Conformal shielding process using flush structures

• US 8,409,658 B2
• Filed: 12/07/2007
• Issued: 04/02/2013
• Est. Priority Date: 06/27/2007
• Status: Active Grant

• Current Assignee: Qorvo US, Inc. (Qorvo, Inc.)
• Original Assignee: RF Micro Devices Incorporated (Qorvo, Inc.)
• Inventors: Hiner, David J., Warren, Waite R. Jr., Jandzinski, David
• Primary Examiner(s): Talbot, Brian K
• Application Number:
  US11/952,592
• Publication Number:
  US 20090000816A1
• Time in Patent Office: 1,943 Days
• Field of Search: 427/96.3, 427/96.4, 427/96.5, 427/97.1
• US Class Current: 427/96.3
• CPC Class Codes: H01L 23/552 Protection against radiation, e.g. light or electromagnetic waves
• CPC Class Codes: H01L 24/97 the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
• CPC Class Codes: H01L 25/0655 the devices being arranged next to each other
• CPC Class Codes: H01L 2924/01005 Boron [B]
• CPC Class Codes: H01L 2924/01006 Carbon [C]
• CPC Class Codes: H01L 2924/01013 Aluminum [Al]
• CPC Class Codes: H01L 2924/01016 Sulfur [S]
• CPC Class Codes: H01L 2924/01018 Argon [Ar]
• CPC Class Codes: H01L 2924/01029 Copper [Cu]
• CPC Class Codes: H01L 2924/0103 Zinc [Zn]
• CPC Class Codes: H01L 2924/01033 Arsenic [As]
• CPC Class Codes: H01L 2924/01046 Palladium [Pd]
• CPC Class Codes: H01L 2924/01047 Silver [Ag]
• CPC Class Codes: H01L 2924/01078 Platinum [Pt]
• CPC Class Codes: H01L 2924/01079 Gold [Au]
• CPC Class Codes: H01L 2924/01082 Lead [Pb]
• CPC Class Codes: H01L 2924/014 Solder alloys
• CPC Class Codes: H01L 2924/12041 LED
• CPC Class Codes: H01L 2924/14 Integrated circuits
• CPC Class Codes: H01L 2924/1815 Shape
• CPC Class Codes: H01L 2924/3025 : Electromagnetic shielding
• CPC Class Codes: H05K 1/0218 : by printed shielding conductors, ground planes or power plane H05K1/0236 takes precedence
• CPC Class Codes: H05K 2203/0723 : Electroplating, e.g. finish plating
• CPC Class Codes: H05K 3/0052 : Depaneling, i.e. dividing a panel into circuit boards; Working of the edges of circuit boards
• CPC Class Codes: H05K 3/181 : by electroless plating adhesives therefor H05K3/387
• CPC Class Codes: H05K 3/284 : for encapsulating mounted components H05K1/185 takes precedence
• CPC Class Codes: Y10T 29/49 : Method of mechanical manufacture
• CPC Class Codes: Y10T 29/49002 : Electrical device making
• CPC Class Codes: Y10T 29/49117 : Conductor or circuit manufacturing
• CPC Class Codes: Y10T 29/49124 : On flat or curved insulated base, e.g., printed circuit, etc.
• CPC Class Codes: Y10T 29/49126 : Assembling bases
• CPC Class Codes: Y10T 29/49128 : Assembling formed circuit to base
• CPC Class Codes: Y10T 29/4913 : Assembling to base an electrical component, e.g., capacitor, etc.
• CPC Class Codes: Y10T 29/49131 : by utilizing optical sighting device
• CPC Class Codes: Y10T 29/49144 : by metal fusion
• CPC Class Codes: Y10T 29/49146 : with encapsulating, e.g., potting, etc.
• CPC Class Codes: Y10T 29/49153 : with shaping or forcing terminal into base aperture
• CPC Class Codes: Y10T 29/49155 : Manufacturing circuit on or in base
• CPC Class Codes: Y10T 29/49204 : Contact or terminal manufacturing
• CPC Class Codes: Y10T 29/49789 : Obtaining plural product pieces from unitary workpiece

Abstract

In one embodiment, a meta-module having circuitry for two or more modules is formed on a substrate, which is preferably a laminated substrate. The circuitry for the different modules is initially formed on the single meta-module. Each module will have one or more component areas in which the circuitry is formed. A metallic structure is formed on or in the substrate for each component area to be shielded. A single body, such as an overmold body, is then formed over all of the modules on the meta-module. At least a portion of the metallic structure for each component area to be shielded is then exposed through the body by a cutting, drilling, or like operation. Next, an electromagnetic shield material is applied to the exterior surface of the body of each of the component areas to be shielded and in contact with the exposed portion of the metallic structures.

Claims

1. A method of manufacturing a module comprising:

providing an electronic meta-module comprising a substrate, a plurality of component areas on a surface of the substrate for a plurality of modules, a plurality of exposed metallic structures, wherein certain component areas of the plurality of component areas are associated with the exposed metallic structures, and a plurality of continuous metal traces on the surface of the substrate, wherein each of the continuous metal traces substantially extends about a periphery of one of the certain component areas that are associated with the exposed metallic structures, and a bottom surface of each of the plurality of exposed metallic structures is located above a portion of one of the plurality of continuous metal traces;

forming a body of a dielectric material that covers the plurality of component areas, wherein a top surface of each of the exposed metallic structures is substantially flush with a top portion of an exterior surface of the body; and

applying an electromagnetic shield material over at least portions of the exterior surface of the body for each of the certain component areas and on the top surface of each of the exposed metallic structures to form electromagnetic shields over the certain component areas, and wherein the exposed metallic structures provide a conductive path between the electromagnetic shields and the plurality of continuous metal traces on the surface of the substrate.

2. The method of claim 1 wherein the body surrounds each of the exposed metallic structures while leaving the top surface of each of the exposed metallic structures exposed prior to applying the electromagnetic shield material.

3. The method of claim 1 wherein the top metallic element is located directly on the bottom metallic element.

4. The method of claim 1 wherein the plurality of continuous metallic traces is formed from a metal layer on the surface of the substrate.

5. The method of claim 1 further comprising separating the plurality of modules of the electronic meta-module from each other, wherein each module comprises at least one of the certain component areas having one of the electromagnetic shields.

6. The method of claim 1 further comprising exposing the exterior surface of the body to a reactive process gas to remove contaminants on the exterior surface of the body prior to applying the electromagnetic shield material.

7. The method of claim 1 further comprising roughening the exterior surface of the body prior to applying the electromagnetic shield material.

8. The method of claim 1 wherein applying the electromagnetic shield material comprises spraying a conductive material over the at least portions of the exterior surface of the body and on the top surface of each of the exposed metallic elements.

9. The method of claim 1 wherein applying the electromagnetic shield material comprises plating at least one conductive material over the at least portions of the exterior surface of the body and on the top surface of each of the exposed metallic elements.

10. The method of claim 9 wherein plating the at least one conductive material comprises plating a first layer with an electroless plating process and plating a second layer with an electrolytic plating process.

11. The method of claim 1 wherein the body is formed by uniformly covering the components areas for the plurality of modules with the dielectric material, such that the body is initially a single, continuous element that covers all of the plurality of component areas.

12. The method of claim 1 wherein each of the exposed metallic structures comprises a metallic body which is mounted directly on one of the continuous metal traces.

13. A method of manufacturing a module, the method comprising:

forming, a component on a laminate;

forming a first metal grid on the laminate, wherein the first metal grid substantially encircles the component;

forming a surface mount structure on top of at least a portion of the first metal grid, wherein the surface mount structure is electrically conductive;

forming an overmold body over the component to the extent that a top surface of the overmold body is substantially flush with the top surface of the surface mount structure, and wherein the top surface of the surface mount structure remains exposed without requiring cutting or drilling to form an opening in the overmold body over the surface mount structure; and

forming an electromagnetic shield contacting the overmold body and contacting the surface mount structure.

14. The method of claim 13, wherein the overmold body includes an opening over at least a portion of the component which exposes at least a portion of the top surface of the component, and wherein the electromagnetic shield fills the opening and contacts the top surface of the component.

15. The method of claim 14, wherein the component is configured to use the contact with the electromagnetic shield as a heat sink.

16. The method of claim 14, wherein the component is configured to use the contact with the electromagnetic shield as an electrical conduit.

17. The method of claim 14, wherein the laminate contains a via directly under the component, and wherein the component is configured to use the via as a heat sink.

18. The method of claim 14, wherein the laminate contains a via directly under the component, and wherein the component is configured to use the via as an electrical conduit.