System and method for safeguarding wafers and photomasks
First Claim
1. A system for safeguarding an article comprising:
- a container for storing a wafer;
a flashing unit for flashing light with a pre-determined light pattern;
an anti-theft unit capable of performing an anti-theft function, the anti-theft unit being attached to the container; and
a trigger unit electrically connected to the anti-theft unit for triggering the anti-theft function of the anti-theft unit, in response to detecting the pre-determined light pattern of the flashing unit, wherein the container is a Front Opening Unified Pod (FOUP), the anti-theft unit is an airbag comprising a solid propellant inflator and a nylon bag, and the anti-theft function is inflation of the airbag so as to break the wafer in the FOUP.
1 Assignment
0 Petitions
Accused Products
Abstract
A system and a method for safeguarding wafers and photomasks. The system includes a container for storing an article, the article being a wafer or a photomask; a flashing unit for flashing light with a pre-determined light pattern; an anti-theft unit capable of performing an anti-theft function, the anti-theft unit being attached to the container; and a trigger unit electrically connected to the anti-theft unit for triggering the anti-theft function of the anti-theft unit, in response to detecting the pre-determined light pattern of the flashing unit. The method includes providing a container having an anti-theft unit capable of performing an anti-theft function; storing an article in the container, the article being a wafer or a photomask; providing a flashing light with a pre-determined light pattern; detecting the pre-determined light pattern; and performing the anti-theft function by the anti-theft unit, in response to detecting the pre-determined light pattern.
7 Citations
20 Claims
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1. A system for safeguarding an article comprising:
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a container for storing a wafer; a flashing unit for flashing light with a pre-determined light pattern; an anti-theft unit capable of performing an anti-theft function, the anti-theft unit being attached to the container; and a trigger unit electrically connected to the anti-theft unit for triggering the anti-theft function of the anti-theft unit, in response to detecting the pre-determined light pattern of the flashing unit, wherein the container is a Front Opening Unified Pod (FOUP), the anti-theft unit is an airbag comprising a solid propellant inflator and a nylon bag, and the anti-theft function is inflation of the airbag so as to break the wafer in the FOUP. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A system for safeguarding an article comprising:
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a container for storing a photomask; a flashing unit for flashing light with a pre-determined light pattern; an anti-theft unit capable of performing an anti-theft function, the anti-theft unit being attached to the container; and a trigger unit electrically connected to the anti-theft unit for triggering the anti-theft function of the anti-theft unit, in response to detecting the pre-determined light pattern of the flashing unit, wherein the container is a Reticle Standard Mechanical InterFace Pod (RSP), the anti-theft unit is a discharging device electrically connected to the photomask stored in the container, and the anti-theft function is discharging a current on the photomask by the discharging device so as to destroy a metal pattern on the photomask. - View Dependent Claims (8, 9, 10, 11, 12)
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13. A method for safeguarding an article comprising:
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providing a container having an anti-theft unit capable of performing an anti-theft function; storing the article in the container, wherein the article is a wafer or a photomask; providing a flashing light with a pre-determined light pattern; detecting the pre-determined light pattern; and performing the anti-theft function by the anti-theft unit, in response to detecting the pre-determined light pattern, wherein the anti-theft unit comprises a strobe light, a sound alarm, an airbag, or a discharging device and the step of performing the anti-theft function comprises flashing the strobe light, sounding the sound alarm, inflating the airbag so as to break the wafer, or discharging a current on the photomask with the discharging device so as to destroy a metal pattern on the photomask. - View Dependent Claims (14, 15, 16, 17, 18)
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19. A method for safeguarding an article comprising:
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providing a container having a first anti-theft unit capable of performing a first anti-theft function and a second anti-theft unit capable of performing a second anti-theft function; storing the article in the container, wherein the article is a wafer or a photomask; providing a first flashing light with a first pre-determined light pattern; detecting the first pre-determined light pattern; performing the first anti-theft function by the first anti-theft unit, in response to detecting the first pre-determined light pattern; providing a second flashing light with a second pre-determined light pattern, wherein the second flashing light is provided when the first anti-theft function has lasted for a period ranging from about 2 minutes to about 5 minutes after the first anti-theft function is triggered; detecting the second pre-determined light pattern; and performing the second anti-theft function by the second anti-theft unit, in response to detecting the second pre-determined light pattern, wherein the step of performing the second anti-theft function comprises inflating an airbag so as to break the wafer or discharging a current on the photomask with a discharging device so as to destroy a metal pattern on the photomask. - View Dependent Claims (20)
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Specification