Display device with at least one movable stop element

• US 8,270,062 B2
• Filed: 09/17/2009
• Issued: 09/18/2012
• Est. Priority Date: 09/17/2009
• Status: Active Grant

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: Qualcomm MEMS Technologies Incorporated (Qualcomm, Inc.)
• Inventors: Kothari, Manish, Gudlavalleti, Sauri, Zee, Stephen
• Primary Examiner(s): Mack, Ricky
• Assistant Examiner(s): SAHLE, MAHIDERE S
• Application Number:
  US12/562,093
• Publication Number:
  US 20110063712A1
• Time in Patent Office: 1,097 Days
• Field of Search: 359290-292
• US Class Current: 359/290
• CPC Class Codes: B81B 2201/042 Micromirrors, not used as optical switches
• CPC Class Codes: B81B 3/0008 Structures for avoiding electrostatic attraction, e.g. avoiding charge accumulation
• CPC Class Codes: B81C 2201/112 Depositing an anti-stiction or passivation coating, e.g. on the elastic or moving parts
• CPC Class Codes: B81C 2201/115 Roughening a surface
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means

Abstract

In certain embodiments, a device is provided including a substrate and a plurality of supports over the substrate. The device may further include a mechanical layer having a movable portion and a stationary portion. The stationary portion may disposed over the supports. In certain embodiments, the device further includes a reflective surface positioned over the substrate and mechanically coupled to the movable portion. The device of certain embodiments further includes at least one movable stop element displaced from and mechanically coupled to the movable portion. In certain embodiments, the at least a portion of the stop element may be positioned over the stationary portion.

Claims

1. A device comprising:

a substrate;

a plurality of supports over the substrate;

a movable layer comprising a movable portion and a stationary portion, the stationary portion disposed over the supports;

a reflective surface positioned to receive light through the substrate, the reflective surface coupled to the movable portion of the movable layer and positioned between the movable layer and the substrate; and

at least one movable stop element coupled to the movable portion of the movable layer such that the movable layer is positioned between the stop element and the substrate, wherein at least a portion of the stop element is also positioned over the stationary portion of the movable layer such that the stop element limits movement of the movable layer when the movable layer is moved towards the substrate.

2. The device of claim 1, wherein the portion of the stop element is positioned directly over the stationary portion of the movable layer contacts the stationary portion of the movable layer when the movable layer is moved towards the substrate to limit the movement of the movable layer towards the substrate.

3. The device of claim 1, wherein the stop element is at least partially substantially laterally displaced from the reflective surface.

4. The device of claim 1, wherein the stop element is positioned over the movable portion of the movable layer.

5. The device of claim 1, wherein the device is actuatable from a relaxed state to an actuated state by moving the reflective surface in a direction generally perpendicular to the substrate.

6. The device of claim 5, wherein the stop element is displaced from the stationary portion of the movable layer when the device is in the relaxed state and contacts the stationary portion when the device is in the actuated state.

7. The device of claim 5, wherein the stop element is displaced from the plurality of supports when the device is in the relaxed state and contacts at least one of the plurality of supports when the device is in the actuated state.

8. The device of claim 5, further comprising an actuation electrode and wherein the actuation of the device occurs in response to a voltage difference applied between the actuation electrode and one or more of the movable layer and the reflective surface.

9. The device of claim 1, wherein the movable portion comprises one or more tethers extending from the stationary portion.

10. The device of claim 1, further comprising a stiffener portion positioned above and mechanically coupled to the reflective surface.

11. The device of claim 10, wherein the stiffener portion is positioned between the movable portion and the at least one stop element.

12. The device of claim 1, further comprising:

a display;

a processor that is configured to communicate with said display, said processor being configured to process image data; and

a memory device that is configured to communicate with said processor.

13. The device as recited in claim 12, further comprising

a driver circuit configured to send at least one signal to said display;

and

a controller configured to send at least a portion of said image data to said driver circuit.

14. The device as recited in claim 12, further comprising an image source module configured to send said image data to said processor, wherein said image source module comprises at least one of a receiver, transceiver, and transmitter.

15. The device as recited in claim 12, further comprising an input device configured to receive input data and to communicate said input data to said processor.

16. A device comprising:

means for reflecting light;

first means for supporting the reflecting means, wherein the reflecting means is positioned to receive light through the first supporting means;

second means for supporting the reflecting means over the first supporting means and for moving the reflecting means relative to the first supporting means, the second supporting means comprising a movable portion and a stationary portion, wherein the reflecting means is positioned between the second supporting means and the first supporting means; and

means for limiting movement of the second supporting means, the limiting means coupled to the movable portion of the second supporting means and positioned such that the second supporting means is positioned between the limiting means and the first supporting means, wherein at least a portion of the limiting means is also positioned over the stationary portion of the second supporting means such that the limiting means limits the movement of the second supporting means when the second supporting means is moved towards the first supporting means.

17. The device of claim 16, wherein the first supporting means comprises a substrate.

18. The device of claim 17, wherein the first supporting means further comprises a plurality of supports disposed over the substrate, and wherein the stationary portion of the second supporting means is disposed over the supports.

19. The device of claim 16, wherein the second supporting means comprises a movable layer.

20. The device of claim 16, wherein the reflecting means comprises a reflective surface.

21. The device of claim 16, wherein the limiting means comprises a stop element mechanically coupled to the reflecting means, wherein a portion of the stop element is displaced from the reflecting means.

22. A method of manufacturing a device, the method comprising:

forming a plurality of supports over a substrate;

forming a movable layer over the supports comprising a movable portion and a stationary portion, the stationary portion disposed over the supports;

forming a reflective surface coupled to the movable portion of the movable layer between the movable layer and the substrate, the reflective surface positioned to receive light through the substrate; and

forming at least one movable stop element over the stationary portion, the stop element mechanically coupled to the movable portion of the movable layer such that the stop element limits the movement of the movable layer when the movable layer is moved towards the substrate.

23. The method of claim 22, wherein the stop element is formed such that a portion of the stop element positioned directly over the stationary portion of the movable layer contacts the stationary portion of the movable layer when the movable layer is moved towards the substrate to limit the movement of the movable layer towards the substrate.

24. The method of claim 22, wherein the device is actuatable from a relaxed state to an actuated state by moving the reflective surface in a direction generally perpendicular to the substrate.

25. The method of claim 22, wherein the at least one movable stop element is formed at least partially substantially laterally displaced from the reflective surface.

26. The method of claim 22, wherein the at least one stop element is positioned over the movable portion of the movable layer.

27. The method of claim 24, wherein the at least one stop element is displaced from the stationary portion of the movable layer when the device is in the relaxed state and contacts the stationary portion of the movable layer when the device is in the actuated state.

28. The method of claim 22, wherein the at least one stop element is displaced from the plurality of supports when the device is in the relaxed state and contacts at least one of the plurality of supports when the device is in the actuated state.

29. The method of claim 22, further comprising forming an actuation electrode, and wherein the actuation of the device occurs in response to a voltage difference applied between the actuation electrode and one or more of the movable layer and the reflective surface.

30. The method of claim 22, wherein the movable portion of the movable layer includes one or more tethers extending from the stationary portion.

31. The method of claim 22, further comprising forming a stiffener portion above and mechanically coupled to the reflective surface.