Dosimeter powered by passive RF absorption

• US 8,212,218 B2
• Filed: 11/30/2009
• Issued: 07/03/2012
• Est. Priority Date: 11/30/2009
• Status: Active Grant

• Current Assignee: GlobalFoundries, Inc.
• Original Assignee: International Business Machines Corporation
• Inventors: Cabral, Cyril Jr., Gordon, Michael S., Koester, Steven J., Murray, Conal E., Rodbell, Kenneth P., Rossnagel, Stephen M., Wisnieff, Robert L., Yau, Jeng-bang
• Primary Examiner(s): Porta, David
• Assistant Examiner(s): Malevic, Djura
• Application Number:
  US12/627,076
• Publication Number:
  US 20110127438A1
• Time in Patent Office: 946 Days
• Field of Search: 250/370.07, 250/391, 250/390.03, 250/371, 250/370.02
• US Class Current: 250/370.07
• CPC Class Codes: G01T 1/026 Semiconductor dose-rate meters

Abstract

A system for determining an amount of radiation includes a dosimeter configured to receive the amount of radiation, the dosimeter comprising a circuit having a resonant frequency, such that the resonant frequency of the circuit changes according to the amount of radiation received by the dosimeter, the dosimeter further configured to absorb RF energy at the resonant frequency of the circuit; a radio frequency (RF) transmitter configured to transmit the RF energy at the resonant frequency to the dosimeter; and a receiver configured to determine the resonant frequency of the dosimeter based on the absorbed RF energy, wherein the amount of radiation is determined based on the resonant frequency.

Claims

1. A method for determining an amount of radiation, the method comprising:

receiving the amount of radiation by a dosimeter, the dosimeter comprising a circuit, the circuit having a resonant frequency that is configured to change according to the amount of radiation received by the dosimeter, wherein the circuit comprises a varactor, the varactor comprising;

a silicon substrate; and

a dielectric layer located on top of the silicon substrate, wherein the amount of radiation causes a corresponding negative charge to build up in the dielectric layer, and the negative charge in the dielectric layer causes a depletion region to form in the silicon substrate underneath the dielectric layer, and wherein a capacitance of the varactor is reduced in response to the formation of the depletion region;

absorbing radiofrequency (RF) energy by the dosimeter at the resonant frequency of the circuit from an RF transmitter;

determining the resonant frequency of the circuit based on the absorbed RF energy;

determining the capacitance of the varactor based on the determined resonant frequency; and

determining the amount of radiation based on the capacitance of the varactor.

2. The method of claim 1, wherein the RF energy is part of an RF field scanned across a frequency range comprising the resonant frequency.

3. The method of claim 1, wherein the circuit comprises an inductor, the varactor, and an antenna connected in series.

4. The method of claim 1, wherein the silicon substrate comprises a first silicon region and a second silicon region, the first silicon region comprising highly doped silicon and the second silicon region comprising lightly doped or undoped silicon;

wherein the dielectric layer is located on top of the second silicon region, and the depletion region is formed in the second silicon region underneath the dielectric layer; and

wherein the varactor further comprises a gate electrode located on top of the dielectric layer.

5. The method of claim 1, wherein the dielectric layer comprises a silicon dioxide layer located on top of the silicon substrate, and a silicon nitride layer located on top of the silicon dioxide layer;

wherein the negative charge is built up in the silicon nitride layer, and a positive charge is built up in the silicon dioxide layer by the amount of radiation; and

wherein the positive charge and the negative charge built up in the dielectric layer cause the depletion region to form in the silicon substrate underneath the silicon dioxide layer.

6. The method of claim 1, wherein determining the amount of radiation comprises determining a dose of protons, neutrons, alphas, ions, gamma rays or x-rays.

7. The method of claim 1, wherein determining the resonant frequency of the circuit based on the absorbed RF energy comprises determining a dip in a received strength of an RF field at the resonant frequency by a receiver.

8. The method of claim 1, wherein determining the resonant frequency of the circuit based on the absorbed RF energy comprises receiving an oscillation from the dosimeter at the resonant frequency.

9. A system for determining an amount of radiation, comprising:

a dosimeter configured to receive the amount of radiation, the dosimeter comprising a circuit having a resonant frequency, such that the resonant frequency of the circuit changes according to the amount of radiation received by the dosimeter, the dosimeter further configured to absorb RF energy at the resonant frequency of the circuit, wherein the circuit comprises a varactor, the varactor comprising;

a silicon substrate; and

a dielectric layer located on top of the silicon substrate, wherein the amount of radiation causes a corresponding negative charge to build up in the dielectric layer, and the negative charge in the dielectric layer causes a depletion region to form in the silicon substrate underneath the dielectric layer, and wherein a capacitance of the varactor is reduced in response to the formation of the depletion region;

a radiofrequency (RF) transmitter configured to transmit the RF energy at the resonant frequency to the dosimeter; and

a receiver configured to determine the resonant frequency of the dosimeter based on the absorbed RF energy, wherein the capacitance of the varactor is determined based on the resonant frequency and the amount of radiation is determined based on the capacitance of the varactor.

10. The system of claim 9, wherein the RF energy is part of an RF field scanned across a frequency range comprising the resonant frequency.

11. The system of claim 9, wherein the circuit comprises an inductor, the varactor, and an antenna connected in series.

12. The system of claim 9, wherein the silicon substrate comprises a first silicon region and a second silicon region, the first silicon region comprising highly doped silicon and the second silicon region comprising lightly doped or undoped silicon;

wherein the dielectric layer is located on top of the second silicon region, and the depletion region is formed in the second silicon region underneath the dielectric layer; and

wherein the varactor further comprises a gate electrode located on top of the dielectric layer.

13. The system of claim 9, wherein the dielectric layer comprises a silicon dioxide layer located on top of the silicon substrate, and a silicon nitride layer located on top of the silicon dioxide layer;

wherein the negative charge is built up in the silicon nitride layer, and a positive charge is built up in the silicon dioxide layer by the amount of radiation; and

wherein the positive charge and the negative charge built up in the dielectric layer cause the depletion region to form in the silicon substrate underneath the silicon dioxide layer.

14. The system of claim 9, wherein the amount of radiation comprises a dose of protons, ions, neutrons, alphas, ions, gamma rays, or x-rays.

15. The system of claim 9, wherein the dosimeter comprises a plurality of circuits, each of the plurality of circuits having a different resonant frequency, and wherein each circuit of the plurality of circuits is identified by a receiver based on the circuit'"'"'s respective resonant frequency, and wherein the identification of the plurality of circuits is used to determine respective amounts of radiation received at the respective locations of the plurality of circuits.

16. The system of claim 9, wherein the receiver is configured to determine the resonant frequency of the circuit based on the absorbed RF energy by determining a dip in a received strength of an RF field at the resonant frequency by the receiver.

17. The system of claim 9, wherein the receiver is configured to determine the resonant frequency of the circuit based on the absorbed RF energy by receiving an oscillation from the dosimeter at the resonant frequency.

18. A device for determining an amount of radiation, comprising:

a circuit, the circuit having a resonant frequency, the circuit comprising;

a varactor, the varactor comprising;

a silicon substrate; and

a dielectric layer located on top of the silicon substrate, wherein the amount of radiation causes a corresponding negative charge to build up in the dielectric layer, and the negative charge in the dielectric layer causes a depletion region to form in the silicon substrate underneath the dielectric layer, and wherein a capacitance of the varactor is reduced in response to the formation of the depletion region, and the resonant frequency changes according to the capacitance;

an inductor in series with the varactor; and

an antenna in series with the varactor and the inductor that is configured to absorb radiofrequency (RF) energy at the resonant frequency, such that the amount of radiation is determined based on the absorbed RF energy.

19. The device of claim 18, wherein the dielectric layer comprises a silicon dioxide layer located on top of the silicon substrate, and a silicon nitride layer located on top of the silicon dioxide layer;

wherein the negative charge is built up in the silicon nitride layer, and a positive charge is built up in the silicon dioxide layer by the amount of radiation; and

wherein the positive charge and the negative charge built up in the dielectric layer cause the depletion region to form in the silicon substrate underneath the silicon dioxide layer.

20. The device of claim 18, wherein the device for determining an amount of radiation comprises a plurality of circuits, each of the plurality of circuits having a different resonant frequency, and wherein each circuit of the plurality of circuits is identified by a receiver based on the circuit'"'"'s respective resonant frequency, and wherein the identification of the plurality of circuits is used to determine respective amounts of radiation received at the respective locations of the plurality of circuits.