Method for removing electricity and method for manufacturing semiconductor device

• US 8,268,642 B2
• Filed: 09/29/2010
• Issued: 09/18/2012
• Est. Priority Date: 10/05/2009
• Status: Active Grant

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Yoshitomi, Shuhei, Tsubuku, Masashi, Yamazaki, Shunpei
• Primary Examiner(s): Mandala, Michelle
• Application Number:
  US12/893,541
• Publication Number:
  US 20110081747A1
• Time in Patent Office: 720 Days
• Field of Search: 438/10, 438/17, 438/99, 438/149, 438/799, 257/E51.005, 257/E29.151, 257/E21.333, 257/E29.002
• US Class Current: 438/10
• CPC Class Codes: H01L 27/1225 with semiconductor materials not belonging to the group IV of the periodic table, e.g. InGaZnO
• CPC Class Codes: H01L 29/66969 of devices having semiconductor bodies not comprising group 14 or group 13/15 materials comprising selenium or tellurium in uncombined form other than as impurities in semiconductor bodies of other materials, comprising cuprous oxide or cuprous iodide H01L21/02365
• CPC Class Codes: H01L 29/78603 characterised by the insulating substrate or support H01L29/78657 takes precedence
• CPC Class Codes: H01L 29/7869 having a semiconductor body comprising an oxide semiconductor material, e.g. zinc oxide, copper aluminium oxide, cadmium stannate

Abstract

An object is to suppress a significant change in electrical characteristics of thin film transistors and a deviation thereof from the designed range due to static electricity, and to improve the yield in manufacturing semiconductor devices. In order to prevent a substrate from being charged with static electricity by heat treatment or to favorably reduce static electricity with which a substrate is charged in a manufacturing process of a semiconductor device, heat treatment is performed with a substrate provided with a thin film transistor stored in a conductive container. In addition, a heating apparatus for performing the heat treatment is electrically connected to a ground potential, and the container and the substrate are also electrically connected to the ground potential.

Claims

1. A method for removing electricity, comprising the steps of:

placing a substrate provided with a thin film transistor in a tray body;

placing a tray cover over the tray body so that the substrate provided with the thin film transistor is surrounded therein; and

performing a heat treatment to suppress presence of a static charge at a surface of the substrate provided with the thin film transistor or suppress generation of a static charge which is caused by wind,

wherein each of the tray body and the tray cover contains a conductive material,

wherein a combination of the tray body and the tray cover constitutes a conductive storage container, and

wherein at least one of the tray body and the tray cover has a depressed surface which has a larger area than the substrate.

2. The method for manufacturing a semiconductor device according to claim 1, wherein the thin film transistor comprises an oxide semiconductor layer.

3. A method for manufacturing a semiconductor device, comprising the steps of:

forming a thin film transistor including an oxide semiconductor layer over a substrate;

placing the substrate provided with the thin film transistor including the oxide semiconductor layer in a tray body;

placing a tray cover over the tray body so that the substrate provided with the thin film transistor including the oxide semiconductor layer is surrounded therein; and

performing a heat treatment with the substrate provided with the thin film transistor including the oxide semiconductor layer surrounded with the tray body and the tray cover,

wherein each of the tray body and the tray cover contains a conductive material,

wherein a combination of the tray body and the tray cover constitutes a conductive storage container, and

wherein at least one of the tray body and the tray cover has a depressed surface which has a larger area than the substrate.

4. The method for manufacturing a semiconductor device according to claim 3, wherein a temperature of the heat treatment is 100°

C. to 300°

C.

5. The method for manufacturing a semiconductor device according to claim 3, wherein a heating apparatus for performing the heat treatment is electrically connected to a ground potential and the conductive storage container is electrically connected to the ground potential.

6. A method for removing electricity, comprising the steps of:

wrapping a substrate provided with a thin film transistor in metal foil; and

performing a heat treatment to suppress presence of a static charge at a surface of the substrate provided with the thin film transistor or suppress generation of a static charge which is caused by wind.

7. A method for manufacturing a semiconductor device, comprising the steps of:

forming a thin film transistor including an oxide semiconductor layer over a substrate; and

performing a heat treatment with the substrate provided with the thin film transistor wrapped in conductive metal foil.

8. The method for manufacturing a semiconductor device according to claim 7, wherein a temperature of the heat treatment is 100°

C. to 300°

C.

9. The method for manufacturing a semiconductor device according to claim 7, wherein a heating apparatus for performing the heat treatment is electrically connected to a ground potential and the conductive metal foil is electrically connected to the ground potential.