Multi-layer three-dimensional structures having features smaller than a minimum feature size associated with the formation of individual layers

• US 8,512,861 B2
• Filed: 12/13/2011
• Issued: 08/20/2013
• Est. Priority Date: 09/24/2003
• Status: Active Grant

• Current Assignee: Microfabrica Incorporated (Technoprobe S.P.A.)
• Original Assignee: Microfabrica Incorporated (Technoprobe S.P.A.)
• Inventors: Lockard, Michael S., Cohen, Adam L., Arat, Vacit, Smalley, Dennis R.
• Primary Examiner(s): BASS, DIRK R
• Application Number:
  US13/323,995
• Publication Number:
  US 20120128998A1
• Time in Patent Office: 616 Days
• Field of Search: None
• US Class Current: 428/357
• CPC Class Codes: B33Y 70/00 Materials specially adapted for additive manufacturing
• CPC Class Codes: C25D 1/003 3D structures, e.g. superposed patterned layers
• CPC Class Codes: C25D 1/08 Perforated or foraminous objects, e.g. sieves C25D1/10 takes precedence
• CPC Class Codes: C25D 5/022 using masking means
• CPC Class Codes: C25D 5/10 Electroplating with more than one layer of the same or of different metals for bearings C25D7/10
• CPC Class Codes: C25D 5/623 Porosity of the layers
• CPC Class Codes: Y10T 137/86759 Reciprocating
• CPC Class Codes: Y10T 428/12361 having aperture or cut
• CPC Class Codes: Y10T 428/12479 Porous [e.g., foamed, spongy, cracked, etc.]
• CPC Class Codes: Y10T 428/19 Sheets or webs edge spliced or joined
• CPC Class Codes: Y10T 428/24975 No layer or component greater than 5 mils thick
• CPC Class Codes: Y10T 428/249981 Plural void-containing components
• CPC Class Codes: Y10T 428/29 Coated or structually defined flake, particle, cell, strand, strand portion, rod, filament, macroscopic fiber or mass thereof

Abstract

Embodiments of multi-layer three-dimensional structures and formation methods provide structures with effective feature (e.g. opening) sizes (e.g. virtual gaps) that are smaller than a minimum feature size (MFS) that exists on each layer as a result of the formation method used in forming the structures. In some embodiments, multi-layer structures include a first element (e.g. first patterned layer with a gap) and a second element (e.g. second patterned layer with a gap) positioned adjacent the first element to define a third element (e.g. a net gap or opening resulting from the combined gaps of the first and second elements) where the first and second elements have features that are sized at least as large as the minimum feature size and the third element, at least in part, has dimensions or defines dimensions smaller than the minimum feature size.

Claims

1. A layered three-dimensional structure having a minimum feature size associated with the formation of features on each layer, the layered three-dimensional structure comprising:

a first layer having a frame structure defining an array of first openings, wherein each first opening is at least as large as the minimum feature size; and

a second layer having a frame structure defining an array of second openings, wherein each second opening is at least as large as the minimum feature size, wherein the second layer is positioned adjacent to and adhered to the first layer, wherein at least some openings in the array of second openings are positioned to partially overlap at least some openings in the array of first openings to define an array of third openings formed from the array of first openings and the array of second openings, and wherein at least a portion of the openings in the third array of openings have effective widths that are less than the minimum feature size, and wherein a plurality of the first openings have a first size, wherein a plurality of the second openings that partially overlap the plurality of first openings have a size substantially the same as the first size.

2. The layered three-dimensional structure of claim 1 wherein the three-dimensional structure comprises a filter having an effective pore size less than the minimum feature size.

3. The layered three-dimensional structure of claim 2, wherein the third openings comprise pores in the filter.

4. The layered three-dimensional structure of claim 1, wherein the first layer comprises a material selected from the group consisting of gold, silver, nickel, and copper.

5. The layered three-dimensional structure of claim 1, wherein the first layer comprises nickel.

6. The layered three-dimensional structure of claim 4, wherein the second layer comprises a material selected from the group consisting of gold, silver, nickel, and copper.

7. The layered three-dimensional structure of claim 6, wherein the second layer comprises nickel.

8. The layered three-dimensional structure of claim 1 wherein the first layer has a thickness between 1 μ

m and 20 μ

m, and wherein the second layer has a thickness between 1 μ

m and 20 μ

m.

9. The layered three-dimensional structure of claim 8, wherein the first layer is about 2 μ

m thick, and wherein the second layer is about 2 μ

m thick.