Electromechanical devices having etch barrier layers
First Claim
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1. An apparatus, comprising:
- a substrate;
an electrode, wherein the electrode is located over the substrate;
an additional layer located over the electrode, wherein the additional layer comprises SiO2,an etch barrier layer, wherein the etch barrier layer is located over the additional layer;
an air gap, wherein the air gap is located adjacent the etch barrier layer; and
a displaceable layer, wherein the displaceable layer is reflective to incident light.
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Abstract
In one embodiment, the invention provides a method for fabricating a microelectromechanical systems device. The method comprises fabricating a first layer comprising a film having a characteristic electromechanical response, and a characteristic optical response, wherein the characteristic optical response is desirable and the characteristic electromechanical response is undesirable; and modifying the characteristic electromechanical response of the first layer by at least reducing charge build up thereon during activation of the micro electromechanical systems device.
151 Citations
18 Claims
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1. An apparatus, comprising:
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a substrate; an electrode, wherein the electrode is located over the substrate; an additional layer located over the electrode, wherein the additional layer comprises SiO2, an etch barrier layer, wherein the etch barrier layer is located over the additional layer; an air gap, wherein the air gap is located adjacent the etch barrier layer; and a displaceable layer, wherein the displaceable layer is reflective to incident light. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. An electromechanical device comprising:
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a substrate; an electrode, wherein the electrode is located on the substrate; an air gap; an additional layer, wherein the additional layer comprises SiO2, and wherein the additional layer is located between the electrode and the air gap; and an etch barrier layer comprising Al2O3, wherein the etch barrier layer is located between the air gap and the additional layer. - View Dependent Claims (15, 16, 17, 18)
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Specification