Processing apparatus and processing method

• US 8,414,242 B2
• Filed: 10/15/2009
• Issued: 04/09/2013
• Est. Priority Date: 10/16/2008
• Status: Active Grant

• Current Assignee: Tokyo Electron Limited
• Original Assignee: Tokyo Electron Limited
• Inventors: Hishiya, Katsuyuki
• Primary Examiner(s): Rodriguez, Saul
• Assistant Examiner(s): SNELTING, JONATHAN D
• Application Number:
  US12/579,519
• Publication Number:
  US 20100098517A1
• Time in Patent Office: 1,272 Days
• Field of Search: 414/217, 414/411, 414/937, 414/938, 74/20, 74/89
• US Class Current: 414/217
• CPC Class Codes: H01L 21/67772 involving removal of lid, door, cover
• CPC Class Codes: H01L 21/67775 Docking arrangements

Abstract

A processing apparatus including: a carry-in area into which a container containing substrates to be processed is carried, the container having a flange part on an upper part thereof and an opening in a front surface thereof, with a lid being detachably fixed to the opening; a transfer area whose atmosphere is maintained differently from an atmosphere of the carry-in area; a partition wall separating the carry-in area and transfer area; a through-hole formed in the partition wall; a door configured to open and close the through-hole; and a table on which the container can be placed in the carry-in area. After the container has been placed and then held on the table, the container is brought into contact with the through-hole, the door and the lid are opened, and the substrates to be processed in the container are conveyed to the transfer area so as to process the substrates.

Claims

1. A processing apparatus comprising:

a housing including;

a carry-in area into which a container containing a plurality of objects to be processed is carried, the container having a flange part on an upper part thereof and an opening in a front surface thereof, with a lid being detachably fixed to the opening; and

a transfer area whose atmosphere is maintained differently from an atmosphere of the carry-in area;

a partition wall disposed in the housing, the partition wall separating the carry-in area and the transfer area from each other and having a through-hole formed therein;

a door disposed on the partition wall, the door being configured to open and close the through-hole of the partition wall;

a table disposed in the carry-in area, on which the container can be placed; and

a pressing mechanism disposed in the carry-in area, the pressing mechanism being configured to press the flange part of the container, which is in contact with the partition wall around the through-hole, onto the through-hole of the partition wall, and

wherein the pressing mechanism includes;

a pressing arm disposed on a waiting position on one side of the carry-in area through a support shaft, such that the pressing arm can be horizontally turned so as to press a rear part of the flange part;

a drive cylinder joined to the pressing arm and disposed on the waiting position in an up and down direction so as to drive the pressing arm; and

a link extending between an output part of the drive cylinder and a substantially intermediate portion of the pressing arm in a longitudinal direction thereof, the link being configured to convert a force of the output part in the up and down direction to a force in a turning direction of the pressing arm;

wherein, after the container has been placed and then held on the table, the container is brought into contact with the partition wall around the through-hole, the flange part of the container in contact with the partition wall around the through-hole is pressed onto the through-hole by the pressing mechanism, the door and the lid are opened, and the objects to be processed in the container are conveyed from the carry-in area to the transfer area so as to process the objects to be processed.

2. The processing apparatus according to claim 1, wherein

the atmosphere of the carry-in area is an atmospheric air, and the atmosphere of the transfer area is an inert gas or a clean dry air.

3. A processing method performed with the use of a processing apparatus comprising:

a housing including;

a carry-in area into which a container containing a plurality of objects to be processed is carried, the container having a flange part on an upper part thereof and an opening in a front surface thereof, with a lid being detachably fixed to the opening; and

a transfer area whose atmosphere is maintained differently from an atmosphere of the carry-in area;

a partition wall disposed in the housing, the partition wall separating the carry-in area and the transfer area from each other and having a through-hole formed therein;

a door disposed on the partition wall, the door being configured to open and close the through-hole of the partition wall;

a table disposed in the carry-in area, on which the container can be placed; and

a pressing mechanism disposed in the carry-in area, the pressing mechanism being configured to press the flange part of the container, which is in contact with the partition wall around the through-hole, onto the through-hole of the partition wall;

the processing method comprising;

placing the container on the table and then holding the container;

bringing the container into contact with the partition wall around the through-hole; and

opening the door and the lid and transferring the objects to be processed in the container from the carry-in area to the transfer area so as to process the objects to be processed;

wherein, after the flange part of the container, which is in contact with the partition wall around the through-hole, has been pressed onto the through-hole by the pressing mechanism, the door and the lid are opened, and

wherein the pressing mechanism includes;

a pressing arm disposed on a waiting position on one side of the carry-in area through a support shaft, such that the pressing arm can be horizontally turned so as to press a rear part of the flange part;

a drive cylinder joined to the pressing arm and disposed on the waiting position in an up and down direction so as to drive the pressing arm; and

a link extending between an output part of the drive cylinder and a substantially intermediate portion of the pressing arm in a longitudinal direction thereof, the link being configured to convert a force of the output part in the up and down direction to a force in a turning direction of the pressing arm.

4. The processing method according to claim 3, wherein the atmosphere of the carry-in area is an atmospheric air, and the atmosphere of the transfer area is an inert gas or a dean dry air.