Method and apparatus for achieving multiple patterning technology compliant design layout

• US 8,418,111 B2
• Filed: 11/24/2010
• Issued: 04/09/2013
• Est. Priority Date: 11/24/2010
• Status: Active Grant

• Current Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Original Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Inventors: Chen, Huang-Yu, Hou, Yuan-Te, Lu, Lee-Chung, Liu, Ru-Gun, Hsieh, Ken-Hsien, Huang, Wen-Chun, Tien, Li-Chun, Fan, Fang-Yu, Song, Lee Fung
• Primary Examiner(s): DO, THUAN V
• Application Number:
  US12/953,661
• Publication Number:
  US 20120131528A1
• Time in Patent Office: 867 Days
• Field of Search: 716/119, 716/126, 716/139
• US Class Current: 716/126
• CPC Class Codes: G03F 7/70433 Layout for increasing efficiency or for compensating imaging errors, e.g. layout of exposure fields for reducing focus errors; Use of mask features for increasing efficiency or for compensating imaging errors
• CPC Class Codes: G03F 7/70466 Multiple exposures, e.g. combination of fine and coarse exposures, double patterning or multiple exposures for printing a single feature stitching G03F7/70475
• CPC Class Codes: G06F 30/394 Routing G06F30/396 takes precedence

Abstract

A method and apparatus for achieving multiple patterning compliant technology design layouts is provided. An exemplary method includes providing a routing grid having routing tracks; designating each of the routing tracks one of at least two colors; applying a pattern layout having a plurality of features to the routing grid, wherein each of the plurality of features corresponds with at least one routing track; and applying a feature splitting constraint to determine whether the pattern layout is a multiple patterning compliant layout. If the pattern layout is not a multiple patterning compliant layout, the pattern layout may be modified until a multiple patterning compliant layout is achieved. If the pattern layout is a multiple patterning compliant layout, the method includes coloring each of the plurality of features based on the color of each feature'"'"'s corresponding at least one routing track, thereby forming a colored pattern layout, and generating at least two masks with the features of the colored pattern layout. Each mask includes features of a single color.

Claims

1. A method comprising:

providing a routing grid having routing tracks;

designating each of the routing tracks one of at least two colors;

applying a pattern layout having a plurality of features to the routing grid, wherein each of the plurality of features corresponds with at least one routing track;

applying, by a computer, a feature splitting constraint to determine whether the pattern layout is a multiple patterning compliant layout, wherein the applying the feature splitting constraint to determine whether the pattern layout is the multiple patterning compliant layout includes determining whether any of the plurality of features begin and end on routing tracks of different colors and designating the pattern layout as not a multiple patterning compliant layout when any of the plurality of features begin and end on routing tracks of different colors;

if the pattern layout is not a multiple patterning compliant layout, modifying the pattern layout until a multiple patterning compliant layout is achieved; and

if the pattern layout is a multiple patterning compliant layout, coloring each of the plurality of features based on the color of each feature'"'"'s corresponding at least one routing track, thereby forming a colored pattern layout, and generating at least two masks with the features of the colored pattern layout, wherein each mask includes features of a single color.

2. The method of claim 1 wherein the designating each of the routing tracks one of at least two colors includes designating routing tracks extending in a preferred direction one of the at least two colors.

3. The method of claim 2 wherein the applying the feature splitting constraint to determine whether the pattern layout is a multiple patterning compliant layout includes determining whether the plurality of features comply with a no splitting constraint.

4. The method of claim 3 wherein:

each of the plurality of features includes at least one feature portion oriented in the preferred direction, feature portion oriented in a non-preferred direction that is perpendicular to the preferred direction, or both; and

the determining whether the plurality of features comply with the no splitting constraint includes;

identifying any feature that includes a feature portion oriented in the non-preferred direction,

determining whether any of the identified features begin and end on routing tracks of different colors, and

if any of the identified features begin and end on routing tracks of different colors, designating the pattern layout as not a multiple patterning compliant layout.

5. The method of claim 4 further including modifying the pattern layout after designating the pattern layout as not a multiple patterning compliant layout, wherein the modifying includes redesigning the pattern layout.

6. The method of claim 2 wherein:

each of the plurality of features includes at least one feature portion oriented in the preferred direction, feature portion oriented in a non-preferred direction that is perpendicular to the preferred direction, or both; and

the applying the feature splitting constraint to determine whether the pattern layout is a multiple patterning compliant layout includes;

applying no feature splitting in the preferred direction, and

applying feature splitting in the non-preferred direction.

7. The method of claim 6 wherein the applying no feature splitting in the preferred direction includes:

determining whether spacing between features in the preferred direction is equal to or greater than a threshold value; and

designating the pattern layout as not a multiple patterning compliant layout if the spacing between features in the preferred direction is less than the threshold value.

8. The method of claim 6 wherein the applying feature splitting in the non-preferred direction includes determining whether any features need splitting.

9. The method of claim 8 wherein:

the preferred routing tracks are designated a first color and a second color, such that every other preferred routing track is either the first color or the second color; and

the determining whether any features need splitting includes identifying any features that do not occupy an odd number of routing tracks.

10. The method of claim 9 further including performing a stitch insertion to any feature that does not occupy an odd number of routing tracks.

11. A method comprising:

providing a routing grid having routing tracks oriented in a preferred direction, wherein each of the routing tracks is designated one of at least two colors;

applying, by a computer, a pattern layout having a plurality of features to the routing grid, wherein each of the plurality of features corresponds with at least one routing track;

determining whether the pattern layout complies with a first feature splitting constraint applied in the preferred direction and a second feature splitting constraint applied in a non-preferred direction that is perpendicular to the preferred direction, wherein the determining whether the pattern layout complies with a second feature splitting constraint applied in a non-preferred direction that is perpendicular to the preferred direction includes determining whether any features having a feature portion oriented in the non-preferred direction begin and end on routing tracks of different colors and designating the pattern layout as not complying with the second feature splitting constraint if any features having a feature portion oriented in the non-preferred direction begin and end on routing tracks of different colors; and

if the pattern layout complies with the first and second feature splitting constraints, coloring each of the plurality of features based on the color of each feature'"'"'s corresponding at least one routing track, thereby creating a colored pattern layout, and generating at least two masks with the features of the colored pattern layout, wherein each mask includes features of a single color.

12. The method of claim 11 wherein:

each of the plurality of features includes at least one feature portion oriented in the preferred direction, feature portion oriented in the non-preferred direction, or both; and

the determining whether the pattern layout complies with the first feature splitting constraint applied in the preferred direction includes;

checking whether spacing in the preferred direction between any features is less than a threshold value, and

designating the pattern layout as not complying with the first feature splitting constraint if the spacing in the preferred direction between any features is less than the threshold value.

13. The method of claim 12 further including modifying the pattern layout until its pattern layout complies with the first feature splitting constraint if the spacing in the preferred direction between any features is less than the threshold value.

14. The method of claim 11 wherein

each of the plurality of features includes at least one feature portion oriented in the preferred direction, feature portion oriented in the non-preferred direction, or both.

15. The method of claim 14 further including modifying the pattern layout until it complies with the second feature splitting constraint if any features having a feature portion oriented in the non-preferred direction begin and end on routing tracks of different colors.

16. The method of claim 15 wherein the modifying the pattern layout includes performing a stitch insertion to any features having a feature portion oriented in the non-preferred direction that begin and end on routing tracks of different colors.

17. The method of claim 16 wherein the performing the stitch insertion to any feature having a feature portion oriented in the non-preferred direction that begins and ends on routing tracks of different colors includes:

determining whether the feature portion oriented in the non-preferred direction corresponds with a number of routing tracks less than or equal to a routing track manufacturing threshold;

if the number of routing tracks the feature portion oriented in the non-preferred direction corresponds with is less than or equal to the routing track manufacturing threshold, determining whether the feature portion oriented in the non-preferred direction is a line or a line-end; and

determining a maximum stitch overlap length (MSOL) based on whether the feature portion oriented in the non-preferred direction is a line or line-end.

18. The method of claim 17 wherein the determining whether the feature portion oriented in the non-preferred direction is a line or line-end includes determining whether a width of the feature portion is greater than or equal to a line-end width threshold, wherein the feature portion oriented in the non-preferred direction is a line if it is greater than or equal to the line-end width threshold, and the feature portion oriented in the non-preferred direction is a line-end if it is less than the line-end width threshold.

19. The method of claim 18 wherein the determining the MSOL based on whether the feature portion oriented in the non-preferred direction is a line or line-end includes:

if the feature portion oriented in the non-preferred direction is a line-end, setting the maximum stitch overlap length to be;

MSOL=3P−

W/2−

W/2−

2L

where P is a minimum pitch between routing tracks, W is a minimum line width, and L is a minimum spacing between a line and a line end, and

if the feature portion oriented in the non-preferred direction is a line, setting the maximum overlap length to be;

MSOL=3P−

W/2−

W/2−

2R

where R is a minimum spacing between lines (minimum run-run spacing).

20. The method of claim 18 wherein if the feature portion oriented in the non-preferred direction is a line-end:

reserving at least one feature-free region adjacent to each end of the feature portion oriented in the non-preferred direction; and

the determining the MSOL includes setting the maximum stitch overlap length to be;

MSOL=P+W/2+W/2

where P is a minimum pitch between routing tracks and W is a minimum line width.

21. The method of claim 18 wherein, if the feature portion oriented in the non-preferred direction is a line-end and is a part of a feature that includes a feature portion oriented in the preferred direction, such that the feature portion oriented in the non-preferred direction extends past the feature portion oriented in the preferred direction:

reserving at least one feature-free region adjacent to each end of the feature portion oriented in the non-preferred direction portion; and

the determining the MSOL includes setting the maximum stitch overlap length to be;

MSOL=5P−

W/2−

W/2−

2L

where P is a minimum pitch between routing tracks, W is a minimum line width, and L is a minimum spacing between a line and a line end.

22. The method of claim 18 wherein, if the feature portion oriented in the non-preferred direction is a line and is a part of a feature that includes a feature portion oriented in the preferred direction, such that the feature portion oriented in the non-preferred direction extends past the feature portion oriented in the preferred direction:

reserving at least one feature-free region adjacent to each end of the feature portion oriented in the non-preferred direction portion; and

the determining the MSOL includes setting the maximum stitch overlap length to be;

MSOL=5P−

W/2−

W/2−

2R

where P is a minimum pitch between routing tracks, W is a minimum line width, and L is a minimum spacing between lines (minimum run-run spacing).

23. The method of claim 15 wherein the modifying the pattern layout includes redesigning the pattern layout.

24. The method of claim 11 wherein the providing the routing grid having routing tracks oriented in a preferred direction, wherein each of the routing tracks is designated one of at least two colors includes designating routing tracks extending in the preferred direction one of a first color and a second color, such that every other routing track is one of the first color and the second color.

25. The method of claim 24 wherein:

each of the plurality of features includes at least one feature portion oriented in the preferred direction, feature portion oriented in the non-preferred direction, or both; and

the determining whether the pattern layout complies with the second feature splitting constraint applied in the non-preferred direction includes;

determining if any features having a feature portion oriented in the non-preferred direction occupy an even number of routing tracks, and

performing a stitch insertion to any features having a feature portion oriented in the non-preferred direction that occupy an even number of routing tracks.

26. The method of claim 11 further including reserving at least one feature-free region adjacent to any feature that does not correspond with at least one routing track.

27. The method of claim 11:

wherein each of the plurality of features includes at least one feature portion oriented in the preferred direction, feature portion oriented in the non-preferred direction, or both; and

further including reserving at least one feature-free region adjacent to any feature portion that is a non-minimum width.

28. An apparatus comprising:

a computer readable medium that stores a plurality of instructions for execution by at least one computer processor, wherein the instructions are for;

providing a routing grid having routing tracks;

designating each of the routing tracks one of at least two colors;

applying a pattern layout having a plurality of features to the routing grid, wherein each of the plurality of features corresponds with at least one routing track;

applying a feature splitting constraint to determine whether the pattern layout is a multiple patterning compliant layout, wherein the applying the feature splitting constraint to determine whether the pattern layout is the multiple patterning compliant layout includes determining whether any of the plurality of features begin and end on routing tracks of different colors and designating the pattern layout as not a multiple patterning compliant layout when any of the plurality of features begin and end on routing tracks of different colors;

if the pattern layout is not a multiple patterning compliant layout, modifying the pattern layout until a multiple patterning compliant layout is achieved; and

if the pattern layout is a multiple patterning compliant layout, coloring each of the plurality of features based on the color of each feature'"'"'s corresponding at least one routing track, thereby forming a colored pattern layout, and generating at least two masks with the features of the colored pattern layout, wherein each mask includes features of a single color.