Wireless sensor device
First Claim
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1. A wireless sensor device comprising:
- a semiconductor substrate;
a circuit comprising a plurality of semiconductor elements, wherein the plurality of semiconductor elements are formed using the semiconductor substrate;
a first insulating film covering the plurality of semiconductor elements;
a thin-film secondary battery over the first insulating film;
a second insulating film covering the thin-film secondary battery;
a sensor electrically connected to the circuit through the first insulating film and the second insulating film;
an antenna; and
a package packing the semiconductor substrate, the circuit, the thin-film secondary battery, the sensor and the antenna.
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Abstract
A wireless sensor device capable of constant operation without replacement of batteries. The wireless sensor device is equipped with a rechargeable battery and the battery is recharged wirelessly. Radio waves received at an antenna circuit are converted into electrical energy and stored in the battery. A sensor circuit operates with the electrical energy stored in the battery, and acquires information. Then, a signal containing the information acquired is converted into radio waves at the antenna circuit, whereby the information can be read out wirelessly.
44 Citations
21 Claims
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1. A wireless sensor device comprising:
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a semiconductor substrate; a circuit comprising a plurality of semiconductor elements, wherein the plurality of semiconductor elements are formed using the semiconductor substrate; a first insulating film covering the plurality of semiconductor elements; a thin-film secondary battery over the first insulating film; a second insulating film covering the thin-film secondary battery; a sensor electrically connected to the circuit through the first insulating film and the second insulating film; an antenna; and a package packing the semiconductor substrate, the circuit, the thin-film secondary battery, the sensor and the antenna. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A wireless sensor device comprising:
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a first substrate; a second substrate; a thin-film secondary battery provided on a first surface of the first substrate; a circuit provided on a first surface of the second substrate, the circuit comprising a plurality of semiconductor elements; an insulating film covering the plurality of semiconductor elements; an antenna over the insulating film; a sensor electrically connected to the thin-film secondary battery and the circuit; and a package packing the first substrate, the second substrate, the thin-film secondary battery, the circuit, the sensor and the antenna, wherein the first surface of the first substrate and the first surface of the second substrate face each other, and wherein the sensor is provided between the first substrate and the second substrate. - View Dependent Claims (9, 10, 11, 12, 13, 14)
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15. A wireless sensor device comprising:
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a first substrate; a second substrate; a thin-film secondary battery provided on a first surface of the first substrate; a circuit provided on a first surface of the second substrate, the circuit comprising a plurality of semiconductor elements; an insulating film covering the plurality of semiconductor elements; an antenna over the insulating film; a sensor attached to a second surface of the first substrate, the sensor electrically connected to the thin-film secondary battery and the circuit through the first substrate; and a package packing the first substrate, the second substrate, the thin-film secondary battery, the circuit, the sensor and the antenna, wherein the first surface of the first substrate and the first surface of the second substrate face each other. - View Dependent Claims (16, 17, 18, 19, 20, 21)
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Specification