Acoustic wave guide device and method for minimizing trimming effects and piston mode instabilities

• US 8,294,331 B2
• Filed: 03/07/2011
• Issued: 10/23/2012
• Est. Priority Date: 09/22/2009
• Status: Active Grant

• Current Assignee: Qorvo US, Inc. (Qorvo, Inc.)
• Original Assignee: TriQuint Semiconductor Incorporated (Qorvo, Inc.)
• Inventors: Abbott, Benjamin P., Aigner, Robert, Chen, Alan S., Gratier, Julien, Kook, Taeho, Solal, Marc, Steiner, Kurt G.
• Primary Examiner(s): DOUGHERTY, THOMAS M
• Application Number:
  US13/041,653
• Publication Number:
  US 20120161577A1
• Time in Patent Office: 596 Days
• Field of Search: 310/313.B, 310/313.C, 29/253.5
• US Class Current: 310/313.B
• CPC Class Codes: H03H 9/02724 Comb like grating lines
• CPC Class Codes: H03H 9/02858 of wave front distortion
• CPC Class Codes: H03H 9/1452 by finger overlap length, apodisation
• CPC Class Codes: H03H 9/1457 Transducers having different finger widths
• CPC Class Codes: Y10T 29/42 Piezoelectric device making
• CPC Class Codes: Y10T 29/49009 Dynamoelectric machine

Abstract

An acoustic wave device operable as a piston mode wave guide includes electrodes forming an interdigital transducer on a surface of the piezoelectric substrate, wherein each of the plurality of electrodes is defined as having a transversely extending center region and transversely opposing edge regions for guiding an acoustic wave longitudinally through the transducer. A Silicon Oxide overcoat covers the transducer and a Silicon Nitride layer covers the Silicon Oxide overcoat within only the center and edge regions. The thickness of the Silicon Nitride layer is sufficient for providing a frequency modification to the acoustic wave within the center region and is optimized with a positioning of a Titanium strip within each of the opposing edge regions. The Titanium strip reduces the acoustic wave velocity within the edge regions with the velocity in the edge regions being less than the wave velocity within the transducer center region.

Claims

1. An acoustic wave device comprising:

a piezoelectric substrate having a surface for supporting an acoustic wave;

an interdigital transducer carried on the surface of the piezoelectric substrate,

wherein each of a plurality of electrodes of the transducer has a first end electrically connected to at least one of first and second busbars and an opposing second end having an edge spaced from the opposing busbar so as to form a gap between the edge of each electrode and the opposing busbar, the gaps forming a gap region extending longitudinally along the transducer,

wherein each electrode is further defined by a first transversely extending portion proximate the busbar and generally contained within the gap region, a second transversely extending portion proximate the edge and defining an edge region extending longitudinally along the transducer, and a third transversely extending portion of the electrode therebetween, the third transversely extending portion defining a transducer center region, and

a first dielectric layer covering the transducer for a burying thereof;

a second dielectric layer covering the plurality of electrodes at least within the center and edge regions, the second dielectric layer sufficient for providing a frequency modification to the acoustic wave within the center region; and

a third layer extending within only one of the center region and both edge regions, the third layer sufficient for modifying a velocity of the acoustic wave within at least one of the center region and the edge regions, wherein the velocity in the edge regions is less than the velocity in the center region.

2. The device according to claim 1, wherein the third layer comprises at least one of a dielectric layer and a metal layer.

3. The device according to claim 2, wherein the metal layer comprises a Titanium strip.

4. The device according to claim 1, wherein the piezoelectric substrate comprises Lithium Niobate.

5. The device according to claim 1, wherein the electrodes are formed from a material having a higher density than Aluminum.

6. The device according to claim 1, wherein the first dielectric layer comprises a Silicon Oxide material forming an overcoat sufficiently covering the transducer to reduce temperature sensitivity thereof.

7. The device according to claim 1, wherein the second dielectric layer comprises Silicon Nitride.

8. The device according to claim 1, wherein the third layer is positioned within the first dielectric layer.

9. The device according to claim 8, wherein the third layer is positioned more closely to a top surface of the first dielectric layer than to a top surface of the electrodes.

10. The device according to claim 1, wherein a transverse length dimension of the gap is at least one of one acoustic wave length and greater than three acoustic wavelengths.

11. The device according to claim 1, wherein the electrodes comprise Copper having an h/p thickness generally ranging from 0.10 to 0.20, the first dielectric layer comprises a Silicon Oxide material having a thickness of approximately 0.5 h/p, the third layer comprises a Titanium strip having an h/p thickness generally ranging from 0.06 to 0.10, and the second dielectric layer comprises a Silicon Nitride material having an h/p thickness generally ranging from 0.005 to 0.015, and wherein the Titanium strip is within the first dielectric layer.

12. The device according to claim 11, wherein the substrate comprises Lithium Niobate having a cut angle between Y+120 deg and Y+140 deg.

13. An acoustic wave device comprising:

a piezoelectric substrate;

a plurality of electrodes forming an interdigital transducer on a surface of the piezoelectric substrate, wherein each of the plurality of electrodes includes a transversely extending center region and transversely opposing edge regions for guiding an acoustic wave longitudinally through the transducer;

a first dielectric layer covering the interdigital transducer;

a second dielectric layer covering the first dielectric layer at least within the center and edge regions of the electrodes, the second dielectric layer sufficient for providing a frequency modification to the acoustic wave within the center region; and

a metal layer extending only within each of the opposing edge regions, the metal layer sufficient for reducing a velocity of the acoustic wave within the edge regions, wherein the velocity in the edge regions is less than the wave velocity within the transducer center region.

14. The device according to claim 13, wherein the first dielectric layer comprises a Silicon Oxide material forming an overcoat sufficiently covering the transducer to reduce temperature sensitivity thereof.

15. The device according to claim 14, wherein the third layer is positioned within the first dielectric layer.

16. The device according to claim 13, wherein the second dielectric layer comprises Silicon Nitride.

17. The device according to claim 13, wherein the metal layer is positioned within the first dielectric layer.

18. The device according to claim 17, wherein the metal layer is positioned more closely to a top surface of the first dielectric layer than to a top surface of the electrodes.

19. The device according to claim 13, wherein the piezoelectric substrate comprises Lithium Niobate, the electrodes substantially comprise Copper and have an h/p thickness generally ranging from 0.10 to 0.20, the first dielectric layer comprises a Silicon Oxide material having a thickness of approximately 0.5 h/p, the metal layer comprises a Titanium strip having an h/p thickness generally ranging from 0.06 to 0.10, and the second dielectric layer comprises a Silicon Nitride material having an h/p thickness generally ranging from 0.005 to 0.015, and wherein the Titanium strip is within the first dielectric layer.

20. The device according to claim 19, wherein the substrate comprises Lithium Niobate having a cut angle between Y+120 deg and Y+140 deg.

21. A method of manufacturing a surface acoustic wave device for operating as a piston mode wave guide, the method comprising:

forming a plurality of electrodes into an interdigital transducer on a surface of a piezoelectric substrate, wherein each of the plurality of electrodes includes a transversely extending center region and transversely opposing edge regions for guiding an acoustic wave longitudinally through the interdigital transducer;

covering the interdigital transducer with a first dielectric layer to form an overcoat;

positioning a third layer within only each of the opposing edge regions, the third layer sufficient for reducing a velocity of the acoustic wave within the edge regions, wherein the velocity in the edge regions is less than the wave velocity within the transducer center region; and

covering the first dielectric layer with a second dielectric layer at least over the center and edge regions of the electrodes, the second dielectric layer sufficient for providing a frequency modification to the acoustic wave within the center region.

22. The method according to claim 21, further comprising:

forming the first dielectric layer from a Silicon Oxide material;

forming the third layer as a metal strip;

selecting a thickness of the metal strip for providing a velocity shift sufficient for providing a piston mode wave guide;

placing the metal strip within the overcoat; and

adjusting a vertical placement of the metal strip between a top surface of the electrodes and a top surface of the first dielectric layer to minimize piston mode instabilities.

23. The method according to claim 22, wherein the metal strip comprises Titanium.

24. The method according to claim 22, further comprising:

forming the second dielectric from a Silicon Nitride material;

selecting a thickness of the second dielectric for modifying a resonant frequency sufficient for providing a desirable piston mode operation of the wave guide and frequency trimming range.

25. The method according to claim 24, wherein the metal strip placing comprises positioning the metal strip more closely to a top surface of the first dielectric layer than to a top surface of the electrodes.

26. The method according to claim 21, further comprising:

forming the piezoelectric substrate from Lithium Niobate;

forming the electrodes from a Copper material having an h/p thickness generally ranging from 0.10 to 0.20;

forming the first dielectric layer from a Silicon Oxide material having a thickness of approximately 0.5 h/p;

forming the third layer as a Titanium strip having an h/p thickness generally ranging from 0.06 to 0.10; and

forming the second dielectric layer from a Silicon Nitride material having an h/p thickness generally ranging from 0.005 to 0.015.