Laser processing apparatus and laser processing method
First Claim
1. A laser processing apparatus that radiates laser light to a processing target and collectively processes the processing target with a whole processing pattern including two or more basic processing patterns, comprising:
- a laser light source that outputs the laser light;
a phase modulation type spatial light modulator that receives the laser light output from the laser light source, allows each of a plurality of pixels two-dimensionally arranged therein to be presented as a whole hologram for modulating the phase of the laser light, and outputs the phase-modulated laser light;
an imaging optical system that receives the laser light output from the spatial light modulator and focuses the laser light on the processing target;
a storage unit that stores a plurality of basic holograms corresponding to a plurality of basic processing patterns and a focusing hologram corresponding to a Fresnel lens pattern; and
a control unit that arranges in parallel two or more basic holograms selected from the plurality of basic holograms stored in the storage unit, overlaps the focusing hologram with each of the basic holograms arranged in parallel to form the whole hologram, and presents the formed whole hologram to the spatial light modulator.
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Accused Products
Abstract
A laser processing apparatus 1 includes a laser light source 10, a phase modulation type spatial light modulator 20, a driving unit 21, a control unit 22, and an imaging optical system 30. The imaging optical system 30 may be a telecentric optical system. A storage unit 21A included in the driving unit stores a plurality of basic holograms corresponding to a plurality of basic processing patterns and a focusing hologram corresponding to a Fresnel lens pattern. The control unit 22 arranges in parallel two or more basic holograms selected from the plurality of basic holograms stored in the storage unit 21A, overlaps the focusing hologram with each of the basic holograms arranged in parallel to form the whole hologram, and presents the formed whole hologram to the spatial light modulator 20.
6 Citations
12 Claims
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1. A laser processing apparatus that radiates laser light to a processing target and collectively processes the processing target with a whole processing pattern including two or more basic processing patterns, comprising:
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a laser light source that outputs the laser light; a phase modulation type spatial light modulator that receives the laser light output from the laser light source, allows each of a plurality of pixels two-dimensionally arranged therein to be presented as a whole hologram for modulating the phase of the laser light, and outputs the phase-modulated laser light; an imaging optical system that receives the laser light output from the spatial light modulator and focuses the laser light on the processing target; a storage unit that stores a plurality of basic holograms corresponding to a plurality of basic processing patterns and a focusing hologram corresponding to a Fresnel lens pattern; and a control unit that arranges in parallel two or more basic holograms selected from the plurality of basic holograms stored in the storage unit, overlaps the focusing hologram with each of the basic holograms arranged in parallel to form the whole hologram, and presents the formed whole hologram to the spatial light modulator. - View Dependent Claims (2, 3, 4, 5)
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6. A laser processing method that radiates laser light to a processing target and collectively processes the processing target with a whole processing pattern including two or more basic processing patterns, using a laser light source that outputs the laser light, a phase modulation type spatial light modulator that receives the laser light output from the laser light source, allows each of a plurality of pixels two-dimensionally arranged therein to be presented as a whole hologram for modulating the phase of the laser light, and outputs the phase-modulated laser light, an imaging optical system that receives the laser light output from the spatial light modulator and focuses the laser light on the processing target, and a storage unit that stores a plurality of basic holograms corresponding to a plurality of basic processing patterns and a focusing hologram corresponding to a Fresnel lens pattern, the method comprising:
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arranging in parallel two or more basic holograms selected from the plurality of basic holograms stored in the storage unit; overlapping the focusing hologram with each of the basic holograms arranged in parallel to form the whole hologram;
presenting the formed whole hologram to the spatial light modulator;allowing the laser light output from the laser light source to be incident on the spatial light modulator; and allowing the imaging optical system to focus the laser light output from the spatial light modulator on the processing target. - View Dependent Claims (7, 8, 9, 10)
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11. A laser emitting apparatus that radiates laser light to a processing target and collectively processes the processing target with a whole processing pattern including two or more basic processing patterns, comprising:
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a laser light source that outputs the laser light; a phase modulation type spatial light modulator that receives the laser light output from the laser light source, allows each of a plurality of pixels two-dimensionally arranged therein to be presented as a whole hologram for modulating the phase of the laser light, and outputs the phase-modulated laser light; an imaging optical system that receives the laser light output from the spatial light modulator and focuses the laser light on the processing target; a storage unit that stores a plurality of basic holograms corresponding to a plurality of basic processing patterns and a focusing hologram corresponding to a Fresnel lens pattern; and a control unit that arranges in parallel two or more basic holograms selected from the plurality of basic holograms stored in the storage unit, overlaps the focusing hologram with each of the basic holograms arranged in parallel to form the whole hologram, and presents the formed whole hologram to the spatial light modulator. - View Dependent Claims (12)
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Specification