Dual scara arm

  • US 8,376,685 B2
  • Filed: 06/09/2005
  • Issued: 02/19/2013
  • Est. Priority Date: 06/09/2004
  • Status: Active Grant
First Claim
Patent Images

1. A substrate transport apparatus comprising:

  • a drive section; and

    a scara arm operably connected to the drive section to move the scara arm, the scara arm comprising;

    an upper arm and at least two forearms movably mounted on the upper arm and capable of holding a substrate thereon,wherein the upper arm includes a first arm section and a second arm section that are releasably coupled to each other at a common axis of rotation to form a substantially rigid link where the first and second arm sections are incapable of movement relative to one another during substrate transport, each of the arm sections having at least one of the at least two forearms movably mounted thereon and wherein the releasable coupling adjustably joins the arm sections to each other at the common axis of rotation for changing a predetermined dimension of the upper arm.

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