Mass flow controller with enhanced operating range

• US 8,499,786 B2
• Filed: 04/09/2010
• Issued: 08/06/2013
• Est. Priority Date: 04/09/2010
• Status: Active Grant

• Current Assignee: Hitachi Metals (Thailand) Ltd.
• Original Assignee: Hitachi Metals (Thailand) Ltd.
• Inventors: Zolock, Michael J., Smirnov, Alexei V.
• Primary Examiner(s): Schneider, Craig
• Assistant Examiner(s): PAQUETTE, IAN G
• Application Number:
  US12/757,574
• Publication Number:
  US 20110247696A1
• Time in Patent Office: 1,215 Days
• Field of Search: 137/486, 137/487, 137/487.5, 732/025, 732/042.7, 702/45, 702/47
• US Class Current: 137/487
• CPC Class Codes: G05D 7/0635 by action on throttling means G05D7/0688, G05D7/0694 take precedence
• CPC Class Codes: Y10T 137/0324 With control of flow by a condition or characteristic of a fluid
• CPC Class Codes: Y10T 137/7759 Responsive to change in rate of fluid flow
• CPC Class Codes: Y10T 137/776 Control by pressures across flow line valve
• CPC Class Codes: Y10T 137/7761 Electrically actuated valve

Abstract

A mass flow controller among other embodiments and method is described. The mass flow controller including a thermal mass flow sensor including at least two sensing elements coupled to a sensor tube of the mass flow controller, the thermal mass flow sensor being designed to provide a first signal indicative of flow of a gas within a first flow-rate-range and a second signal indicative of flow of the gas within a second flow-rate-range; and a control portion figured to control a valve position of the mass flow controller responsive to the first signal when the flow of the gas is within the first flow-rate-range and control the valve position of the mass flow controller responsive to the second signal when the flow of the gas is within a second flow-rate-range.

Claims

1. A mass flow controller comprising:

a sensor tube through which a portion of a gas flows when the gas is flowing through the mass flow controller;

first and second heating-sensing elements coupled to the sensor tube at first and second locations of the sensor tube, respectively; and

a single bridge circuit having first, second, third, and fourth nodes, a first predetermined resistive component being connected between the first and second nodes, a second predetermined resistive component being connected between the second and third nodes, the first heating-sensing element being connected between the first and fourth nodes, the second heating-sensing element being connected between the fourth and third nodes, the single bridge circuit configured to provide a first signal from the second and fourth nodes and to provide a second signal from the first and third nodes; and

a control portion to process the first signal to generate a first flow-rate signal that is indicative of a flow rate of the gas, to obtain a measure of temperature-dependent drift in the second signal by measuring the second signal when the gas is not flowing through the sensor tube, and to process the second signal to subtract a contribution of the temperature-dependent drift from the second signal to generate a second flow-rate signal that is indicative of the flow rate of the gas, the first and second flow-rate signals collectively provide an indication of the flow rate over a larger flow-rate-range than either of the first and second flow-rate signals alone to control a valve position of the mass flow controller over the larger flow-rate-range.

2. The mass flow controller of claim 1, including processing components between the bridge circuit and the control portion, the processing components selected from the group consisting of an amplifier and an analog to digital converter.

3. The mass flow controller of claim 1, wherein the control portion is configured to control the flow of the gas responsive to both first and second signals when the first and second ranges overlap.

4. The mass flow controller of claim 1, wherein the first and second heating-sensing elements are heating-sensing elements selected from the group consisting of:

resistance-thermometer elements and resistance temperature detectors.

5. The mass flow controller of claim 1, including a current source configured to provide a current to the first node of the bridge circuit, and wherein the first and second signals are voltage signals.

6. The mass flow control of claim 1, including a voltage source configured to apply a voltage at the first node, and wherein the first and second signals are current signals.

7. The mass flow controller of claim 1, wherein the control portion includes a component selected from the group consisting of an FPGA and a processor in connection with memory.

8. A mass flow controller comprising:

a thermal mass flow sensor including a single bridge circuit including a first, second, third, and fourth nodes, at least two heating-sensing elements coupled to a sensor tube of the mass flow controller, the thermal mass flow sensor being designed to provide a first signal indicative of a differential voltage between the second and fourth nodes and a second signal indicative of a top voltage at the first node;

a differential voltage processing component to process the first signal to provide a digital representation of the differential voltage;

a top voltage processing component to process the second signal to provide a digital representation of the top voltage; and

a control portion to subtract contributions of temperature-dependent drift from the digital representation of the top voltage so the digital representation of the top voltage is indicative of the flow rate of the gas and to control a valve position of the mass flow controller using the digital representation of the differential voltage and the digital representation of the top voltage.

9. The mass flow controller of claim 8, including separate processing components to process the first and second signals.

10. The mass flow controller of claim 8, wherein the control portion is configured to control the flow of the gas responsive to both the first and the second signals when the first and second ranges overlap.

11. The mass flow controller of claim 8, wherein the thermal mass flow sensor includes a current source, and wherein the first and second signals are voltage signals.

12. The mass flow controller of claim 8, wherein the thermal mass flow sensor includes a voltage source, and wherein the first and second signals are current signals.

13. A method for operating a mass flow controller, comprising:

receiving a first input from a second and fourth nodes of a bridge circuit;

receiving a second input from a first and third nodes of the bridge circuit, the bridge circuit including a first predetermined resistive component being connected between the first and second nodes and a second predetermined resistive component being connected between the second and third nodes, a first heating-sensing element being connected between a first and fourth nodes of the bridge circuit, and a second heating-sensing element being connected between the fourth and third nodes of the bridge circuit, the first and second heating-sensing elements coupled to a sensor tube at first and second respective locations of the sensor tube through which a portion of a gas flows when the gas is flowing through the mass flow controller;

processing the first input to generate a first flow-rate signal indicative of a flow rate of the gas within a first flow-rate-range;

measuring the second input when there is substantially no flow of the gas through the sensor tube to obtain a measure of temperature-dependent drift in the second input;

processing the second input to subtract a contribution of the temperature-dependent drift from the second input to generate a second flow-rate signal indicative of a flow rate of the gas within a second flow-rate-range;

controlling a valve position of the mass flow controller responsive to the first and second flow-rate signals to control the valve position over a larger flow-rate-range than either of the first or second flow-rate-ranges.

14. The method of claim 13, including:

amplifying the first and second inputs to create amplified inputs;

converting the amplified inputs to digital representations;

controlling the valve position based upon the digital representations of the first and second inputs.