claim 51, wherein the pad and the terminal are the same metals and have the same thickness and are coplanar with one another and the base covers the semiconductor device, the cap, the adhesive and the conductive trace in the downward direction and extends to peripheral edges of the assembly.

54. The assembly of claim 51, wherein the base and the terminal are the same metals and have the same thickness and are coplanar with one another.

55. The assembly of claim 51, wherein the post is copper, the base, the cap, the pad and the terminal consist of copper and a plated contact that provides a surface finish on the copper and the cap is copper where it is adjacent to the post.

56. A semiconductor chip assembly, comprising:

a semiconductor device;

an adhesive that includes an opening;

a heat spreader that includes a post, a base and a cap, wherein the post is adjacent to and integral with the base and extends above the base in an upward direction, is metallurgically bonded to the cap and thermally connects the base and the cap, the base extends below the post in a downward direction opposite the upward direction, covers the post in the downward direction and extends laterally from the post in lateral directions orthogonal to the upward and downward directions, and the cap extends above and is adjacent to and covers in the upward direction and extends laterally from a top of the post;

a substrate that includes a dielectric layer, wherein an aperture extends through the substrate; and

a conductive trace that includes a pad and a terminal;

wherein the semiconductor device is mounted on the cap, overlaps the post, is electrically connected to the pad and thereby electrically connected to the terminal, and is thermally connected to the cap and thereby thermally connected to the base;

wherein the adhesive is mounted on and extends above the base, extends into a gap in the aperture between the post and the substrate, contacts the cap, contacts and is sandwiched between the post and the dielectric layer in the gap and between the base and the dielectric layer outside the gap, is sandwiched between the base and the pad, extends laterally from the post to or beyond the terminal and extends to peripheral edges of the assembly;

wherein the dielectric layer is mounted on the adhesive, extends above the base and is spaced from the post and the base;

wherein the pad is mounted on and extends above the dielectric layer; and

wherein the post extends into the opening and the aperture and above and below the dielectric layer, the cap overlaps the adhesive and is coplanar with the pad, the cap is thinner than the pad where the cap is adjacent to the top of the post, the cap is above a bottom surface of the pad where the cap is adjacent to the top of the post, the cap is below a top surface of the pad where the cap is adjacent to the top of the post and the base extends below the semiconductor device and the pad.

57. The assembly of claim 56, wherein the post is coplanar with the adhesive above the dielectric layer and the cap is coplanar with the pad above the adhesive and the dielectric layer at a surface that faces in the upward direction.

58. The assembly of claim 56, wherein the pad and the terminal are the same metals and have the same thickness and are coplanar with one another and the base covers the semiconductor device, the cap, the adhesive, the substrate and the conductive trace in the downward direction and extends to peripheral edges of the assembly.

59. The assembly of claim 56, wherein the base and the terminal are the same metals and have the same thickness and are coplanar with one another.

60. The assembly of claim 56, wherein the post is copper, the base, the cap, the pad and the terminal consist of copper and a plated contact that provides a surface finish on the copper and the cap is copper where it is adjacent to the post.

61. A semiconductor chip assembly, comprising:

a semiconductor device;

an adhesive that includes an opening;

a heat spreader that includes a post, a base and a cap, wherein the post is adjacent to and integral with the base and extends above the base in an upward direction, is metallurgically bonded to the cap and thermally connects the base and the cap, the base extends below the post in a downward direction opposite the upward direction, covers the post in the downward direction and extends laterally from the post in lateral directions orthogonal to the upward and downward directions, and the cap extends above and is adjacent to and covers in the upward direction and extends laterally from a top of the post; and

a conductive trace that includes a pad and a terminal;

wherein the semiconductor device is mounted on the cap, overlaps the post, is electrically connected to the pad and thereby electrically connected to the terminal, and is thermally connected to the cap and thereby thermally connected to the base;

wherein the adhesive is mounted on and extends above the base, contacts the post, the base and the cap, is sandwiched between the base and the pad, extends laterally from the post to or beyond the terminal and extends to peripheral edges of the assembly;

wherein the pad is mounted on and extends above the adhesive; and

wherein the post extends into the opening, the cap overlaps the adhesive and is coplanar with the pad, the cap is thinner than the pad where the cap is adjacent to the top of the post, the cap is above a bottom surface of the pad where the cap is adjacent to the top of the post, the cap is below a top surface of the pad where the cap is adjacent to the top of the post and the base, the cap, the pad and the terminal are primarily copper.

62. The assembly of claim 61, wherein the post is coplanar with the adhesive above the bottom surface of the pad and below the top surface of the pad and the cap is coplanar with the pad above the adhesive at a surface that faces in the upward direction.

63. The assembly of claim 61, wherein the pad and the terminal are the same metals and have the same thickness and are coplanar with one another and the base covers the semiconductor device, the cap, the adhesive and the conductive trace in the downward direction and extends to peripheral edges of the assembly.

64. The assembly of claim 61, wherein the base and the terminal are the same metals and have the same thickness and are coplanar with one another.

65. The assembly of claim 61, wherein the post is copper, the base, the cap, the pad and the terminal consist of copper and a plated contact that provides a surface finish on the copper and the cap is copper where it is adjacent to the post.

66. A semiconductor chip assembly, comprising:

a semiconductor device;

an adhesive that includes an opening;

a heat spreader that includes a post, a base and a cap, wherein the post is adjacent to and integral with the base and extends above the base in an upward direction, is metallurgically bonded to the cap and thermally connects the base and the cap, the base extends below the post in a downward direction opposite the upward direction, covers the post in the downward direction and extends laterally from the post in lateral directions orthogonal to the upward and downward directions, and the cap extends above and is adjacent to and covers in the upward direction and extends laterally from a top of the post; and

a conductive trace that includes a pad and a terminal;

wherein the semiconductor device is mounted on the cap, overlaps the post, is electrically connected to the pad and thereby electrically connected to the terminal, and is thermally connected to the cap and thereby thermally connected to the base;

wherein the adhesive is mounted on and extends above the base, contacts the post, the base and the cap, is sandwiched between the base and the pad and between the base and the cap, extends laterally from the post to or beyond the terminal and extends to peripheral edges of the assembly;

wherein the pad is mounted on and extends above the adhesive;

wherein the post extends into the opening, the cap overlaps the adhesive and covers the opening in the upward direction and the base extends below the semiconductor device and the pad; and

wherein the pad and the cap have the same thickness where closest to one another, have different thickness where the cap is adjacent to the post and are coplanar with one another above the adhesive at a surface that faces in the upward direction.

67. The assembly of claim 66, wherein the post is coplanar with the adhesive above a bottom surface of the pad and below a top surface of the pad.

68. The assembly of claim 66, wherein the pad and the terminal are the same metals and have the same thickness and are coplanar with one another and the base covers the semiconductor device, the cap, the adhesive and the conductive trace in the downward direction and extends to peripheral edges of the assembly.

69. The assembly of claim 66, wherein the base and the terminal are the same metals and have the same thickness and are coplanar with one another.

70. The assembly of claim 66, wherein the post is copper, the base, the cap, the pad and the terminal consist of copper and a plated contact that provides a surface finish on the copper and the cap is copper where it is adjacent to the post.

71. A semiconductor chip assembly, comprising:

a semiconductor device;

an adhesive that includes an opening;

a heat spreader that includes a post, a base and a cap, wherein the post is adjacent to and integral with the base and extends above the base in an upward direction, is metallurgically bonded to the cap and thermally connects the base and the cap, the base extends below the post in a downward direction opposite the upward direction, covers the post in the downward direction and extends laterally from the post in lateral directions orthogonal to the upward and downward directions, and the cap extends above and is adjacent to and covers in the upward direction and extends laterally from a top of the post;

a substrate that includes a dielectric layer, wherein an aperture extends through the dielectric layer; and

a conductive trace that includes a pad and a terminal;

wherein the semiconductor device is mounted on the cap, overlaps the post, is electrically connected to the pad and thereby electrically connected to the terminal, and is thermally connected to the cap and thereby thermally connected to the base;

wherein the adhesive is mounted on and extends above the base, extends into a gap in the aperture between the post and the dielectric layer, contacts and is sandwiched between the post and the dielectric layer in the gap and between the base and the dielectric layer outside the gap, is sandwiched between the base and the pad and between the base and the cap, extends laterally from the post to or beyond the terminal and extends to peripheral edges of the assembly;

wherein the dielectric layer is mounted on the adhesive, extends above the base and is spaced from the post and the base;

wherein the pad is mounted on and extends above the dielectric layer;

wherein the post extends into the opening and the aperture and above and below the dielectric layer, the cap contacts and overlaps the adhesive and the dielectric layer and covers the opening and the aperture in the upward direction and the base extends below the semiconductor device and the pad; and

wherein the pad and the cap have the same thickness where closest to one another, have different thickness where the cap is adjacent to the post and are coplanar with one another above the adhesive and the dielectric layer at a surface that faces in the upward direction.

72. The assembly of claim 71, wherein the post is coplanar with the adhesive above a bottom surface of the pad and above a top surface of the dielectric layer and below a top surface of the pad.

73. The assembly of claim 71, wherein the pad and the terminal are the same metals and have the same thickness and are coplanar with one another and the base covers the semiconductor device, the cap, the adhesive, the substrate and the conductive trace in the downward direction and extends to peripheral edges of the assembly.

74. The assembly of claim 71, wherein the base and the terminal are the same metals and have the same thickness and are coplanar with one another.

75. The assembly of claim 71, wherein the post is copper, the base, the cap, the pad and the terminal consist of copper and a plated contact that provides a surface finish on the copper and the cap is copper where it is adjacent to the post.