Implantable device using ultra-nanocrystalline diamond

• US 8,214,032 B2
• Filed: 06/12/2006
• Issued: 07/03/2012
• Est. Priority Date: 02/28/2001
• Status: Expired due to Fees

• Current Assignee: Second Sight Medical Products, Inc.
• Original Assignee: Second Sight Medical Products, Inc.
• Inventors: Mech, Brian V., Greenberg, Robert J.
• Primary Examiner(s): BOCKELMAN, MARK
• Application Number:
  US11/452,144
• Publication Number:
  US 20060235475A1
• Time in Patent Office: 2,213 Days
• Field of Search: 607/2, 607/53, 604/891.1, 427/2.1, 427/2.11, 427/2.24, 427/2.12, 600/300, 600/347, 600/365, 600/373
• US Class Current: 607/2
• CPC Class Codes: A61K 9/0009 involving or responsive to electricity, magnetism or acoustic waves; Galenical aspects of sonophoresis, iontophoresis, electroporation or electroosmosis microelectromechanical systems A61K9/0097
• CPC Class Codes: A61N 1/0543 Retinal electrodes
• CPC Class Codes: A61N 1/36046 of the eye
• CPC Class Codes: C23C 16/274 using microwave discharges
• CPC Class Codes: C23C 16/277 using other elements in the gas phase besides carbon and hydrogen; using other elements besides carbon, hydrogen and oxygen in case of use of combustion torches; using other elements besides carbon, hydrogen and inert gas in case of use of plasma jets
• CPC Class Codes: C23C 16/278 doping or introduction of a secondary phase in the diamond
• CPC Class Codes: C23C 16/279 control of diamond crystallography
• CPC Class Codes: H01L 23/29 characterised by the material , e.g. carbon interlayer dielectrics H01L23/5329
• CPC Class Codes: H01L 23/3107 the device being completely enclosed
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Abstract

An implantable biocompatible device, that may be either a sensor or stimulator, having electronic circuitry and electrodes formed on a substrate, is uniformly covered with a coating approximately one-micron thick of ultra-nanocrystalline diamond, hermetically sealing the electronic circuitry. Selected electrodes are either left uncovered during coating or uncovered by conventional patterning techniques, allowing the electrodes to be exposed to living tissue and fluids. The ultra-nanocrystalline diamond coating may be doped to create electrically conductive electrodes. These approaches eliminate the need for a hermetically sealed lid or cover to protect hybrid electronic circuitry, and thus allow the device to be thinner than otherwise possible. The conformal ultra-nanocrystalline diamond coating uniformly covers the device, providing relief from sharp edges and producing a strong, uniformly thick hermetic coating around sharp edges and on high aspect-ratio parts.

Claims

1. A method of hermetically sealing an implantable biocompatible device comprising the steps of:

selecting an implantable electronic biocompatible device;

providing said implantable electronic biocompatible device comprised of a nerve or a muscle stimulator or a sensor, where said device comprises a substrate and electrical circuitry formed on said substrate;

depositing a thin ultra-nanocrystalline diamond coating having a thickness of greater than or equal to 40 nanometers, on said implantable biocompatible device;

depositing said thin ultra-nanocrystalline diamond coating as a conformal coating;

said ultra-nanocrystalline diamond coating forming a biocompatible, hermetic seal to protect said substrate and electrical circuitry to enable long term function in living tissue.

2. The method according to claim 1 wherein said step of depositing said thin ultra-nanocrystalline diamond coating includes depositing said thin coating in a constant thickness to provide for a smooth rounded package.

3. The method according to claim 1 further comprising the step of patterning said thin ultra-nanocrystalline diamond coating by photolithography.

4. The method according to claim 1 further comprising the step of patterning said thin ultra-nanocrystalline diamond coating by selective seeding.

5. The method according to claim 1 further comprising the step of patterning said thin ultra-nanocrystalline diamond coating by oxygen etching.

6. The method according to claim 1 further comprising the step of doping said thin ultra-nanocrystalline diamond coating to provide for electrical connectivity.

7. The method according to claim 6 wherein said step of doping said thin ultra-nanocrystalline diamond coating is selective doping providing for electrical conductivity in some locations and electrical insulation in other locations.

8. The method according to claim 1 further comprising the step of forming an integral capacitor between said stimulator and the living tissue by virtue of depositing said thin ultra-nanocrystalline diamond coating insulating film on said stimulator such that the thin ultra-nanocrystalline diamond coating forms a capacitor.

9. The method according to claim 1 wherein the step of depositing said thin ultra-nanocrystalline diamond coating as a constant thickness conformal coating further comprises depositing a smooth coating with rounded edges.