Movable body apparatus, movable body drive method, exposure apparatus, exposure method, and device manufacturing method
First Claim
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1. A movable body apparatus, comprising:
- a movable body which is movable within a predetermined plane including a first axis and a second axis that are orthogonal to each other, with a measurement plane placed along a surface substantially parallel to the predetermined plane;
a first measurement system which has an arm member having at least one end section facing the measurement plane from below and whose longitudinal direction is in a direction parallel to the first axis, the first measurement system irradiating at least one first measurement beam on the measurement plane from the arm member, receiving light from the measurement plane of the first measurement beam, and measuring a position of the movable body at least within the predetermined plane; and
a second measurement system which measures a variance information of the aim member; and
a drive system which drives the movable body based on an output of the first measurement system and the second measurement system.
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Abstract
A drive system drives a movable body, based on measurement results of a first measurement system which measures the position of the movable body in an XY plane by irradiating a measurement beam from an arm member on a grating placed on a surface parallel to the XY plane of the movable body and measurement results of a second measurement system which measures a variance of the arm member using a laser interferometer. In this case, the drive system corrects measurement errors caused due to a variance of the arm member included in the measurement results of the first measurement system, using the measurement results of the second measurement system.
26 Citations
33 Claims
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1. A movable body apparatus, comprising:
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a movable body which is movable within a predetermined plane including a first axis and a second axis that are orthogonal to each other, with a measurement plane placed along a surface substantially parallel to the predetermined plane; a first measurement system which has an arm member having at least one end section facing the measurement plane from below and whose longitudinal direction is in a direction parallel to the first axis, the first measurement system irradiating at least one first measurement beam on the measurement plane from the arm member, receiving light from the measurement plane of the first measurement beam, and measuring a position of the movable body at least within the predetermined plane; and a second measurement system which measures a variance information of the aim member; and a drive system which drives the movable body based on an output of the first measurement system and the second measurement system. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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21. A movable body drive method in which a movable body is driven along a predetermined plane, the method comprising:
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a first process in which at least one first measurement beam is irradiated to a measurement plane placed along a surface substantially parallel to the predetermined plane on the movable body, from an arm member having at least one end section facing the measurement plane from below and whose longitudinal direction is in a direction substantially parallel to the predetermined plane, light is received from the measurement plane of the first measurement beam, and a position of the movable body at least within the predetermined plane is measured; a second process in which the movable body is driven, based on measurement results of the position and correction information of measurement errors caused by a variance of the arm member included in the measurement results. - View Dependent Claims (22, 23, 24, 25, 26, 27, 28, 29)
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30. An exposure method in which a pattern is formed on an object by an irradiation of an energy beam, the method comprising:
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a first process in which the object is mounted on a second movable body, which is held relatively movable with respect to a first movable body at least within a plane parallel to a two-dimensional plane including a first axis and a second axis that are orthogonal to each other, by the first movable body movable at least along the two-dimensional plane, and has a measurement plane provided on a surface substantially parallel to the two-dimensional plane; a second process in which at least one first measurement beam is irradiated from an arm member having at least one end section facing the measurement plane from below and whose longitudinal direction is in a direction parallel to the first axis, on the measurement plane, and light from the measurement plane of the first measurement beam is received, and a position of the second movable body at least within the two-dimensional plane is measured; a third process in which a variance information of the arm member is measured; and a fourth process in which the object is scanned with respect to the energy beam, by driving the second movable body in a scanning direction within the two-dimensional plane based on results of the second process and the third process. - View Dependent Claims (31, 32, 33)
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Specification