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Fast scanning of a target region

  • US 8,471,228 B2
  • Filed: 09/12/2009
  • Issued: 06/25/2013
  • Est. Priority Date: 09/26/2008
  • Status: Active Grant
First Claim
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1. Method for irradiating a target (102) with a beam (105) approaching target points, involving the following steps:

  • Measuring at least one of the parameters relating to the position of the beam and the intensity of the beam, changing the beam as a function of the at least one measured parameter, particularly as a function of a variance relating to the at least one measured parameter, characterized in that the at least one measured parameter is measured at the most once per target point;

    wherein the approach of the successive target points is determined by the elapsed time or by the extraction profile.

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