Methods for measurement and characterization of interferometric modulators

• US 8,386,201 B2
• Filed: 02/06/2009
• Issued: 02/26/2013
• Est. Priority Date: 02/11/2008
• Status: Expired due to Fees

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: Qualcomm MEMS Technologies Incorporated (Qualcomm, Inc.)
• Inventors: Govil, Alok, Mignard, Marc, Khazeni, Kasra
• Primary Examiner(s): Teixeira Moffat, Jonathan C
• Assistant Examiner(s): HWANG, TIMOTHY
• Application Number:
  US12/367,423
• Publication Number:
  US 20090204350A1
• Time in Patent Office: 1,481 Days
• Field of Search: 702/65
• US Class Current: 702/65
• CPC Class Codes: B81B 2201/042 Micromirrors, not used as optical switches
• CPC Class Codes: B81C 99/0045 End test of the packaged device
• CPC Class Codes: G01D 5/2417 by varying separation
• CPC Class Codes: G01R 31/2829 Testing of circuits in sensor or actuator systems testing of apparatus for measuring electric or magnetic variables G01R35/00; testing of indicating or recording apparatus G01D; in airbag systems B60R21/0173; checking gas analysers G01N33/007; monitoring or fail-safe circuits for electromagnets H01F7/1844
• CPC Class Codes: G01R 31/2837 Characterising or performance testing, e.g. of frequency response transient response G01R27/28

Abstract

Various methods are described to characterize interferometric modulators or similar devices. Measured voltages across interferometric modulators may be used to characterize transition voltages of the interferometric modulators. Measured currents may be analyzed by integration of measured current to provide an indication of a dynamic response of the interferometric modulator. Frequency analysis may be used to provide an indication of a hysteresis window of the interferometric modulator or mechanical properties of the interferometric modulator. Capacitance may be determined through signal correlation, and spread-spectrum analysis may be used to minimize the effect of noise or interference on measurements of various interferometric modulator parameters.

Claims

1. A method of characterizing the behavior of an electromechanical device, the method comprising:

applying a driving voltage signal to the electromechanical device, wherein the electromechanical device includes a movable layer and a fixed layer that together form a capacitor;

measuring a current through the electromechanical device as a function of time;

integrating the current over a period of time, wherein integrating the current through the electromechanical device provides a measure of the charge accumulated on the electromechanical device as a function of time;

determining a measure of a capacitance of the electromechanical device as a function of time by dividing the charge accumulated on the electromechanical device by the driving voltage signal;

determining a measure of the position of the movable layer relative to the fixed layer based at least in part on a measure of the capacitance as a function of time; and

determining a duration of an actuation time of the electromechanical device based at least in part upon the measure of the position of the movable layer as a function of time, wherein the actuation time corresponds to a transition period in which the electromechanical device moves from an unactuated state to an actuated state.

2. The method of claim 1, additionally comprising determining a measure of a damping force acting on the movable layer based at least in part upon the measure of the position of the movable layer.

3. The method of claim 1, wherein the electromechanical device includes an interferometric modulator.

4. A method of characterizing the dynamic behavior of an electromechanical device, the method comprising:

applying a driving voltage to the electromechanical device for a first period of time, the electromechanical device comprising a movable electrode and a fixed electrode, wherein the movable electrode extends generally perpendicular to the fixed electrode and is electrostatically movable towards the first electrode;

measuring a current through the electromechanical device as a function of time over a second period of time, the second period of time comprising at least a portion of the first period of time; and

determining a duration of a transition period in which the movable electrode moves from an unactuated state to an actuated state based on an integration of the current.

5. The method of claim 4, further comprising determining a charge accumulated on the electromechanical device as a function of time.

6. The method of claim 4, further comprising determining a position of a movable electrode of the electromechanical device as a function of time.

7. The method of claim 4, additionally comprising determining the second period of time using the measured current.

8. The method of claim 7, wherein determining the second period of time using the measured current includes determining a beginning of a movement of the movable layer.

9. The method of claim 8, wherein the second period of time extends from a beginning of the first period of time to the beginning of the movement of the movable layer, and wherein providing an indication of the dynamic behavior of the device includes determining an initial state of the electromechanical device.

10. A device comprising:

an electromechanical device comprising a movable layer extending substantially parallel to a fixed electrode and electrostatically movable towards the fixed electrode; and

circuitry configured to apply a driving voltage signal to the electromechanical device to induce movement of the movable layer, measure a current through the electromechanical device as a function of time, integrate the current over a period of time, and determine a duration of a transition period in which the movable layer moves from an unactuated state to an actuated state based on the integrated current.

11. The electromechanical device of claim 10, wherein the circuitry is further configured to determine a position of the movable layer.

12. A device, comprising:

means for inducing movement of a movable layer of an electromechanical device towards a fixed electrode of the electromechanical device, wherein the movable layer extends generally parallel to the fixed electrode;

means for measuring a current through the electromechanical device;

means for integrating the current over a period of time; and

means for determining a duration of a transition period in which the movable layer moves from an unactuated state to an actuated state based upon the integrated current.

13. The device of claim 12, wherein the means for inducing movement includes circuitry configured to apply a driving voltage to the movable layer of the MEMS device.

14. The device of claim 12, further including circuitry configured to determine a position of the movable layer.

15. The device of claim 12, wherein the means for determining the duration of the transition period includes circuitry configured to determine an actuation time of the electromechanical device, wherein the actuation time corresponds to the transition period.