Capacitive acceleration sensor

• US 8,505,381 B2
• Filed: 04/12/2010
• Issued: 08/13/2013
• Est. Priority Date: 07/16/2009
• Status: Expired due to Fees

• Current Assignee: Mitsubishi Electric Corporation
• Original Assignee: Mitsubishi Electric Corporation
• Inventors: Yamaguchi, Yasuo, Horikawa, Makio
• Primary Examiner(s): KWOK, HELEN C
• Application Number:
  US12/758,342
• Publication Number:
  US 20110011182A1
• Time in Patent Office: 1,219 Days
• Field of Search: 735/143.2, 735/143.6, 735/143.8, 735/142.9, 734/93, 734/31
• US Class Current: 73/514.32
• CPC Class Codes: G01P 1/023 for acceleration measuring devices
• CPC Class Codes: G01P 2015/0814 for translational movement of the mass, e.g. shuttle type

Abstract

A capacitive acceleration sensor includes an acceleration sensor moving part and an acceleration sensor stationary part together forming a capacitor for detecting acceleration, a sealing structure hermetically enclosing but not contacting the acceleration sensor moving part, and at least one support pillar enclosed by but not directly contacted by the acceleration sensor moving part, both ends of the at least one support pillar being in contact with inside walls of the sealing structure. The acceleration sensor moving part is electrically connected to the at least one support pillar.

Claims

1. A capacitive acceleration sensor comprising:

an acceleration sensor moving part coupled to an anchor which is external to the acceleration sensor moving part;

an acceleration sensor stationary part which, together with the acceleration sensor moving part, forms a capacitor for detecting acceleration;

a sealing structure hermetically enclosing but not contacting said acceleration sensor moving part; and

at least one support pillar enclosed by but not directly contacted by said acceleration sensor moving part, both ends of said at least one support pillar being in contact with inside walls of said sealing structure;

wherein said acceleration sensor moving part is electrically connected to said at least one support pillar when an acceleration is applied to the acceleration sensor and when no acceleration is applied to the acceleration sensor.

2. The capacitive acceleration sensor according to claim 1, wherein said at least one support pillar is disposed at two locations so as to divide a length of said acceleration sensor moving part in a longitudinal direction into three equal portions.

3. The capacitive acceleration sensor according to claim 1, wherein said sealing structure is silicon.