Equipment and methods for etching of MEMS

• US 8,536,059 B2
• Filed: 02/18/2008
• Issued: 09/17/2013
• Est. Priority Date: 02/20/2007
• Status: Expired due to Fees

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: Qualcomm MEMS Technologies Incorporated (Qualcomm, Inc.)
• Inventors: Alam, Khurshid Syed, Gousev, Evgeni, Mignard, Marc Maurice, Heald, David, Londergan, Ana R., Floyd, Philip Don
• Primary Examiner(s): Deo, Duy
• Application Number:
  US12/527,864
• Publication Number:
  US 20100219155A1
• Time in Patent Office: 2,038 Days
• Field of Search: None
• US Class Current: 438/706
• CPC Class Codes: B81B 2201/047 Optical MEMS not provided for in B81B2201/042 - B81B2201/045
• CPC Class Codes: B81C 1/00531 Dry etching
• CPC Class Codes: H01L 21/67069 for drying etching

Abstract

Etching equipment and methods are disclosed herein for more efficient etching of sacrificial material from between permanent MEMS structures. An etching head includes an elongate etchant inlet structure, which may be slot-shaped or an elongate distribution of inlet holes. A substrate is supported in proximity to the etching head in a manner that defines a flow path substantially parallel to the substrate face, and permits relative motion for the etching head to scan across the substrate.

Claims

1. A method for etching a microelectromechanical systems (MEMS) device comprising:

providing a substrate comprising a MEMS device formed on a surface thereof, wherein the MEMS device comprises a sacrificial material disposed between two electrodes;

relatively moving an etching gas inlet and the substrate;

directing a gas stream comprising a gas phase etchant at a surface of the MEMS device through the etching gas inlet, wherein directing the gas stream comprises flowing at least a portion of the gas stream along at least one flow guide surface arranged adjacent to the etching gas inlet, and the flow guide surface is configured to guide the gas stream from the etching gas inlet substantially parallel to the substrate, wherein the first flow guide surface and a height between the first flow guide surface and the substrate define an active etching zone with an aspect ratio of a width of the first flow guide surface to the height greater than about 10;

1; and

selectively etching to remove the sacrificial material from between the two electrodes of the MEMS.

2. The method of claim 1, wherein selectively etching further comprises selectively removing a second sacrificial layer formed over a reflective layer, wherein the reflective layer is part of one of the two electrodes.

3. The method of claim 1, wherein directing the gas stream comprises directing a gas stream comprising an inert gas.

4. The method of claim 1, wherein directing the gas stream comprises directing a gas stream with a substantially laminar flow.

5. The method of claim 1, wherein directing the gas stream comprises directing a gas stream comprising xenon difluoride.

6. The method of claim 1, wherein directing the gas stream comprises flowing the gas stream normal to a surface of the MEMS device.

7. The method of claim 1, wherein directing the gas stream through the etching gas inlet comprises directing a gas stream through an elongate etching gas inlet.

8. The method of claim 7, wherein directing the gas stream through the elongate etching gas inlet comprises directing the gas stream through a slot-shaped nozzle.

9. The method of claim 8, wherein directing the gas stream through the slot-shaped nozzle comprises positioning substantially an entire longitudinal axis of the elongate etching gas inlet proximal to a surface of the MEMS device.

10. The method of claim 8, wherein directing the gas stream through the slot-shaped nozzle comprises directing the gas stream through a gas curtain nozzle.

11. The method of claim 7, wherein directing the gas stream through the elongate inlet comprises directing the gas stream through an elongate gas inlet at least as long as a dimension of the substrate.

12. The method of claim 1, wherein selectively etching comprises forming one or more cavities in the MEMS device.

13. The method of claim 1, wherein relatively moving the etching gas inlet and the substrate comprises relatively moving the etching gas inlet and the substrate in a direction orthogonal to a long dimension of the etching gas inlet.

14. The method of claim 1, wherein relatively moving the etching gas inlet and the substrate comprises scanning the substrate under the etching gas inlet.

15. The method of claim 1, wherein directing the gas stream, and relatively moving the etching gas inlet and the substrate occur contemporaneously.

16. The method of claim 1, further comprising withdrawing at least a portion of the gas stream through at least one exhaust opening.

17. The method of claim 16, wherein withdrawing at least the portion of the gas stream further comprises withdrawing an etching by-product.

21. The method of claim 1, wherein the MEMS device comprises an interferometric modulator.

18. A method for etching a microelectromechanical systems (MEMS) device comprising:

providing a substrate having a MEMS device formed on a surface of the substrate, wherein the MEMS device comprises a sacrificial material disposed between two electrodes;

directing a gas stream comprising a gas phase etchant towards the MEMS device through an etching gas inlet, wherein directing the gas stream comprises flowing the gas stream along at least one flow guide surface arranged adjacent to the etching gas inlet, and the flow guide surface is configured to guide the gas stream from the etching gas inlet substantially parallel to the substrate, wherein the first flow guide surface and a height between the first flow guide surface and the substrate define an active etching zone with an aspect ratio of a width of the first flow guide surface to the height greater than about 10;

1;

selectively etching to remove the sacrificial material from between the two electrodes with the gas phase etchant; and

withdrawing at least a portion of the gas stream, contemporaneously with directing the gas stream, through at least one exhaust opening.

19. The method of claim 18, wherein the MEMS device comprises an interferometric modulator.

20. The method of claim 18, wherein directing the gas stream comprises directing the gas stream through a gas curtain nozzle.