Apparatus and method for microfabricated multi-dimensional sensors and sensing systems

• US 8,310,016 B2
• Filed: 11/09/2009
• Issued: 11/13/2012
• Est. Priority Date: 07/17/2007
• Status: Active Grant

• Current Assignee: Sensirion AG (Sensirion Holding AG)
• Original Assignee: KWJ Engineering, Inc. (Interlink Electronics Incorporated)
• Inventors: Stetter, Joseph R.
• Primary Examiner(s): NGUYEN, CUONG QUANG
• Application Number:
  US12/615,110
• Publication Number:
  US 20100060465A1
• Time in Patent Office: 1,100 Days
• Field of Search: 257415-420, 257/E29.105, 257/E21.002
• US Class Current: 257/415
• CPC Class Codes: A61B 2562/028 Microscale sensors, e.g. electromechanical sensors [MEMS]
• CPC Class Codes: A61B 5/01 Measuring temperature of body parts ; Diagnostic temperature sensing, e.g. for malignant or inflamed tissue clinical contact thermometers G01K13/20
• CPC Class Codes: A61B 5/021 Measuring pressure in heart or blood vessels A61B5/0205 takes precedence
• CPC Class Codes: A61B 5/02438 with portable devices, e.g. worn by the patient
• CPC Class Codes: A61B 5/0816 Measuring devices for examining respiratory frequency measuring frequency of electric signals G01R23/00
• CPC Class Codes: A61B 5/14552 Details of sensors specially adapted therefor
• CPC Class Codes: B81B 3/0021 Transducers for transforming electrical into mechanical energy or vice versa dynamo-electric machines H02K99/00; electrostatic machines H02N1/00; piezoelectric devices H10N30/00
• CPC Class Codes: G01N 27/128 Microapparatus
• CPC Class Codes: G01N 33/0032 using two or more different physical functioning modes
• CPC Class Codes: G01N 33/497 of gaseous biological material, e.g. breath

Abstract

A universal microelectromechanical (MEMS) nano-sensor platform having a substrate and conductive layer deposited in a pattern on the surface to make several devices at the same time, a patterned insulation layer, wherein the insulation layer is configured to expose one or more portions of the conductive layer, and one or more functionalization layers deposited on the exposed portions of the conductive layer to make multiple sensing capability on a single MEMS fabricated device. The functionalization layers are adapted to provide one or more transducer sensor classes selected from the group consisting of: radiant, electrochemical, electronic, mechanical, magnetic, and thermal sensors for chemical and physical variables and producing more than one type of sensor for one or more significant parameters that need to be monitored.

Claims

1. A monitoring device, comprising:

a. a power source;

b. wireless communication equipment; and

c. at least one sensor or sensing system utilizing microelectromechanical systems (MEMS) technology that consumes less than 500 μ

W of power;

wherein data gathered from the at least one sensor or sensing system is transferred by the wireless communication equipment to a central communication hub;

wherein the at least one sensor or sensing system comprises a microelectromechanical nano-sensor platform having;

a substrate including a surface with a first insulating surface layer, wherein the first insulating surface layer is an integral part of the substrate or disposed on the surface of the substrate;

a microstructure first conductive layer deposited in one or more patterns on the surface to make more than one device or electrode;

a second insulation layer, wherein the second insulation layer is configured such that it covers at least some portion of the first conductive layer'"'"'s one or more patterns and

a second conductive layer deposited in one or more patterns on the second insulation layer to form devices or electrodes, wherein the devices can be utilized for sensing; and

one or more functionalization layers deposited on at least some portion of the one or more patterns of the second conductive layer, wherein the functionalization layers are adapted to provide one or more transducer sensor classes selected from the group consisting of;

radiant, electrochemical, electronic, mechanical, magnetic and/or thermal devices.

2. The monitoring device of claim 1, wherein the at least one sensor or sensing system utilizing MEMS technology comprises at least one vital sign sensor.

3. The monitoring device of claim 2, wherein the at least one vital sign sensor senses a vital sign selected from the group consisting of heart rate, body temperature, respiration rate, blood pressure, pulse oximetry and any combination thereof.

4. The monitoring device of claim 1, wherein the at least one sensor or sensing system utilizing MEMS technology comprises at least one gas sensor.

5. The monitoring device of claim 4, wherein the at least one gas sensor senses a gas selected from the group consisting of hydrogen, methane, carbon monoxide, hydrogen sulfide, chlorine, ozone, diesel particulates, gasoline fumes, ethanol and combinations thereof.

6. The monitoring device of claim 1, wherein the at least one sensor or sensing system utilizing MEMS technology comprises at least one surrounding environmental condition sensor.

7. The monitoring device of claim 6, wherein the at least one surrounding environmental condition sensor senses a surrounding environmental condition selected from the group consisting of temperature, pressure, radiation, moisture and combinations thereof.

8. The monitoring device of claim 1, further comprising at least one of an audible alarm, a visual alarm and/or a tactile alarm.

9. The monitoring device of claim 1, further comprising an integrated global positioning system.

10. The monitoring device of claim 1, wherein the monitoring device is incorporated on or within an earpiece or can be worn on or around the face or human body.

11. The monitoring device of claim 10, wherein the at least one sensor or sensing system utilizing MEMS technology comprises a vital sign sensor designed for contact with an ear.

12. The monitoring device of claim 11, further comprising at least one hazardous gas sensor or sensing system utilizing MEMS technology.

13. The monitoring device of claim 11, further comprising at least one surrounding environmental condition sensor or sensing system utilizing MEMS technology that results in a sensor with less that 500 uW power.

14. A method of monitoring personnel comprising use of the monitoring device as claimed in claim 1.

15. The method of claim 14, wherein the monitoring comprises vital sign monitoring.

16. The method of claim 14, wherein the monitoring comprises hazardous gas monitoring.

17. The method of claim 14, wherein the monitoring comprises surrounding environmental conditions monitoring.

18. A monitoring device, comprising:

a. a power source;

b. wireless communication equipment; and

c. at least one sensor or sensing system utilizing microelectromechanical systems (MEMS) technology that consumes less than 500 μ

W of power;

wherein data gathered from the at least one sensor or sensing system is transferred by the wireless communication equipment to a central communication hub;

wherein the at least one sensor or sensing system comprises a microelectromechanical nano-sensor platform having;

a substrate including an upper surface, wherein the upper surface comprises an insulator or has an insulator layer thereon;

a microstructure conductive layer deposited in a pattern on the surface to make several devices, wherein the conductive layer comprises one or more filaments, and wherein the filaments are disposed above and parallel to the substrate configured such that there is an air gap between the filaments and the upper surface of the substrate; and

wherein filaments comprise a size/width less than 10 microns and a thickness of 1 micron or less.

20. A method of monitoring personnel comprising use of the monitoring device as claimed in claim 18.

19. A monitoring device, comprising:

a. a power source;

b. wireless communication equipment; and

c. at least one sensor or sensing system utilizing microelectromechanical systems (MEMS) technology that consumes less than 500 μ

W of power;

wherein data gathered from the at least one sensor or sensing system is transferred by the wireless communication equipment to a central communication hub;

wherein the at least one sensor or sensing system comprises a microelectromechanical nano-sensor platform having;

a semiconductor substrate including a surface;

a microstructure polysilicon layer deposited in a pattern on the surface to make several devices, wherein the polysilicon layer comprises a first pair of filaments, wherein the filaments are disposed above and parallel to the semiconductor substrate with an air gap between the base of the filaments and the surface of the substrate;

an insulation layer, wherein the insulation layer is configured such that the first pair of filaments of the polysilicon layer remain exposed and are not covered by the insulation layer;

one or more functionalization layers deposited on the exposed pair of filaments of the polysilicon layer, wherein the one or more functionalization layers are adapted to provide one or more transducer platform classes selected from the group consisting of;

radiant, electrochemical, electronic;

mechanical, and thermal; and

wherein the at least one pair of the filaments has a width of less than 10 microns.

21. A method of monitoring personnel comprising use of the monitoring device as claimed in claim 19.