Antenna, semiconductor device, and method of manufacturing antenna

• US 8,528,827 B2
• Filed: 06/10/2011
• Issued: 09/10/2013
• Est. Priority Date: 06/18/2010
• Status: Expired due to Fees

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Aoki, Tomoyuki, Eguchi, Shingo, Sekiguchi, Susumu
• Primary Examiner(s): Lee, Michael G
• Assistant Examiner(s): Mikels, Matthew
• Application Number:
  US13/157,645
• Publication Number:
  US 20110309904A1
• Time in Patent Office: 823 Days
• Field of Search: 235/487, 235/492, 340/10, 340/572
• US Class Current: 235/492
• CPC Class Codes: G06K 19/077 Constructional details, e.g. mounting of circuits in the carrier
• CPC Class Codes: G06K 19/07773 Antenna details antennas for wireless devices, e.g. RFID tags, in general H01Q1/22
• CPC Class Codes: G06K 19/07794 the record carrier comprising a booster or auxiliary antenna in addition to the antenna connected directly to the integrated circuit
• CPC Class Codes: H01F 41/041 Printed circuit coils apparatus or processes for manufacturing printed circuits in general H05K3/00
• CPC Class Codes: H01F 5/003 Printed circuit coils
• CPC Class Codes: H01Q 1/2225 used in active tags, i.e. provided with its own power source or in passive tags, i.e. deriving power from RF signal
• CPC Class Codes: H01Q 7/00 Loop antennas with a substantially uniform current distribution around the loop and having a directional radiation pattern in a plane perpendicular to the plane of the loop
• CPC Class Codes: Y10T 29/49016 Antenna or wave energy "plumbing" making
• CPC Class Codes: Y10T 29/49018 with other electrical component

Abstract

In an antenna and a semiconductor device including the antenna, an object is to reduce the distance between electrodes of a capacitor as much as possible, reduce the area of the electrode of the capacitor as much as possible, and prevent the suppression of response sensitivity and a response range of the semiconductor device. The present invention relates to an antenna including an antenna coil provided over a first region of a base and a capacitor which uses a second region of the base as a dielectric body and which has electrodes provided for opposite planes of the second region of the base, wherein the second region of the base is thinner than the first region of the base, and also relates to a semiconductor device including the antenna.

Claims

1. A method of manufacturing an antenna including an antenna coil and a capacitor, comprising the steps of:

a first plane of a base with a projection portion of a roller by rotating the roller to provide the base with a dielectric body of the capacitor;

forming an opening in the base;

forming a first conductive material over the dielectric body and inside the opening;

forming a second conductive material over a second plane opposite to the first plane; and

heating the first conductive material and the second conductive material so as to form the antenna coil and an electrode of the capacitor,

wherein a thickness of the dielectric body is smaller than a thickness of the base, and

wherein the first conductive material is electrically connected to the second conductive material through the opening.

2. The method of manufacturing an antenna according to claim 1,

wherein the base is a film containing any one of polyethylene terephthalate, polyethylene naphthalate, polyether sulfone, and polyimide.

3. The method of manufacturing an antenna according to claim 1,

wherein each of the first conductive material and the second conductive material includes at least one of silver (Ag), gold (Au), copper (Cu), nickel (Ni), platinum (Pt), palladium (Pd), tantalum (Ta), molybdenum (Mo), and titanium (Ti).

4. The method of manufacturing an antenna according to claim 1,

wherein the opening is formed by a laser.

5. The method of manufacturing an antenna according to claim 1,

wherein the opening is formed by a cutter knife.

6. The method of manufacturing an antenna according to claim 1, wherein the antenna is applied to an RFID system.

7. The method of manufacturing an antenna according to claim 1, wherein the antenna is applied to a semiconductor device.

8. The method of manufacturing an antenna according to claim 1, wherein the antenna is applied to an ID tag.

9. The method of manufacturing an antenna according to claim 1,

wherein each of the first conductive material and the second conductive material is formed by any one of a screen printing method, a gravure printing method, an inkjet printing method, and a rotary screen printing method.

10. A method of manufacturing an antenna including an antenna coil and a capacitor, comprising the steps of:

pressing a first plane of a base with a projection portion of a roller by rotating the roller to provide the base with a region having a depression portion;

forming an opening in the base;

forming a first conductive material inside the depression portion and the opening;

forming a second conductive material over a second plane opposite to the first plane; and

heating the first conductive material and the second conductive material so as to form the antenna coil and an electrode of the capacitor,

wherein the region having the depression portion serves as a dielectric body of the capacitor,

wherein a thickness of the dielectric body is smaller than a thickness of the base, and

wherein the first conductive material is electrically connected to the second conductive material through the opening.

11. The method of manufacturing an antenna according to claim 10,

wherein an inside of the depression portion is filled with the first conductive material.

12. The method of manufacturing an antenna according to claim 10,

wherein the base is a film containing any one of polyethylene terephthalate, polyethylene naphthalate, polyether sulfone, and polyimide.

13. The method of manufacturing an antenna according to claim 10,

wherein the opening is formed by a laser.

14. The method of manufacturing an antenna according to claim 10, wherein the antenna is applied to an RFID system.

15. The method of manufacturing an antenna according to claim 10,

wherein each of the first conductive material and the second conductive material is formed by any one of a screen printing method, a gravure printing method, an inkjet printing method, and a rotary screen printing method.

16. A method of manufacturing an antenna including an antenna coil and a capacitor, comprising the steps of:

pressing a first plane of a base with a projection portion of a roller by rotating the roller to provide the base with a dielectric body of the capacitor;

forming an opening in the base;

attaching a supporting base to a second plane opposite to the first plane;

forming a first conductive material over the dielectric body and inside the opening;

separating the supporting base from the second plane;

forming a second conductive material over the second plane; and

heating the first conductive material and the second conductive material so as to form the antenna coil and an electrode of the capacitor,

wherein a thickness of the dielectric body is smaller than a thickness of the base, and

wherein the first conductive material is electrically connected to the second conductive material through the opening.

17. The method of manufacturing an antenna according to claim 16,

wherein the base is a film containing any one of polyethylene terephthalate, polyethylene naphthalate, polyether sulfone, and polyimide.

18. The method of manufacturing an antenna according to claim 16,

wherein the opening is formed by a laser.

19. The method of manufacturing an antenna according to claim 16, wherein the antenna is applied to an RFID system.

20. The method of manufacturing an antenna according to claim 16,

wherein each of the first conductive material and the second conductive material is formed by any one of a screen printing method, a gravure printing method, an inkjet printing method, and a rotary screen printing method.