Shaping a cover glass
First Claim
1. A method of fabricating a plurality of touch sensor panels on one side of a substrate, comprising:
- etching partially through a substrate sheet on a first side of first and second opposing sides of the substrate sheet;
forming the plurality of touch sensor panels on the second side of the substrate sheet;
applying a removable protective sacrificial layer over the touch sensor panels;
singulating the substrate sheet to separate the plurality of touch sensor panels; and
removing the protective sacrificial layer from each of the plurality of touch sensor panels.
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Accused Products
Abstract
The fabrication of a touch sensor panel having co-planar single-layer touch sensors fabricated on the back side of a cover glass is disclosed. It can be desirable from a manufacturing perspective to perform all thin-film processing steps on a motherglass before separating it into separate parts. To perform thin-film processing on a motherglass before separation, a removable sacrificial layer such as a photoresist can be applied over the thin-film layers. Next, the motherglass can be scribed and separated, and grinding and polishing steps can be performed prior to removing the sacrificial layer. In alternative embodiments, after the protective sacrificial layer is applied, the bulk of the coverglass can be dry-etched using a very aggressive anisotropic etching that etches primarily in the z-direction. In this embodiment, the etching can be patterned using photolithography to create rounded corners or any other shape. The photoresist can then be removed.
27 Citations
12 Claims
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1. A method of fabricating a plurality of touch sensor panels on one side of a substrate, comprising:
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etching partially through a substrate sheet on a first side of first and second opposing sides of the substrate sheet; forming the plurality of touch sensor panels on the second side of the substrate sheet; applying a removable protective sacrificial layer over the touch sensor panels; singulating the substrate sheet to separate the plurality of touch sensor panels; and removing the protective sacrificial layer from each of the plurality of touch sensor panels. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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Specification