Electron beam vapor deposition apparatus and method of coating
First Claim
1. An electron beam vapor deposition apparatus comprising:
- a coating chamber for depositing a coating on a work piece;
a coating device including at least one crucible for presenting at least one source coating material, the coating device having a physical vapor deposition mode of depositing the at least one source coating material and a directed vapor deposition mode of depositing the at least one source coating material;
wherein the at least one crucible includes a funnel-less physical vapor deposition crucible and a directed vapor deposition nozzle having a funnel for jetting a gas stream therefrom;
at least one electron beam source for evaporating the at least one source coating material; and
a controller configured to move a transport holding the work piece at a first speed in response to the physical vapor deposition mode and at a second, different speed in response to the directed vapor deposition mode.
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Accused Products
Abstract
An electron beam vapor deposition apparatus includes a coating chamber including a coating zone for depositing a coating on a work piece. A coating device includes at least one crucible for presenting at least one source coating material. The coating device includes a first deposition mode of depositing the at least one source coating material and a second deposition mode of depositing the at least one source coating material. At least one electron beam source evaporates the at least one source coating material for deposit onto the work piece. A controller is configured to control a speed of movement of the work piece in the coating zone during the coating operation in response to the first deposition mode and the second deposition mode.
21 Citations
13 Claims
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1. An electron beam vapor deposition apparatus comprising:
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a coating chamber for depositing a coating on a work piece; a coating device including at least one crucible for presenting at least one source coating material, the coating device having a physical vapor deposition mode of depositing the at least one source coating material and a directed vapor deposition mode of depositing the at least one source coating material;
wherein the at least one crucible includes a funnel-less physical vapor deposition crucible and a directed vapor deposition nozzle having a funnel for jetting a gas stream therefrom;at least one electron beam source for evaporating the at least one source coating material; and a controller configured to move a transport holding the work piece at a first speed in response to the physical vapor deposition mode and at a second, different speed in response to the directed vapor deposition mode. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. An electron beam vapor deposition apparatus comprising:
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a coating chamber for depositing a coating on a work piece; a coating device including at least one crucible for presenting at least one source coating material, the coating device having a physical vapor deposition (PVD) mode of depositing the at least one source coating material and a directed vapor deposition (DVD) mode of depositing the at least one source coating material;
wherein the coating device includes a funnel-less physical vapor deposition crucible and a directed vapor deposition nozzle having a funnel for jetting a gas stream therefrom;at least one electron beam source for evaporating the at least one source coating material; a transport configured to hold and move a work piece in the coating zone; and a controller configured to control a speed of movement of the work piece in the coating zone during a coating operation such that the work piece moves at a first speed in response to the PVD mode and a second, different speed in response to the DVD mode. - View Dependent Claims (11, 12, 13)
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Specification