Methods and systems for forming slots in a semiconductor substrate
First Claim
1. A method of fabricating a fluid feed slot in a print head substrate, comprising:
- making a cut into a first surface of a substrate using a cutting disk, the cutting disk having a generally planar surface oriented generally perpendicular to the first surface; and
,removing material from a second surface of the substrate,wherein said making a cut and said removing material form, in combination, the fluid feed slot in the substrate at least a portion of which passes entirely through the substrate, a full length of the fluid feed slot extending less than a full length of the substrate,wherein said making a cut into the first surface includes providing a first completed portion of the fluid feed slot with curved surfaces at opposite end walls thereof converging from the first surface toward the second surface.
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Abstract
A method of fabricating a fluid feed slot in a print head substrate includes making a cut into a first surface of a substrate using a cutting disk having a generally planar surface oriented generally perpendicular to the first surface, and removing material from a second surface of the substrate. Making the cut and removing the material form, in combination, the fluid feed slot in the substrate at least a portion of which passes entirely through the substrate, with a full length of the fluid feed slot extending less than a full length of the substrate, and making the cut into the first surface includes providing a first completed portion of the fluid feed slot with curved surfaces at opposite end walls thereof converging from the first surface toward the second surface.
51 Citations
13 Claims
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1. A method of fabricating a fluid feed slot in a print head substrate, comprising:
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making a cut into a first surface of a substrate using a cutting disk, the cutting disk having a generally planar surface oriented generally perpendicular to the first surface; and
,removing material from a second surface of the substrate, wherein said making a cut and said removing material form, in combination, the fluid feed slot in the substrate at least a portion of which passes entirely through the substrate, a full length of the fluid feed slot extending less than a full length of the substrate, wherein said making a cut into the first surface includes providing a first completed portion of the fluid feed slot with curved surfaces at opposite end walls thereof converging from the first surface toward the second surface. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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Specification