Electrical routing
First Claim
Patent Images
1. A device comprising:
- a MEMS device formed of a first conductive material;
a first trench formed in the MEMS device;
a second trench formed in the MEMS device;
a layer of non-conductive material formed in the first trench and the second trench;
a second conductive material formed upon the non-conductive material in the first trench and the second trench;
wherein the first trench and the second trench each have a substantially uniform thickness; and
wherein the second conductive material in the first trench is electrically isolated from the second conductive material in the second trench and from the first conductive material.
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Accused Products
Abstract
An electronic device may have a MEMS device formed of a first conductive material. A trench may be formed in the MEMS device. A layer of non-conductive material may be formed in the trench. A second conductive material may be formed upon the non-conductive material.
131 Citations
33 Claims
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1. A device comprising:
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a MEMS device formed of a first conductive material; a first trench formed in the MEMS device; a second trench formed in the MEMS device; a layer of non-conductive material formed in the first trench and the second trench; a second conductive material formed upon the non-conductive material in the first trench and the second trench; wherein the first trench and the second trench each have a substantially uniform thickness; and wherein the second conductive material in the first trench is electrically isolated from the second conductive material in the second trench and from the first conductive material. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A system comprising:
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an actuator device formed of a first conductive material; a first trench formed in the actuator device; a second trench formed in the actuator device; a layer of non-conductive material formed in the first trench and the second trench; a second conductive material formed upon the non-conductive material in the first trench and the second trench; wherein the first trench and the second trench each have a substantially uniform thickness; and wherein the second conductive material in the first trench is electrically isolated from the second conductive material in the second trench and from the first conductive material. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
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23. A method comprising:
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forming a first trench in a MEMS device formed of a first conductive material; forming a second trench in the MEMS device; forming a layer of non-conductive material in the first trench and the second trench; forming a second conductive material over the non-conductive material in the first trench and the second trench; wherein the first trench and the second trench each have a substantially uniform thickness; and wherein the second conductive material in the first trench is electrically isolated from the second conductive material in the second trench and from the first conductive material. - View Dependent Claims (24, 25, 26, 27, 28)
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29. A method comprising:
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communicating a plurality of different voltages to an actuator of an actuator device formed of a first conductive material and a second conductive material, wherein the communicating of the plurality of different voltages is via the second conductive material formed in a plurality of trenches of the actuator device; moving a platform via the actuator in response to the communicated voltages; wherein the plurality of trenches comprise; a first trench formed in the actuator device; a second trench formed in the actuator device; a layer of non-conductive material formed in the first trench and the second trench; wherein the first trench and the second trench each have a substantially uniform thickness; wherein the second conductive material is formed upon the non-conductive material in the first trench and the second trench; and wherein the second conductive material in the first trench is electrically isolated from the second conductive material in the second trench and from the first conductive material. - View Dependent Claims (30, 31, 32)
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33. A device comprising:
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a MEMS device formed of a first conductive material; a first trench formed in the MEMS device; a second trench formed in the MEMS device; a layer of non-conductive material formed in the first trench and the second trench; a second conductive material formed upon the non-conductive material in the first trench and the second trench; wherein the first trench and the second trench each have a substantially uniform thickness; and wherein the second trench extends completely through the first conductive material and separates the first conductive material into two separate portions.
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Specification