Semiconductor device and method for manufacturing the same

• US 8,445,905 B2
• Filed: 08/06/2012
• Issued: 05/21/2013
• Est. Priority Date: 07/17/2009
• Status: Active Grant

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Sakata, Junichiro, Miyake, Hiroyuki, Kuwabara, Hideaki, Kawamata, Ikuko, Yamazaki, Shunpei
• Primary Examiner(s): Dang, Trung Q
• Application Number:
  US13/567,451
• Publication Number:
  US 20120298990A1
• Time in Patent Office: 288 Days
• Field of Search: 257/43, 257/59, 257/E29.296
• US Class Current: 257/43
• CPC Class Codes: G02F 1/13454 Drivers integrated on the active matrix substrate G02F1/136277 takes precedence
• CPC Class Codes: G02F 2201/40 Arrangements for improving the aperture ratio
• CPC Class Codes: G02F 2202/10 semiconductor
• CPC Class Codes: H01L 27/1225 with semiconductor materials not belonging to the group IV of the periodic table, e.g. InGaZnO
• CPC Class Codes: H01L 27/1233 with different thicknesses of the active layer in different devices
• CPC Class Codes: H01L 27/1251 comprising TFTs having a different architecture, e.g. top- and bottom gate TFTs

Abstract

An object is to increase an aperture ratio of a semiconductor device. The semiconductor device includes a driver circuit portion and a display portion (also referred to as a pixel portion) over one substrate. The driver circuit portion includes a channel-etched thin film transistor for a driver circuit, in which a source electrode and a drain electrode are formed using metal and a channel layer is formed of an oxide semiconductor, and a driver circuit wiring formed using metal. The display portion includes a channel protection thin film transistor for a pixel, in which a source electrode layer and a drain electrode layer are formed using an oxide conductor and a semiconductor layer is formed of an oxide semiconductor, and a display portion wiring formed using an oxide conductor.

Claims

1. A semiconductor device comprising:

a pixel portion over a substrate, the pixel portion comprising a first transistor; and

a driver circuit portion over the substrate, the driver circuit portion comprising a second transistor,

wherein the first transistor comprises;

a first gate electrode layer over the substrate;

a first gate insulating layer over the first gate electrode layer;

a first oxide semiconductor layer including a first channel region over the first gate insulating layer; and

a first source electrode layer and a first drain electrode layer over the first oxide semiconductor layer,

wherein the second transistor comprises;

a second gate electrode layer over the substrate;

a second gate insulating layer over the second gate electrode layer;

a second oxide semiconductor layer including a second channel region over the second gate insulating layer; and

a second source electrode layer and a second drain electrode layer over the second oxide semiconductor layer,

wherein the first channel region includes a first region including excess oxygen,

wherein the second channel region includes a second region including excess oxygen, and

wherein a material of the second source electrode layer and the second drain electrode layer is different from a material of the first source electrode layer and the first drain electrode layer.

2. The semiconductor device according to claim 1, wherein the first transistor is a channel protection transistor.

3. The semiconductor device according to claim 1, wherein at least one of the first transistor and the second transistor has light-transmitting properties.

4. The semiconductor device according to claim 1, wherein a thickness of the second channel region is smaller than a thickness of a region overlapping with the second source electrode layer or the second drain electrode layer.

13. The semiconductor device according to claim 1,

wherein each of the first gate electrode layer, the first gate insulating layer, the first oxide semiconductor layer, the first source electrode layer, and the first drain electrode layer has light-transmitting properties.

16. The semiconductor device according to claim 1,

wherein the material of the second source electrode layer and the second drain electrode layer is a conductive material having lower resistance than the material of the first source electrode layer and the first drain electrode layer.

5. A semiconductor device comprising:

a pixel portion over a substrate, the pixel portion comprising a first transistor; and

a driver circuit portion over the substrate, the driver circuit portion comprising a second transistor,

wherein the first transistor comprises;

a first gate electrode layer over the substrate;

a first gate insulating layer over the first gate electrode layer;

a first semiconductor layer including a first channel region over the first gate insulating layer; and

a first source electrode layer and a first drain electrode layer over the first semiconductor layer,

wherein the second transistor comprises;

a second gate electrode layer over the substrate;

a second gate insulating layer over the second gate electrode layer;

a second semiconductor layer including a second channel region over the second gate insulating layer; and

a second source electrode layer and a second drain electrode layer over the second semiconductor layer,

wherein the first channel region includes a first region including excess oxygen,

wherein the second channel region includes a second region including excess oxygen, and

wherein a material of the second source electrode layer and the second drain electrode layer is different from a material of the first source electrode layer and the first drain electrode layer.

6. The semiconductor device according to claim 5, wherein the first transistor is a channel protection transistor.

7. The semiconductor device according to claim 5, wherein at least one of the first transistor and the second transistor has light-transmitting properties.

8. The semiconductor device according to claim 5, wherein a thickness of the second channel region is smaller than a thickness of a region overlapping with the second source electrode layer or the second drain electrode layer.

14. The semiconductor device according to claim 5,

wherein each of the first gate electrode layer, the first gate insulating layer, the first semiconductor layer, the first source electrode layer, and the first drain electrode layer has light-transmitting properties.

17. The semiconductor device according to claim 5,

wherein the material of the second source electrode layer and the second drain electrode layer is a conductive material having lower resistance than the material of the first source electrode layer and the first drain electrode layer.

9. A semiconductor device comprising:

a pixel portion over a substrate, the pixel portion comprising a first transistor; and

a driver circuit portion over the substrate, the driver circuit portion comprising a second transistor,

wherein the first transistor comprises;

a first gate electrode layer over the substrate;

a first gate insulating layer over the first gate electrode layer;

a first oxide semiconductor layer including a first channel region over the first gate insulating layer; and

a first source electrode layer and a first drain electrode layer over the first oxide semiconductor layer,

wherein the second transistor comprises;

a second gate electrode layer over the substrate;

a second gate insulating layer over the second gate electrode layer;

a second oxide semiconductor layer including a second channel region over the second gate insulating layer; and

a second source electrode layer and a second drain electrode layer over the second oxide semiconductor layer,

wherein the first channel region includes a first region including excess oxygen,

wherein the second channel region includes a second region including excess oxygen,

wherein the first region is in contact with a first oxide insulating layer,

wherein the second region is in contact with a second oxide insulating layer, and

wherein a material of the second source electrode layer and the second drain electrode layer is different from a material of the first source electrode layer and the first drain electrode layer.

10. The semiconductor device according to claim 9, wherein the first transistor is a channel protection transistor.

11. The semiconductor device according to claim 9, wherein at least one of the first transistor and the second transistor has light-transmitting properties.

12. The semiconductor device according to claim 9, wherein a thickness of the second channel region is smaller than a thickness of a region overlapping with the second source electrode layer or the second drain electrode layer.

15. The semiconductor device according to claim 9,

wherein each of the first gate electrode layer, the first gate insulating layer, the first oxide semiconductor layer, the first source electrode layer, the first drain electrode layer, and the first oxide insulating layer has light-transmitting properties.

18. The semiconductor device according to claim 9,

wherein the material of the second source electrode layer and the second drain electrode layer is a conductive material having lower resistance than the material of the first source electrode layer and the first drain electrode layer.