Methods and apparatus to modify a recipe process flow associated with a process control system during recipe execution
First Claim
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1. A method to modify a recipe process flow during recipe execution, the method comprising:
- executing a recipe using a plurality of manufacturing equipment resources; and
before completion of execution of the recipe;
receiving process flow change information indicative of a modification to a process flow of the recipe;
determining, via a processor, whether a process step being executed by one of the manufacturing equipment resources can be stopped prematurely; and
stopping the executing process step prematurely and modifying a process flow of the recipe based on the process flow change information in response to determining that the executing process step can be stopped prematurely.
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Abstract
Example methods and apparatus to modify a recipe process flow during recipe execution are disclosed. A disclosed example method involves executing a recipe, and before completion of execution of the recipe, receiving process flow change information indicative of a modification to a process flow of the recipe. Process flow rules are then retrieved from a process flow rules data structure. The recipe process flow is modified based on the process flow change information in response to determining that at least one requested change indicated by the process flow change information does not violate one of the process flow rules.
105 Citations
25 Claims
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1. A method to modify a recipe process flow during recipe execution, the method comprising:
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executing a recipe using a plurality of manufacturing equipment resources; and before completion of execution of the recipe; receiving process flow change information indicative of a modification to a process flow of the recipe; determining, via a processor, whether a process step being executed by one of the manufacturing equipment resources can be stopped prematurely; and stopping the executing process step prematurely and modifying a process flow of the recipe based on the process flow change information in response to determining that the executing process step can be stopped prematurely. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. An apparatus to modify a recipe process flow during recipe execution, the apparatus comprising:
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a user input interface to receive process flow change information indicative of a modification to a process flow of a recipe before completion of execution of the recipe, the execution of the recipe being carried out using a plurality of manufacturing equipment resources; a process step terminator to stop an executing process step prematurely in response to determining, via a processor, that the executing process step can be stopped prematurely, the executing process step being executed by one of the manufacturing equipment resources; and a process step activator to modify the process flow based on the process flow change information. - View Dependent Claims (12, 13, 14, 15, 16)
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17. A non-transitory machine accessible medium having instructions stored thereon that, when executed, cause a machine to at least:
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execute a recipe using a plurality of manufacturing equipment resources; and before completion of execution of the recipe; receive process flow change information indicative of a modification to a process flow of the recipe; determine whether a process step being executed by one of the manufacturing equipment resources can be stopped prematurely; and stop the executing process step prematurely and modify a process flow of the recipe based on the process flow change information in response to determining that the executing process step can be stopped prematurely. - View Dependent Claims (18, 19, 20, 21, 22, 23, 24, 25)
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Specification