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BAW structure with reduced topographic steps and related method

  • US 8,514,033 B2
  • Filed: 09/12/2008
  • Issued: 08/20/2013
  • Est. Priority Date: 10/18/2007
  • Status: Expired due to Fees
First Claim
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1. A bulk acoustic wave (BAW) structure comprising:

  • a lower electrode situated over a substrate, said lower electrode having at least one tapered sidewall;

    a piezoelectric layer situated over said lower electrode;

    an upper electrode situated over said piezoelectric layer; and

    an acoustic mirror situated between said lower electrode and said substrate, said acoustic mirror comprising a plurality of metal segments,wherein each of said plurality of metal segments has at least one tapered sidewall, and wherein each tapered sidewall of said plurality of metal segments has a slope substantially equal to a slope of said at least one tapered sidewall of said lower electrode.

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