Thermocouple

• US 8,262,287 B2
• Filed: 12/08/2008
• Issued: 09/11/2012
• Est. Priority Date: 12/08/2008
• Status: Active Grant

• Current Assignee: ASM IP Holding B.V. (ASM International NV)
• Original Assignee: ASM America Incorporated (ASM International NV)
• Inventors: Darabnia, Buz, Yednak, Andy, Halpin, Mike, Jacobs, Loren, Aggarwal, Ravinder
• Primary Examiner(s): GUADALUPE, YARITZA
• Application Number:
  US12/330,096
• Publication Number:
  US 20100145547A1
• Time in Patent Office: 1,373 Days
• Field of Search: 374/178, 374/179, 374/208, 374/E7.004
• US Class Current: 374/179
• CPC Class Codes: C23C 16/46 characterised by the method used for heating the substrate C23C16/48, C23C16/50 take precedence
• CPC Class Codes: G01K 13/00 Thermometers specially adapted for specific purposes
• CPC Class Codes: G01K 7/04 the object to be measured not forming one of the thermoelectric materials

Abstract

A thermocouple for use in a semiconductor processing reaction is described. The thermocouple includes a sheath having a measuring tip and an opening at the opposing end. A support member that receives a portion of a first wire and a second wire is received within the sheath. The first and second wires form a junction that contacts the inner surface of the sheath at the measuring tip. A spacing member is secured at the opening of the sheath and receives the support member. The spacing member allows the support member, first wire, and second wire to freely thermally expand relative to each other without introducing compression or tension stresses therein.

Claims

1. A thermocouple for measuring a temperature within a reaction chamber comprising:

a sheath having a measuring tip and an opening;

a support member having a first distal end and an opposing a second distal end;

a first wire received within said support member;

a second wire received within said support member, said second wire being spaced-apart from said first wire within said support member; and

a spacing member attached to the sheath, the spacing member comprising a base comprising;

a first portion; and

a second portion opposite the first portion;

wherein the first portion includes a first aperture configured to receive the support member and allow the support member to independently thermally expand and contract relative to the first wire and he second wire; and

wherein the second portion includes a second aperture configured to receive the first wire and the second wire, the second aperture configured to allow the first wire, the second wire, and the support member to independently thermally expand and contract relative to each other.

2. The thermocouple of claim 1, wherein said sheath is formed of quartz.

3. The thermocouple of claim 1, wherein said support member is formed of ceramic.

4. The thermocouple of claim 1, wherein said first wire is formed of platinum, and said second wire is formed of a Platinum alloy containing about 13% Rhodium.

5. The thermocouple of claim 1, wherein said spacing member includes a base, a first protruding portion extending from said base, and a second protruding portion extending from said base, said first protruding portion receivable in said opening of said sheath.

6. The thermocouple of claim 1, wherein said spacing member maintains said first wire and said second wire in a spaced-apart relationship.

7. The thermocouple of claim 1, wherein said first wire has a different coefficient of thermal expansion than said second wire.

8. The thermocouple of claim 7, wherein said support member has a different coefficient of thermal expansion than both of said first and second wires.

9. The thermocouple of claim 8, wherein said spacing member allows each of said support member, said first wire, and said second wire to freely thermally expand and contract at a different rate without introducing compression or tension stresses therein.

10. The thermocouple of claim 1, wherein said first and second wire are fused together adjacent to form a junction.

11. The thermocouple of claim 10, wherein said junction is located adjacent to said first distal end of said support member.

12. The thermocouple of claim 10, wherein said junction contacts an inner surface of said sheath at said measuring tip.

13. The thermocouple of claim 1, wherein a first protective tube covers a portion of said first wire, and a second protective tube covers a portion of said second wire.

14. A temperature control system for use in a semiconductor processing reactor, said temperature control system comprising:

at least one heating element located within said reactor;

a controller operatively connected to said at least one heating element, said controller configured to control said at least one heating element; and

at least one temperature sensor located within said reactor, said at least one temperature sensor operatively connected to said controller for providing temperature data to said controller, wherein said at least one temperature sensor includes a thermocouple, said thermocouple comprises;

a sheath having an opening;

a support member, a portion of said support member disposed within said sheath;

a first wire and a second wire formed of dissimilar metals, a portion of said first and second wires received within said support member; and

a spacing member attached to the sheath, the spacing member comprising a base that includes;

a first portion; and

a second portion opposite the first portion;

wherein the first portion includes a first aperture configured to receive the support member and allow the support member to independently thermally expand and contract relative to the first wire and he second wire; and

wherein the second portion includes a second aperture configured to receive the first wire and the second wire, the second aperture configured to allow the first wire, the second wire, and the support member to independently thermally expand and contract relative to each other.

15. The temperature control system of claim 14, wherein said spacing member is secured between a first retainer and a second retainer.

16. The temperature control system of claim 14, wherein said first and second wires extend about said spacing member.

17. The temperature control system of claim 16, wherein said first and second wires are secured to said spacing member by a shrink sleeve such that said first and second wires remain free to thermally expand and contract without introducing compression or compression stresses therein.

18. The temperature control system of claim 14, wherein said at least one temperature sensor further includes a second thermocouple operatively connected to said controller.

19. The temperature control system of claim 14, wherein said controller utilizes said temperature data from said at least one temperature sensor to adjust an output of said at least one heating element.

20. The temperature control system of claim 14, wherein said spacing member maintains said first and second wires in a spaced-apart relationship.

21. The temperature control system of claim 14, wherein said spacing member is formed of Delrin®

.

22. The temperature control system of claim 14, wherein a first protective tube covers a portion of said first wire, and a second protective tube covers a portion of said second wire.