Measuring instrument
First Claim
1. A measuring instrument comprising:
- a contact piece to be in contact with an object;
a moving mechanism that moves the contact piece along a surface of the object;
a controller that controls the moving mechanism; and
a measuring force detector that detects a measuring force exerted on the contact piece when the contact piece is brought into contact with the object, whereinthe controller includes;
a target value output that outputs a target value of the measuring force;
a feedback controller that performs feedback control of the moving mechanism; and
a feedback compensator provided on the feedback controller, the feedback compensator adjusting the measuring force and outputting a compensation measuring force based on a result of a comparison between the target value and the measuring force, andthe feedback controller performs the feedback control based on a deviation between the target value and the compensation measuring force.
1 Assignment
0 Petitions
Accused Products
Abstract
A surface texture measuring instrument includes a contact piece to be in contact with an object, a sensor driving mechanism that moves the contact piece along the surface of the object, a controller that controls the sensor mechanism, and a force sensor that detects a measuring force exerted on the contact piece when the contact piece is brought into contact with the object. The controller includes a target value output that outputs a target value of the measuring force, a feedback controller that performs feedback control of the sensor driving mechanism based on a deviation between the measuring force and the target value, and a feedback compensator provided on the feedback controller. The feedback compensator performs feedback compensation in accordance with the measuring force.
6 Citations
3 Claims
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1. A measuring instrument comprising:
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a contact piece to be in contact with an object; a moving mechanism that moves the contact piece along a surface of the object; a controller that controls the moving mechanism; and a measuring force detector that detects a measuring force exerted on the contact piece when the contact piece is brought into contact with the object, wherein the controller includes; a target value output that outputs a target value of the measuring force; a feedback controller that performs feedback control of the moving mechanism; and a feedback compensator provided on the feedback controller, the feedback compensator adjusting the measuring force and outputting a compensation measuring force based on a result of a comparison between the target value and the measuring force, and the feedback controller performs the feedback control based on a deviation between the target value and the compensation measuring force. - View Dependent Claims (2, 3)
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Specification