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Wireless sensor device

  • US 8,508,360 B2
  • Filed: 07/26/2012
  • Issued: 08/13/2013
  • Est. Priority Date: 09/28/2006
  • Status: Expired due to Fees
First Claim
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1. A wireless sensor device comprising:

  • a semiconductor substrate;

    a circuit comprising a plurality of semiconductor elements, wherein the plurality of semiconductor elements are formed using the semiconductor substrate;

    a first insulating film covering the plurality of semiconductor elements;

    a thin-film secondary battery over the first insulating film;

    a second insulating film covering the thin-film secondary battery;

    a sensor electrically connected to the circuit through the first insulating film and the second insulating film;

    an antenna; and

    a package packing the semiconductor substrate, the circuit, the thin-film secondary battery, the sensor and the antenna.

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