Microelectromechanical device with thermal expansion balancing layer or stiffening layer
First Claim
1. A device comprising:
- an electrode;
a fixed reflector which is at least partially reflective;
a movable flexible layer;
a movable reflector which is at least partially reflective, the movable reflector coupled to the movable flexible layer, wherein an interferometric modulating cavity is defined by the movable reflector and the fixed reflector, the movable reflector being movable between at least a first position and a second position; and
a thermal expansion balancing layer on a side of the movable flexible layer opposite the movable reflector, wherein the thermal expansion balancing layer has a coefficient of thermal expansion greater than or equal to that of the movable flexible layer if a coefficient of thermal expansion of the movable reflector is greater than that of the movable flexible layer, or a coefficient of thermal expansion less than or equal to that of the movable flexible layer if the coefficient of thermal expansion of the movable reflector is less than that of the movable flexible layer.
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Accused Products
Abstract
An interferometric modulating device is provided with a thermal expansion balancing layer on a side of the movable flexible layer opposite the movable reflector such that when temperature changes the distance between the movable reflector and the optical stack does not change significantly, thereby leading to stable color. Additionally, an interferometric modulating device is provided with a stiffening layer between the movable flexible layer and the movable reflector and at least one hollow void exists on the surface where the movable reflector and the stiffening layer contact each other so that the movable reflector is more rigid to bending, thereby reducing the temperature sensitivity of the movable reflector.
349 Citations
18 Claims
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1. A device comprising:
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an electrode; a fixed reflector which is at least partially reflective; a movable flexible layer; a movable reflector which is at least partially reflective, the movable reflector coupled to the movable flexible layer, wherein an interferometric modulating cavity is defined by the movable reflector and the fixed reflector, the movable reflector being movable between at least a first position and a second position; and a thermal expansion balancing layer on a side of the movable flexible layer opposite the movable reflector, wherein the thermal expansion balancing layer has a coefficient of thermal expansion greater than or equal to that of the movable flexible layer if a coefficient of thermal expansion of the movable reflector is greater than that of the movable flexible layer, or a coefficient of thermal expansion less than or equal to that of the movable flexible layer if the coefficient of thermal expansion of the movable reflector is less than that of the movable flexible layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A device comprising:
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first means for reflecting light; second means for reflecting light, wherein an interferometric modulating cavity is defined by the second reflecting means and the first reflecting means, the second reflecting means being movable between at least a first position and a second position; means for moving the second reflecting means, the second reflecting means being coupled to the means for moving; and means for balancing thermal expansion, provided on a side of the means for moving opposite the second reflecting means, wherein the means for balancing thermal expansion has a coefficient of thermal expansion greater than or equal to that of the means for moving if a coefficient of thermal expansion of the second reflecting means is greater than that of the means for moving, or a coefficient of thermal expansion less than or equal to that of the means for moving if the coefficient of thermal expansion of the second reflecting means is less than that of the means for moving. - View Dependent Claims (12, 13, 14)
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15. A method of making a device for modulating light, the method comprising:
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forming a fixed reflector which is at least partially reflective; forming a movable flexible layer; forming a movable reflector which is at least partially reflective, the movable reflector coupled to the movable flexible layer, wherein an interferometric modulating cavity is defined by the movable reflector and the fixed reflector, the movable reflector being movable between at least a first position and a second position; and forming a thermal expansion balancing layer on a side of the movable flexible layer opposite the movable reflector, wherein the thermal expansion balancing layer has a coefficient of thermal expansion greater than or equal to that of the movable flexible layer if a coefficient of thermal expansion of the movable reflector is greater than that of the movable flexible layer, or a coefficient of thermal expansion less than or equal to that of the movable flexible layer if the coefficient of thermal expansion of the movable reflector is less than that of the movable flexible layer. - View Dependent Claims (16, 17, 18)
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Specification